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Transactions of Nonferrous Metals Society of China 2015年第6期25卷 1944-1949页

作者：安全长冯凯吕和平蔡珣孙铁囤朱剑豪上海交通大学材料科学与工程学院上海市激光制造与材料改性重点实验室上海200240 香港城市大学物理与材料科学系香港999077 常州亿晶光电科技有限公司常州213200

A1 and N were introduced into copper substrate using plasma immersion ion implantation （PIII） in order to enhance its hardness and oxidation resistance. The dosage of N ion is 5 × 1016 cm-2, and range of dosage of A1 ion is 5× 1016-2× 1017 cm-2. The oxidation tests indicate that the copper samples after undergoing PIII possess higher oxidation resistance. The degree of oxidation resistance is found to vary with implantation dosage of AI ion. The antibacterial tests also reveal that the plasma implanted copper specimens have excellent antibacterial resistance against Staphylococcus aureus, which are similar to pure copper.

关键词： copper plasma immersion ion implantation nanoindentation oxidation resistance antibacterial properties

Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation

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Chinese Physics B 2014年第11期23卷 661-665页

作者：沈泽南夏洋刘邦武刘金虎李超波李勇滔 Key Laboratory of Microelectronics Devices and Integrated Technology Institute of MicroelectronicsChinese Academy of Sciences

Emitted multi-crystalline silicon and black silicon solar cells are conformal doped by ion implantation using the plasma immersion ion implantation （PⅢ） technique. The non-uniformity of emitter doping is lower than 5 %. The secondary ion mass spectrometer profile indicates that the PⅢ technique obtained 100-rim shallow emitter and the emitter depth could be impelled by furnace annealing to 220 nm and 330 nm at 850 ℃ with one and two hours, respectively. Furnace annealing at 850 ℃ could effectively electrically activate the dopants in the silicon. The efficiency of the black silicon solar cell is 14.84% higher than that of the mc-silicon solar cell due to more incident light being absorbed.

关键词： solar cells plasma immersion ion implantation conformal doping black silicon

Effect of Yttrium Pre-implantation on implantation Behavior of Ti-6Al-4V Alloy in Nitrogen plasma immersion ion implantation

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Journal of Rare Earths 2001年第1期19卷 40-43页

作者：王浪平唐保茵王小锋王松岩 Harbin Inst. of Technol. Harbin 150001 China

In order to increase the peak depth of nitrogen atoms during the nitrogen plasma immersion ion implantation of Ti-6Al-4V alloy, the rare earth metal yttrium was applied. In the experiment, yttrium and nitrogen ions were implanted under the voltage of 20 and 30 kV, respectively. In the samples with yttrium pre-implantation for 30 min, the Anger electron spectroscopy (AES) analysis shows that the peak depth of the nitrogen atoms increases from 50 up to 100 nm. It can also be seen from the tribological tests that the wear resistance of these samples is increased remarkably.

关键词： rare earths yttrium plasma immersion ion implantation peak depth

Work Function Enhancement of Indium Tin Oxide via Oxygen plasma immersion ion implantation

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plasma Science and Technology 2013年第8期15卷 791-793页

作者：高欢忠何龙何志江李泽斌吴忠航成卫海艾畦范晓轩区琼荣梁荣庆 Department of Illuminating Engineering and Light Sources Institute for Electric Light SourcesFudan University

Indium tin oxide （ITO） transparent conducting film was treated with oxygen plasma immersion ion implantation （PIII）. X-ray photoelectron spectroscopy （XPS） was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.

关键词： plasma immersion ion implantation surface treatment work function indium tin oxide

Development and experimental study of large size composite plasma immersion ion implantation device

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plasma Science and Technology 2018年第1期20卷 90-94页

作者：宋法伦李飞朱明冬王浪平张北镇龚海涛甘延青金晓 Science and Technology on High Power Microwave Laboratory Institute of Applied ElectronicsCAEP State Key Laboratory of Advanced Welding and Joining Harbin Institute of Technology

plasma immersion ion implantation （PI） overcomes the direct exposure limit of traditional beam- line ion implantation, and is suitable for the treatment of complex work-piece with large size. Pm technology is often used for surface modification of metal, plastics and ceramics. Based on the requirement of surface modification of large size insulating material, a composite full-directional PHI device based on RF plasma source and metal plasma source is developed in this paper. This device can not only realize gas ion implantation, but also can realize metal ion implantation, and can also realize gas ion mixing with metal ions injection. This device has two metal plasma sources and each metal source contains three cathodes. Under the condition of keeping the vacuum unchanged, the cathode can be switched freely. The volume of the vacuum chamber is about 0.94 m3, and maximum vacuum degree is about 5 x10-4 Pa. The density of RF plasma in homogeneous region is about 109 cm-3, and plasma density in the ion implantation region is about 101x cm-3. This device can be used for large-size sample material PHI treatment, the maximum size of the sample diameter up to 400 mm. The experimental results show that the plasma discharge in the device is stable and can run for a long time. It is suitable for surface treatment of insulating materials.

关键词： plasma immersion ion implantation cathode arc metal plasma source RF plasmasource surface modification

ion HEATING PROCESS DURING plasma immersion ion implantation

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Acta Metallurgica Sinica(English Letters) 2000年第2期13卷 734-739页

作者： X.B. Tian, X.F. Wang, A.G. Liu, L.P. Wang, S. Y. Wang, B. Y. Tang and P. K. Chu 1)Advanced Welding Production & Technology National Key Laboratory, Harbin Institute of Technology, Harbin 150001, China 2)Department of Physics & Materials Science, City Uni

The research on plasma immersion ion implantation has been conducted for a little over ten years. Much is needed to investigate including processing technlogy, plasma sheath dynamics, interaction of plasma and surface, etc. Of the processing methods elavated temperature technique is usually used in PIII to produce a thick modified layer by means of the thermal diffusion. Meanwhile plasma ion heating is more recently developed by Ronghua Wei et al[1]. Therefore the temeperature is a critical parameter in plasma ion processing. In this paper we present the theoretical model and analysize the effect of imlantation voltage, plasma density, ion mass,etc on the temperature rise.

关键词： plasma immersion ion implantation ion heating temperature

TWO-DIMENSionAL NUMERICAL ANALYSIS OF plasma immersion ion implantation OF CYLINDRICAL BORES

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Acta Metallurgica Sinica(English Letters) 2000年第2期13卷 740-745页

作者： A. G. Liu,X.F. Wang, L.P. Wang, S. Y. Wang, B. Y. Tang and P.K. Chu 1) Advanced Welding Production Technology National Key Laboratory, HIT, Harbin 150001, China 2) Department of Physics and Material Science, City University of Hong Kong, 83 Tat Chee Aven

plasma immersion ion implantation (PIII), unrestricted by sight-light process, is considered a proper method for inner surface strengthening. Two-dimensional simulation oj inner surface PIII process of cylindrical bores were carried out in this paper using cold plasma fluid model, and influence of the bore's dimension on impact energy, retained dose and uniformity of inner surface were investigated.

关键词： plasma immersion ion implantation plasma sheath inner surface modification computer simulation

Bioactivity and antibacterial effect of nitrogen plasma immersion ion implantation on PEEK of dental implant materials

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Bioactivity and antibacterial effect of nitrogen plasma imme...

Enhancing cell adhesive and antibacterial activities of glass-fibre-reinforced polyetherketoneketone through Mg and Ag PIII

中华口腔医学会全科口腔医学专业委员会第八次学术会议

作者：甘抗朱娟芳赵红宇郑州大学第一附属医院

Objective:The aim of this present study was to investigate the bioactivity and antibacterial effect of nitrogen Pill modification on ***,we lay a foundation for their widespread clinical application of PEEK and its composites in the field of dental implant,bone defect repair and joint ***:According to the different modified parameters,the PEEK specimens were randomly divided into four main groups(n=49/group):PEEK-C,PEEK-1,PEEK-L,and ***,N2-PIII surface modification was conducted using the corresponding *** microstructure and composition of the modified PEEK surface was observed by scanning electron microscope(SEM),atomic force microscopy(AFM) and X-ray photoelectron spectroscopy(XPS).The water contact angle of the PEEK surface was also studied by contact angle *** bioactive ability of PEEK samples was evaluated by observing the attachment,proliferation,and differentiation of MG63 cells cultured on the PEEK *** property of the samples against Staphylococcus aureus was detected with the plate colony-counting ***:SEM and AFM analysis shows that PEEK-C surface is relatively smooth with the Ra value of 50.6±2.52 ***-1 and PEEK-L surface is rough with the Ra value of 435.916.47 nm and443.2315.49 nm,respectively,and the PEEK-H surface is the most rough with the Ra value of 608.4±3.14 *** element analysis demonstrated that nitrogen functional groups were successfully introduced into the surface of PIII-modified *** evaluation and the antibacterial results showed that nitrogen Pill treatment can significantly improve the biological activity of PEEK,and samples showed antibacterial properties against Staphylococcus ***:PEEK surface subjected to the N2-PIII treatment showed better biological activity and antibacterial ***,N2-PIII-treated PEEK surface is promising in bone tissue engineering and dental applications.

关键词： plasma immersion ion implantation bioactivity antibacterial

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Regenerative Biomaterials 2023年第1期10卷 1278-1293页

作者： Xin Tan Zhongyi Wang Xin Yang Ping Yu Manlin Sun Yuwei Zhao Haiyang Yu State Key Laboratory of Oral Diseases National Clinical Research Center for Oral DiseasesWest China Hospital of StomatologySichuan UniversityChengduChina Chongqing Key Laboratory of Oral Diseases and Biomedical Sciences College of StomatologyChongqing Medical UniversityChongqingChina Jiangsu Key Laboratory of Oral Diseases Affiliated Hospital of StomatologyNanjing Medical UniversityNanjingChina Department of Stomatology Chengdu Second People’s HospitalChengduChina

Glass-fibre-reinforced polyetherketoneketone(PEKK-GF)shows great potential for application as a dental implant restoration material;however,its surface bioinertness and poor antibacterial properties limit its integration with peri-implant soft tissue,which is critical in the long-term success of implant ***,functional magnesium(Mg)and silver(Ag)ions were introduced into PEKK-GF by plasma immersion ion implantation(PIII).Surface characterization confirmed that the surface morphology of PEKK-GF was not visibly affected by PIII *** tests revealed that PIII changed the wettability and electrochemical environment of the PEKK-GF surface and enabled the release of Mg^(2+)and Ag^(+)modulated by Giavanni *** vitro experiments showed that Mg/Ag PIII-treated PEKK-GF promoted the proliferation and adhesion of human gingival fibroblasts and upregulated the expression of adhesion-related genes and *** addition,the treated samples inhibited the metabolic viability and adhesion of Streptococcus mutans and Porphyromonas gingivalis on their surfaces,distorting bacterial ***/Ag PIII surface treatment improved the soft tissue integration and antibacterial activities of PEKK-GF,which will further support and broaden its adoption in dentistry.

关键词： glass-fibre-reinforced polyetherketoneketone plasma immersion ion implantation human gingival fibroblasts antibacterial activity

Development of tropoelastin-functionalized anisotropic PCL scaffolds for musculoskeletal tissue engineering

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Regenerative Biomaterials 2023年第1期10卷 64-72页

作者： Miao Zhang Ziyu Wang Anyu Zhang Linyang Liu Suzanne M.Mithieux Marcela M.M.Bilek Anthony S.Weiss Charles Perkins Centre The University of SydneySydneyNSW 2006Australia School of Life and Environmental Sciences The University of SydneySydneyNSW 2006Australia Applied and plasma Physics Laboratory School of PhysicsThe University of SydneySydneyNSW 2006Australia School of Biomedical Engineering The University of SydneySydneyNSW 2006Australia Sydney Nano Institute The University of SydneySydneyNSW 2006Australia

The highly organized extracellular matrix(ECM)of musculoskeletal tissues,encompassing tendons,ligaments and muscles,is structurally anisotropic,hierarchical and *** features collectively contribute to their unique *** studies have investigated the effect of tissue-engineered scaffold anisotropy on cell morphology and organization for musculoskeletal tissue repair and regeneration,but the hierarchical arrangement of ECM and compartmentalization are not typically ***,we present a method for multi-compartmental scaffold design that allows for physical mimicry of the spatial architecture of musculoskeletal tissue in regenerative *** design is based on an ECM-inspired macromolecule ***(PCL)scaffolds were fabricated with aligned fibers by electrospinning and mechanical stretching,and then surface-functionalized with the cell-supporting ECM protein molecule,tropoelastin(TE).TE was attached using two alternative methods that allowed for either physisorption or covalent attachment,where the latter was achieved by plasma ion immersion implantation(PIII).Aligned fibers stimulated cell elongation and improved cell alignment,in contrast to randomly oriented *** coatings bound by physisorption or covalently following 200 s PIII treatment promoted fibroblast *** represents the first cytocompatibility assessment of novel PIII-treated TE-coated PCL *** demonstrate their versatility,these 2D anisotropic PCL scaffolds were assembled into 3D hierarchical constructs with an internally compartmentalized structure to mimic the structure of musculoskeletal tissue.

关键词： tropoelastin PCL musculoskeletal tissue engineering plasma immersion ion implantation electrospinning anisotropy hierarchical