Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation

作     者：高欢忠 何龙 何志江 李泽斌 吴忠航 成卫海 艾畦 范晓轩 区琼荣 梁荣庆 

作者机构：Department of Illuminating Engineering and Light SourcesInstitute for Electric Light SourcesFudan University 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2013年第15卷第8期

页      面：791-793页

核心收录：

学科分类：07[理学] 070204[理学-等离子体物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：supported by National Natural Science Foundation of China(Nos.11005021 51177017 and 11175049) 

主　　题：plasma immersion ion implantation surface treatment work function indium tin oxide 

摘      要：Indium tin oxide （ITO） transparent conducting film was treated with oxygen plasma immersion ion implantation （PIII）. X-ray photoelectron spectroscopy （XPS） was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.