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Broadband high-efficiency dielectric metalenses based on quasi-continuous nanostrips

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Opto-Electronic Advances 2024年第5期7卷 43-51页

作者： Xiaohu Zhang Qinmiao Chen Dongliang Tang Kaifeng Liu Haimo Zhang Lintong Shi Mengyao He Yongcai Guo Shumin Xiao key laboratory of optoelectronic technology and systems of the Education Ministry of China Chongqing UniversityChongqing 400044China Ministry of Industry and Information technology key Lab of micro-nano Optoelectronic Information system Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic SystemsHarbin Institute of TechnologyShenzhen 518055China key laboratory for micro/nano Optoelectronic Devices of Ministry of Education&Hunan Provincial key laboratory of Low-Dimensional Structural Physics and Devices School of Physics and ElectronicsHunan UniversityChangsha 410082China

Benefiting from the abrupt phase changes within subwavelength thicknesses,metasurfaces have been widely applied for lightweight and compact optical *** broadband and high-efficiency characteristics are highly attractive for the practical implementation of ***,current metasurface devices mostly adopt discrete micro/nano structures,which rarely realize both merits *** this paper,dielectric metasurfaces composed of quasi-continuous nanostrips are proposed to overcome this *** quasi-continuous nanostrips metasurface,a normal focusing metalens and a superoscillatory lens overcoming the diffraction limit are designed and experimentally *** quasi-continuous metadevices can operate in a broadband wavelength ranging from 450 nm to 1000nm and keep a high power *** average efficiency of the fabricated metalens reaches 54.24%,showing a significant improvement compared to the previously reported metalenses with the same *** proposed methodology can be easily extended to design other metadevices with the advantages of broadband and high-efficiency in practical optical systems.

关键词： broadband high-efficiency metalens sub-diffraction quasi-continuous

Implantable probe with integrated reference electrode for in situ neural signal and calcium ion monitoring

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Bio-Design and Manufacturing 2024年第4期7卷 591-595页

作者： Junyu Xiao Mengfei Xu Longchun Wang Bin Yang Jingquan Liu National key laboratory of Advanced micro and nano Manufacture technology Shanghai Jiao Tong UniversityShanghai 200240China Department of micro/nano Electronics Shanghai Jiao Tong UniversityShanghai 200240China

Monitoring the electrophysiology activity of neurons and blood calcium signals can enable a better understanding of disease-related neural system ***,currently,in situ calcium ion monitoring tools are scarce and exhibit low integration and limited *** this letter,we propose an implantable probe with an integrated in situ Ag/AgCl reference electrode(ISA/ARE)that can monitor action potential(AP)and Ca^(2+) concentrations.

关键词： neural electrode enable

Spatially selective p-type doping for constructing lateral WS_(2) p-n homojunction via low-energy nitrogen ion implantation

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Light(Science & Applications) 2024年第6期13卷 1159-1169页

作者： Yufan Kang Yongfeng Pei Dong He Hang Xu Mingjun Ma Jialu Yan Changzhong Jiang Wenqing Li Xiangheng Xiao School of Physics and technology Key Lab of Artificial Micro-and Nano-Structures of Ministry of EducationWuhan UniversityWuhanChina

The construction of lateral p-n junctions is very important and challenging in two-dimensional(2D)semiconductor manufacturing *** researches have demonstrated that vertical p-n junction can be prepared simply by vertical stacking of 2D ***,interface pollution and large area scalability are challenges that are difficult to overcome with vertical stacking *** 2D lateral p-n homojunction is an effective strategy to address these *** selective p-type doping of 2D semiconductors is expected to construct lateral p-n *** this work,we have developed a low-energy ion implantation system that reduces the implanted energy to 300 ***-energy implantation can form a shallow implantation depth,which is more suitable for modulating the electrical and optical properties of 2D ***,we utilize low-energy ion implantation to directly dope nitrogen ions into few-layer WS_(2) and successfully realize a precise regulation for WS_(2) with its conductivity type transforming from n-type to bipolar or even p-type ***,the universality of this method is demonstrated by extending it to other 2D semiconductors,including WSe_(2),SnS_(2) and MoS_(2).Based on this method,a lateral WS_(2) p-n homojunction is fabricated,which exhibits significant rectification characteristics.A photodetector based on p-n junction with photovoltaic effect is also prepared,and the open circuit voltage can reach to 0.39 *** work provides an effective way for controllable doping of 2D semiconductors.

关键词： implantation doping Spatial

An electrochemiluminescent magneto-immunosensor for ultrasensitive detection of hs-cTnI on a microfluidic chip

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nanotechnology and Precision Engineering 2024年第3期7卷 13-23页

作者： Yun Hui Zhen Zhao Weiliang Shu Fengshan Shen Weijun Kong Shengyong Geng Zhen Xu Tianzhun Wu Wenhua Zhou Xuefeng Yu Shenzhen key laboratory of micro/nano Biosensing Shenzhen Institutes of Advanced TechnologyChinese Academy of SciencesShenzhen 518055China Shenzhen Institutes of Advanced technology Chinese Academy of SciencesShenzhen 518055China Biomedical Imaging Science and system key laboratory Chinese Academy of SciencesShenzhen 518055China

Sensitive detection and precise quantitation of trace-level crucial biomarkers in a complex sample matrix has become an important area of *** example,the detection of high-sensitivity cardiac troponin I (hs-cTnI) is strongly recommended in clinical guidelines for early diagnosis of acute myocardial *** on the use of an electrode modified by single-walled carbon nanotubes (SWCNTs) and a Ru(bpy)32+-doped silica nanoparticle (Ru@SiO2)/tripropylamine (TPA) system,a novel type of electrochemiluminescent (ECL) magnetoimmunosensor is developed for ultrasensitive detection of *** this approach,a large amount of[Ru(bpy)3]2+is loaded in SiO2(silica nanoparticles) as luminophores with high luminescent efficiency and SWCNTs as electrode surface modification material with excellent electrooxidation ability for ***,a hierarchical micropillar array of microstructures is fabricated with a magnet placed at each end to efficiently confine a single layer of immunomagnetic microbeads on the surface of the electrode and enable 7.5-fold signal enhancement In particular,the use of transparent SWCNTs to modify a transparent ITO electrode provides a two-order-of-magnitude ECL signal amplification.A good linear calibration curve is developed for hs-cTnI concentrations over a wide range from 10 fg/ml to 10 ng/ml,with the limit of detection calculated as 8.720 fg/ml (S/N=3).This ultrasensitive immunosensor exhibits superior detection performance with remarkable stability,reproducibility,and *** recoveries are obtained in the detection of hs-cTnI in human serum,providing a potentia analysis protocol for clinical applications.

关键词： Electrochemiluminescent magneto-immunosensor microﬂuidic chip High-sensitivity cardiac troponin I Single-walled carbon nanotube [Ru(bpy)3]2+-doped silica nanoparticle

A strong physical unclonable function with machine learning immunity for Internet of Things application

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Science China(Information Sciences) 2024年第1期67卷 271-283页

作者： Pengpeng REN Yongkang XUE Linglin JING Lining ZHANG Runsheng WANG Zhigang JI National key laboratory of Science and technology on micro/nano Fabrication Shanghai Jiao Tong University Department of micro/nano Electronics Shanghai Jiao Tong University School of Electronic and Computer Engineering Peking University School of Integrated Circuits Peking University

The physical unclonable functions(PUFs) are novel cryptographic primitives in modern hardware security *** with traditional alternatives based on digital keys and non-volatile memory(NVM),the PUF system shows great unclonability,high efficiency,and physical attack ***,the conventional PUF design suffers from weak machine learning immunity,high storage overhead,and unreliability,making it difficult to implement in the Internet of Things(Io T) and edge computing *** paper presents a new PUF design that could solve the proposed *** utilizing the emission probability of traps commonly found in nano-scaled transistors,a model-based PUF system with strong machine learning resistance could be *** PUF design,called Prob-PUF,needs fewer challengeresponse pairs(CRPs) space and reveals superior resistance to modeling attacks due to the mixture of stable/random bits in its output ***,the Prob-PUF system could reach a high level of uniqueness and robustness,making it a potential candidate for future cryptographically secured protocols within the IoT.

关键词： physical unclonable function (PUF) electron traps authentication encryption cryptography security

A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement

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microsystems & nanoengineering 2024年第2期10卷 47-56页

作者： Lu Tian Haitao Zhao Qiang Shen Honglong Chang Ministry of Education key laboratory of micro and nano systems for Aerospace School of Mechanical EngineeringNorthwestern Polytechnical UniversityXi’an710072China

A surface acoustic wave(SAW)gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope *** a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system(MEMS)***,for the first time,we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers(FIDTs).Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves,which cause beam deflection and result in energy dissipation,this study uses FIDTs to concentrate the SAW energy based on structural features,resulting in better focusing performance and increased SAW *** experimental results reveal that the sensitivity of the structure is 1.51µV/(°/s),and the bias instability is 0.77°/s,which are improved by an order of magnitude compared to those of a traditional SAW ***,the FIDT component can enhance the performance of the SAW gyroscope,demonstrating its superiority for angular velocity *** work provides new insights into improving the sensitivity and performance of SAW gyroscopes.

关键词： angular deflection gyroscope

Singularity analysis and avoidance for an SSRMS-type reconfigurable space manipulator with a non-spherical wrist and two lockable passive telescopic links

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Chinese Journal of Aeronautics 2024年第8期37卷 435-459页

作者： Zhiyuan ZHAO Xiaohang YANG Yuntao LI Zichun XU Jingdong ZHAO Hong LIU State key laboratory of Robotics and system Harbin Institute of TechnologyHarbin 150001China

This study focuses on addressing kinematic singularity analysis and avoidance issues for a space station remote manipulator system(SSRMS)-type reconfigurable space *** manipulator is equipped with a non-spherical wrist and two lockable passive telescopic links(LPTLs),which enable it to have both active revolute and passive prismatic joints and operate in two distinct *** begin with the kinematic singularity analysis,the study derives the differential kinematic equations for the manipulator and identifies the dominant Jacobian matrix that causes ***,an in-depth analysis of singularities from multiple perspectives is ***,a kinematic singularity map method is proposed to capture the distribution of singularities within the reachable ***,the influence of the two LPTLs on singularities is thoroughly ***,a new method based on the matrix rank equivalence principle is introduced to determine singularity conditions,enabling the identification of all the singular configurations for the SSRMS-type reconfigurable ***,this method significantly reduces computational complexity,and the singularity conditions obtained have more concise *** the singularity avoidance problem,a novel method is developed,which simultaneously addresses the requirements of real-time performance,high precision,and the avoidance of both kinematic singularities and joint limit *** from these excellent properties,the proposed method can effectively resolve the singularity issues encountered separately by the SSRMS-type reconfigurable manipulator in its two operational *** typical simulations validate the utility of all the proposed methods.

关键词： Reconfigurable space manipulator Redundant manipulator Kinematics Singularity analysis Singularity avoidance

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

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microsystems & nanoengineering 2024年第3期10卷 169-180页

作者： Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu Ningbo Institute of Northwestern Polytechnical University College of Mechanical EngineeringNorthwestern Polytechnical University710072 Xi’anChina key laboratory of micro/nano systems for Aerospace(Ministry of Education) Shaanxi Province Key Laboratory of Micro and Nanoelectromechanical SystemsNorthwestern Polytechnical University710072 Xi’anChina

As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many ***,two crucial challenges exist in the fabrication of such devices:the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual *** solve these issues,an innovative processing method assisted by temporary anchors is *** approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon ***,these temporary anchors are strategically placed within the primary etching areas,enabling easy removal without additional processing *** a result,we successfully achieved wafer-level,high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%.Demonstrating superior capabilities to those of original MMAs,our enhanced version boasts a total of 60 linear micromirror elements,each featuring a length-to-width ratio of 52.6,and the entire optical aperture measures 5 mm×6 *** linear MMA exhibits an optical deflection angle of 20.4°at 110 Vdc while maintaining exceptional deflection flatness and *** study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields,and the proposed MMA is promising as a replacement for digital micromirror devices(DMDs,by TI Corp.)in fields such as spectral imaging and optical communication.

关键词： mirror exceptional anodic

A versatile humanoid robot platform for dexterous manipulation and human-robot collaboration

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CAAI Transactions on Intelligence technology 2024年第2期9卷 526-540页

作者： Xin Shu Fenglei Ni Xinyang Fan Shuai Yang Changyuan Liu Baoxu Tu Yiwei Liu Hong Liu State key laboratory of Robotics and system Harbin Institute of TechnologyHarbinChina

Humanoid robots have attracted much attention by virtue of their compatibility with human ***,biped humanoids with immense promise still cannot function steadily and reliably in real-world settings in the current ***,rationally combining a humanoid robot with different stable mobile platforms is a favoured solution for diverse ***,a new versatile humanoid robot platform,aiming to provide a generic solution that can be flexibly deployed in diverse scenarios,for example,indoors and fields is *** humanoid robot platform incorporates multimodal perception,and extensible interfaces on hardware and software,allowing it to be rapidly integrated with different mobile platforms and end-effectors,only through easyto-assemble ***,the platform has achieved impressive integration,lightness,dexterity,and strength in its class,with human-like size and rich perception,targeted to have human-intelligent manipulation skills for human-engineered ***,this article elaborates on the reasoning behind the design choices,and outlines each ***,the essential performance of the platform is successfully demonstrated in a set of experiments with precise and dexterous manipulation,and human–robot collaboration requirements.

关键词： intelligent robots robotics