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Chinese Optics Letters 2024年第5期22卷 22-28页

作者：蒲正宇蒋林闫连山易安林何海军潘炜罗斌 center for Information photonics&Communications School of Information Science and TechnologySouthwest Jiaotong UniversityChengdu 611756China

For joint modulation format identification(MFI)and optical signal-to-noise ratio(OSNR)monitoring,a simple and intelligent optical communication performance monitoring method is proposed,and the feasibility is demonstrated by digital coherent optical communication *** experiment results show that for all modulation formats,including 28 GBaud polarization division multiplexing(PDM)QPSK/8-QAM/16-QAM/64-QAM,100%MFI accuracies are achieved even at OSNR values lower than the corresponding theoretical 20%forward error correction limit,as well as the high accuracies for OSNR ***,the proposed scheme has a reasonable monitoring level when chromatic dispersion and fiber nonlinear effects are varied.

关键词： coherent communication optical performance monitoring deep neural network

Multi-focus non-periodic scanning method for femtosecond lasers based on DMD and galvanometer scanners[Invited]

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Chinese Optics Letters 2024年第5期22卷 89-94页

作者：李华明王雨胡庆磊张卓宇吕晓华曾绍群 Britton Chance center for Biomedical photonics Wuhan National Laboratory for OptoelectronicsHuazhong University of Science and TechnologyWuhan 430074China MOE Key Laboratory for Biomedical photonics Collaborative Innovation Center for Biomedical EngineeringSchool of Engineering SciencesHuazhong University of Science and TechnologyWuhan 430074China

Multi-focus parallel scanning can effectively increase laser fabrication ***,the conventional approach of using a spatial light modulator(SLM)to generate multi-foci and scan this fixed number of foci with galvanometer scanners can only achieve a periodic scanning trajectory due to the low switching speed of the *** we demonstrate a multifocus non-periodic scanning method for femtosecond lasers by using,instead,a fast-switching digital micromirror device(DMD)to generate a dynamic number of *** number of effective foci is quickly switched by introducing aberration to the undesired *** this way,the intensity allocated to each focus will not be affected by the number of foci,and a uniformity of 98%with different numbers of foci is achieved without adjusting the total laser ***,we validate the effectiveness of this scanning method by demonstrating corneal flap fabrication of porcine cornea in vitro.

关键词： multi-focus non-periodic trajectory digital micromirror device aberration control corneal cutting

Silicon-based optoelectronic heterogeneous integration for optical interconnection

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Chinese Physics B 2024年第2期33卷 1-9页

作者：李乐良李贵柯张钊刘剑吴南健王开友祁楠刘力源 Institute of semiconductors Chinese Academy of SciencesBeijing 100083China center of Material Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

The performance of optical interconnection has improved dramatically in recent ***-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip,but also improves the system performance through advanced heterogeneous integrated *** paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical *** research status,development trend and application of ultra-low loss optical waveguides,high-speed detectors,high-speed modulators,lasers and 2D,2.5D,3D and monolithic integration are focused on.

关键词： silicon-based heterogeneous integration heterogeneous integrated materials heterogeneous integrated packaging optical interconnection

Flexible nanoimprint lithography enables high-throughput manufacturing of bioinspired microstructures on warped substrates for efficient III-nitride optoelectronic devices

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Science Bulletin 2024年第13期69卷 2080-2088页

作者： Siyuan Cui Ke Sun Zhefu Liao Qianxi Zhou Leonard Jin Conglong Jin Jiahui Hu Kuo-Sheng Wen Sheng Liu Shengjun Zhou center for photonics and semiconductors School of Power and Mechanical EngineeringWuhan UniversityWuhan 430072China The Institute of Technological Sciences Wuhan UniversityWuhan 430072China Department of Mechanical and Mechatronics Engineering University of WaterlooWaterloo ONN2L 3G1Canada Jiangxi SMTC Semiconductor Co. Ltd.Nanchang 330096China

III-nitride materials are of great importance in the development of modern optoelectronics,but they have been limited over years by low light utilization rate and high dislocation densities in heteroepitaxial films grown on foreign substrate with limited refractive index contrast and large lattice ***,we demonstrate a paradigm of high-throughput manufacturing bioinspired microstructures on warped substrates by flexible nanoimprint lithography for promoting the light extraction *** design a flexible nanoimprinting mold of copolymer and a two-step etching process that enable high-efficiency fabrication of nanoimprinted compound-eye-like Al2O3 microstructure(NCAM)and nanoimprinted compound-eye-like SiO_(2)microstructure(NCSM)template,achieving a 6.4-fold increase in throughput and 25%savings in economic costs over stepper projection *** to NCAM template,we find that the NCSM template can not only improve the light extraction capability,but also modulate the morphology of AlN nucleation layer and reduce the formation of misoriented GaN grains on the inclined sidewall of microstructures,which suppresses the dislocations generated during coalescence,resulting in 40%reduction in dislocation *** study provides a low-cost,high-quality,and high-throughput solution for manufacturing microstructures on warped surfaces of III-nitride optoelectronic devices.

关键词： Flexible nanoimprint lithography Bioinspired Micro-and nano-manufacturing III-nitride epitaxy Optoelectronic devices

A mechanically coupled MEMS filter with high-Q width extensional mode resonators

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Journal of semiconductors 2024年第8期45卷 41-48页

作者： Wei Wang Wenli Liu Junyuan Zhao Bo Niu Zeyu Wu Yinfang Zhu Jinling Yang Fuhua Yang Institute of semiconductors Chinese Academy of SciencesBeijing 100083China center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)*** flexibility of the plate leads to multiple modes near the target *** high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified *** 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a *** reduce bandwidth,two plates are coupled with aλ-length coupling *** 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband *** summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.

关键词： MEMS narrowband filter mechanically coupling quality factor width extensional mode

Ka-band thin film lithium niobate photonic integrated optoelectronic oscillator

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photonics Research 2024年第6期12卷 1283-1293页

作者： RUI MA ZIJUN HUANG SHENGQIAN GAO JINGYI WANG XICHEN WANG XIAN ZHANG PENG HAO X.STEVE YAO XINLUN CAI State Key Laboratory of Optoelectronic Materials and Technologies School of Electronics and Information TechnologySun Yat-sen UniversityGuangzhou 510275China photonics Information Innovation center and Hebei Provincial center for Optical Sensing College of Physics Science and TechnologyHebei UniversityBaoding 071002China NuVison photonics Inc.Las VegasNevada 89109USA

photonics integration of an optoelectronic oscillator(OEO)on a chip is attractive for fabricating low cost,compact,low power consumption,and highly reliable microwave sources,which has been demonstrated recently in silicon on insulator(SOI)and indium phosphide(InP)platforms at X-band around 8 *** we demonstrate the first integration of OEOs on the thin film lithium niobate(TFLN)platform,which has the advantages of lower Vπ,no chirp,wider frequency range,and less sensitivity to *** have successfully realized two different OEOs operating at Ka-band,with phase noises even lower than those of the X-band OEOs on SOI and InP *** is a fixed frequency OEO at 30 GHz realized by integrating a Mach–Zehnder modulator(MZM)with an add-drop microring resonator(MRR),and the other is a tunable frequency OEO at 20–35 GHz realized by integrating a phase modulator(PM)with a notch *** work marks the first step of using TFLN to fabricate integrated OEOs with high frequency,small size,low cost,wide range tunability,and potentially low phase noise.

关键词： optoelectronic modulator resonator

Anisotropy-free arrayed waveguide gratings on X-cut thin film lithium niobate platform of in-plane anisotropy

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Light(Science & Applications) 2024年第7期13卷 1416-1426页

作者： Junjie Yi Changjian Guo Ziliang Ruan Gengxin Chen Haiqiang Wei Liwang Lu Shengqi Gong Xiaofu Pan Xiaowan Shen Xiaowei Guan Daoxin Dai Kangping Zhong Liu Liu State Key Laboratory of Extreme photonics and Instrumentation College of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZhejiang UniversityHangzhou 310058China. Guangdong Provincial Key Laboratory of Optical Information Materials and Technology South China Academy of Advanced OptoelectronicsSouth China Normal UniversityHigher-Education Mega-CenterGuangzhou 510006China. National center for International Research on Green Optoelectronics South China Normal UniversityGuangzhou 510006China photonics Research Institute Department of Electrical and Electronic EngineeringThe Hong Kong Polytechnic UniversityHung HomKowloonHong Kong(SAR)China. Jiaxing Key Laboratory of Photonic Sensing&Intelligent Imaging Intelligent Optics&Photonics Research CenterJiaxing Research Institute Zhejiang UniversityJiaxing 314000China

Arrayed waveguide grating is a versatile and scalable integrated light dispersion device,which has been widely adopted in various applications,including,optical communications and optical ***,thin-film lithium niobate emerges as a promising photonic integration platform,due to its ability of shrinking largely the size of typical lithium niobate based optical *** would also enable multifunctional photonic integrated chips on a single lithium niobate ***,due to the intrinsic anisotropy of the material,to build an arrayed waveguide grating on X-cut thin-film lithium niobate has never been ***,a universal strategy to design anisotropyfree dispersive components on a uniaxial in-plane anisotropic photonic integration platform is introduced for the first *** leads to the first implementation of arrayed waveguide gratings on X-cut thin-film lithium niobate with various configurations and *** best insertion loss of 2.4 dB and crosstalk of−24.1 dB is obtained for the fabricated arrayed waveguide grating *** of such arrayed waveguide gratings as a wavelength router and in a wavelength-division multiplexed optical transmission system are also demonstrated.

关键词： waveguide arrayed lithium

A crosstalk-free dual-mode sweat sensing system for naked-eye sweat loss quantification via changes in structural reflectance

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Bio-Design and Manufacturing 2024年第4期7卷 428-438页

作者： Bowen Zhong Hao Xu Xiaokun Qin Lingchen Liu Hailong Wang Lili Wang State Key Laboratory for Superlattices and Microstructures Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China center of Materials Science and Optoelectronic Engineering University of Chinese Academy of SciencesBeijing 100049China

Sweat loss monitoring is important for understanding the body’s thermoregulation and hydration status,as well as for comprehensive sweat *** recent advances,developing a low-cost,scalable,and universal method for the fabrication of colorimetric microfluidics designed for sweat loss monitoring remains *** this study,we propose a novel laserengraved surface roughening strategy for various flexible *** process permits the construction of microchannels that show distinct structural reflectance changes before and after sweat *** leveraging these unique optical properties,we have developed a fully laser-engraved microfluidic device for the quantification of naked-eye sweat *** sweat loss sensor is capable of a volume resolution of 0.5µL and a total volume capacity of 11µL,and can be customized to meet different performance ***,we report the development of a crosstalk-free dual-mode sweat microfluidic system that integrates an Ag/AgCl chloride sensor and a matching wireless measurement flexible printed circuit *** integrated system enables the real-time monitoring of colorimetric sweat loss signals and potential ion concentration signals without ***,we demonstrate the potential practical use of this microfluidic sweat loss sensor and its integrated system for sports medicine via on-body studies.

关键词： Sweat loss sensor Microfluidic design Structural reflectance Dual-mode integration Crosstalk-free

Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

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Chinese Optics Letters 2024年第5期22卷 17-21页

作者：王迈祁璐王浩华阮子良陈耿鑫陈斌龚胜琪陈楷旋刘柳 State Key Laboratory of Extreme photonics and Instrumentation College of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZhejiang UniversityHangzhou 310058China Guangdong Provincial Key Laboratory of Optical Information Materials and Technology South China Academy of Advanced OptoelectronicsSouth China Normal UniversityHigher-Education Mega-CenterGuangzhou 510006China National center for International Research on Green Optoelectronics South China Normal UniversityGuangzhou 510006China Jiaxing Key Laboratory of Photonic Sensing&Intelligent Imaging Intelligent Optics&Photonics Research CenterJiaxing Research InstituteZhejiang UniversityJiaxing 314000China

Recently,Mach–Zehnder modulators based on thin-film lithium niobate have attracted broad interest for their potential for high modulation bandwidth,low insertion loss,high extinction ratio,and high modulation *** periodic capacitively loaded traveling-wave electrode is optimally adopted for ultimate high-performances in this type of ***,such an electrode structure on a silicon substrate still suffers from the velocity mismatch and substrate leakage loss for microwave ***,we introduce a thin-film lithium niobate modulator structure using this periodic capacitively loaded electrode on a silicon *** holes in the silicon substrate are prepared to solve robustly the above *** fabricated device exhibits an insertion loss of 0.9 dB,a halfwave-voltage–length product of 2.18 V·cm,and an ultra-wide bandwidth well exceeding 67 GHz for a 10-mm-long *** transmissions with rates up to 112 Gb/s are *** proposed structure and fabrication strategy are compatible for other types of monolithic and heterogeneous integrated thin-film lithium niobate modulators on a silicon substrate.

关键词： lithium niobate electro-optic modulator high bandwidth backside holes robust structure

Spatio-temporal coupled mode theory for nonlocal metasurfaces

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Light(Science & Applications) 2024年第2期13卷 267-282页

作者： Adam Overvig Sander A.Mann Andrea Alù photonics Initiative Advanced Science Research CenterCity University of New YorkNew YorkNY10031USA Physics Program Graduate Center of the City University of New YorkNew YorkNY10016USA

Diffractive nonlocal metasurfaces have recently opened a broad range of exciting developments in nanophotonics research and applications,leveraging spatially extended—yet locally patterned—resonant modes to control light with new degrees of *** conventional grating responses are elegantly captured by temporal coupled mode theory,current approaches are not well equipped to capture the arbitrary spatial response observed in the nascent field of nonlocal ***,we introduce spatio-temporal coupled mode theory(STCMT),capable of elegantly capturing the key features of the resonant response of wavefront-shaping nonlocal *** framework can quantitatively guide nonlocal metasurface design while maintaining compatibility with local metasurface frameworks,making it a powerful tool to rationally design and optimize a broad class of ultrathin optical *** validate this STCMT framework against full-wave simulations of various nonlocal metasurfaces,demonstrating that this tool offers a powerful semi-analytical framework to understand and model the physics and functionality of these devices,without the need for computationally intense full-wave *** also discuss how this model may shed physical insights into nonlocal phenomena in photonics and the functionality of the resulting *** a relevant example,we showcase STCMT’s flexibility by applying it to study and rapidly prototype nonlocal metasurfaces that spatially shape thermal emission.

关键词： theory resonant spatially