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Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation

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Chinese Physics B 2014年第11期23卷 661-665页

作者：沈泽南夏洋刘邦武刘金虎李超波李勇滔 Key Laboratory of Microelectronics Devices and Integrated Technology Institute of MicroelectronicsChinese Academy of Sciences

Emitted multi-crystalline silicon and black silicon solar cells are conformal doped by ion implantation using the plasma immersion ion implantation （PⅢ） technique. The non-uniformity of emitter doping is lower than 5 %. The secondary ion mass spectrometer profile indicates that the PⅢ technique obtained 100-rim shallow emitter and the emitter depth could be impelled by furnace annealing to 220 nm and 330 nm at 850 ℃ with one and two hours, respectively. Furnace annealing at 850 ℃ could effectively electrically activate the dopants in the silicon. The efficiency of the black silicon solar cell is 14.84% higher than that of the mc-silicon solar cell due to more incident light being absorbed.

关键词： solar cells plasma immersion ion implantation conformal doping black silicon

Work Function Enhancement of Indium Tin Oxide via Oxygen plasma immersion ion implantation

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plasma Science and Technology 2013年第8期15卷 791-793页

作者：高欢忠何龙何志江李泽斌吴忠航成卫海艾畦范晓轩区琼荣梁荣庆 Department of Illuminating Engineering and Light Sources Institute for Electric Light SourcesFudan University

Indium tin oxide （ITO） transparent conducting film was treated with oxygen plasma immersion ion implantation （PIII）. X-ray photoelectron spectroscopy （XPS） was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.

关键词： plasma immersion ion implantation surface treatment work function indium tin oxide

Effect of Yttrium Pre-implantation on implantation Behavior of Ti-6Al-4V Alloy in Nitrogen plasma immersion ion implantation

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Journal of Rare Earths 2001年第1期19卷 40-43页

作者：王浪平唐保茵王小锋王松岩 National Key Laboratory of Advanced Welding Production and Technology Harbin Institute of Technology Department of Physics and Material Science City University of Hong Kong KowloonChina Department of Physics and Material Science City University of Hong Kong Kowloon China

In order to increase the peak depth of nitrogen atoms during the nitrogen plasma immersion ion implantation of Ti-6Al-4V alloy, the rare earth metal yttrium was applied. In the experiment, yttrium and nitrogen ions were implanted under the voltage of 20 and 30 kV, respectively. In the samples with yttrium pre-implantation for 30 min, the Anger electron spectroscopy (AES) analysis shows that the peak depth of the nitrogen atoms increases from 50 up to 100 nm. It can also be seen from the tribological tests that the wear resistance of these samples is increased remarkably.

关键词： rare earths yttrium plasma immersion ion implantation peak depth

Bioactivity and antibacterial effect of nitrogen plasma immersion ion implantation on PEEK of dental implant materials

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Bioactivity and antibacterial effect of nitrogen plasma imme...

ion HEATING PROCESS DURING plasma immersion ion implantation

中华口腔医学会全科口腔医学专业委员会第八次学术会议

作者：甘抗朱娟芳赵红宇郑州大学第一附属医院

Objective:The aim of this present study was to investigate the bioactivity and antibacterial effect of nitrogen Pill modification on PEEK.Finally,we lay a foundation for their widespread clinical application of PEEK and its composites in the field of dental implant,bone defect repair and joint replacement.Methods:According to the different modified parameters,the PEEK specimens were randomly divided into four main groups(n=49/group):PEEK-C,PEEK-1,PEEK-L,and PEEK-H.Then,N2-PIII surface modification was conducted using the corresponding parameters.The microstructure and composition of the modified PEEK surface was observed by scanning electron microscope(SEM),atomic force microscopy(AFM) and X-ray photoelectron spectroscopy(XPS).The water contact angle of the PEEK surface was also studied by contact angle meters.The bioactive ability of PEEK samples was evaluated by observing the attachment,proliferation,and differentiation of MG63 cells cultured on the PEEK samples.Antibacterial property of the samples against Staphylococcus aureus was detected with the plate colony-counting methods.Results:SEM and AFM analysis shows that PEEK-C surface is relatively smooth with the Ra value of 50.6±2.52 nm.PEEK-1 and PEEK-L surface is rough with the Ra value of 435.916.47 nm and443.2315.49 nm,respectively,and the PEEK-H surface is the most rough with the Ra value of 608.4±3.14 nm.XPS element analysis demonstrated that nitrogen functional groups were successfully introduced into the surface of PIII-modified PEEK.Biological evaluation and the antibacterial results showed that nitrogen Pill treatment can significantly improve the biological activity of PEEK,and samples showed antibacterial properties against Staphylococcus aureus.Conclusions:PEEK surface subjected to the N2-PIII treatment showed better biological activity and antibacterial effect.Therefore,N2-PIII-treated PEEK surface is promising in bone tissue engineering and dental applications.

关键词： plasma immersion ion implantation bioactivity antibacterial

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Acta Metallurgica Sinica(English Letters) 2000年第2期13卷 734-739页

作者： X.B. Tian, X.F. Wang, A.G. Liu, L.P. Wang, S. Y. Wang, B. Y. Tang and P. K. Chu 1)Advanced Welding Production & Technology National Key Laboratory, Harbin Institute of Technology, Harbin 150001, China 2)Department of Physics & Materials Science, City Uni

The research on plasma immersion ion implantation has been conducted for a little over ten years. Much is needed to investigate including processing technlogy, plasma sheath dynamics, interaction of plasma and surface, etc. Of the processing methods elavated temperature technique is usually used in PIII to produce a thick modified layer by means of the thermal diffusion. Meanwhile plasma ion heating is more recently developed by Ronghua Wei et al[1]. Therefore the temeperature is a critical parameter in plasma ion processing. In this paper we present the theoretical model and analysize the effect of imlantation voltage, plasma density, ion mass,etc on the temperature rise.

关键词： plasma immersion ion implantation ion heating temperature

TWO-DIMENSionAL NUMERICAL ANALYSIS OF plasma immersion ion implantation OF CYLINDRICAL BORES

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Acta Metallurgica Sinica(English Letters) 2000年第2期13卷 740-745页

作者： A. G. Liu,X.F. Wang, L.P. Wang, S. Y. Wang, B. Y. Tang and P.K. Chu 1) Advanced Welding Production Technology National Key Laboratory, HIT, Harbin 150001, China 2) Department of Physics and Material Science, City University of Hong Kong, 83 Tat Chee Aven

plasma immersion ion implantation (PIII), unrestricted by sight-light process, is considered a proper method for inner surface strengthening. Two-dimensional simulation oj inner surface PIII process of cylindrical bores were carried out in this paper using cold plasma fluid model, and influence of the bore's dimension on impact energy, retained dose and uniformity of inner surface were investigated.

关键词： plasma immersion ion implantation plasma sheath inner surface modification computer simulation

Co-implantation of magnesium and zinc ions into titanium regulates the behaviors of human gingival fibroblasts

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Bioactive Materials 2021年第1期6卷 64-74页

作者： Lanyu Wang Qiming Luo Xianming Zhang Jiajun Qiu Shi Qian Xuanyong Liu State Key Laboratory of High Performance Ceramics and Superfine Microstructure Shanghai Institute of CeramicsChinese Academy of SciencesShanghai200050China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing100049China Cixi Center of Biomaterials Surface Engineering Shanghai Institute of CeramicsChinese Academy of SciencesNingbo315300China School of Chemistry and Materials Science Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of Sciences1 Sub-lane XiangshanHangzhou310024China

Soft tissue sealing around implants acts as a barrier between the alveolar bone and oral environment,protecting implants from the invasion of bacteria or external stimuli.In this work,magnesium(Mg)and zinc(Zn)are introduced into titanium by plasma immersed ion implantation technology,and their effects on the behaviors of human gingival fibroblasts(HGFs)as well as the underlying mechanisms are investigated.Surface characterization confirms Mg and Zn exist on the surface in metallic and oxidized states.Contact angle test suggests that surface wettability of titanium changes after ion implantation and thus influences protein adsorption of surfaces.In vitro studies disclose that HGFs on Mg ion-implanted samples exhibit better adhesion and migration while cells on Zn ion-implanted samples have higher proliferation rate and amounts.The results of immunofluorescence staining and real-time reverse-transcriptase polymerase chain reaction(RT-PCR)suggest that Mg mainly regulates the motility and adhesion of HGFs through activating the MAPK signal pathway whereas Zn influences HGFs proliferation by triggering the TGF-βsignal pathway.The synergistic effect of Mg and Zn ions ensure that HGFs cultured on co-implanted samples possessed both high proliferation rate and motility,which are critical to soft tissue sealing of implants.

关键词： Human gingival fibroblasts Soft tissue sealing Magnesium Zinc plasma immersion ion implantation

In vitro and in vivo antibacterial performance of Zr&O PIII magnesium alloys with high concentration of oxygen vacancies

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Bioactive Materials 2021年第10期6卷 3049-3061页

作者： Tao Liang Lilan Zeng Yunzhu Shi Haobo Pan Paul K.Chu Kelvin W.K.Yeung Ying Zhao Shenzhen Institutes of Advanced Technology Chinese Academy of SciencesShenzhen518055China University of Chinese Academy of Sciences Beijing100049China Department of Physics Department of Materials Science and EngineeringDepartment of Biomedical EngineeringCity University of Hong KongTat Chee AvenueKowloonHong KongChina Department of Orthopaedics and Traumatology The University of Hong KongHong KongChina

The effects of dual Zr and O plasma immersion ion implantation(Zr&O PIII)on antibacterial properties of ZK60 Mg alloys are systematically investigated.The results show that a hydrophobic,smooth,and ZrO_(2)-containing graded film is formed.Electrochemical assessment shows that the corrosion rate of the plasma-treated Mg alloy decreases and the decreased degradation rate is attributed to the protection rendered by the surface oxide.In vitro and in vivo antibacterial tests reveal Zr&O PIII ZK60 presents higher antibacterial rate compared to Zr PIII ZK60 and untreated control.The hydrophobic and smooth surface suppresses bacterial adhesion.High concentration of oxygen vacancies in the surface films are determined by X-ray photoelectron spectroscopy(XPS),UV-vis diffuse reflectance spectra(UV-vis DRS)and electron paramagnetic resonance(EPR)and involved in the production of reactive oxygen species(ROS).The higher level of ROS expression inhibits biofilm formation by down-regulating the expression of icaADBC genes but up-regulating the expression of icaR gene.In addition,Zr&O PIII improves cell viability and initial cell adhesion confirming good cytocompatibility.Dual Zr&O PIII is a simple and practical means to expedite clinical acceptance of biodegradable magnesium alloys.

关键词： Magnesium alloy plasma immersion ion implantation Degradation ZrO_(2) Antibacterial property

A combination strategy of functionalized polymer coating with Ta ion implantation for multifunctional and biodegradable vascular stents

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Journal of Magnesium and Alloys 2021年第6期9卷 2195-2207页

作者： Kwang-Hee Cheon Cheonil Park Min-Ho Kang Suhyung Park Jinyoung Kim Seol-Ha Jeong Hyoun-Ee Kim Hyun-Do Jung Tae-Sik Jang Department of Materials Science and Engineering Seoul National UniversitySeoul 08826Republic of Korea Department of Chemical and Biological Engineering Seoul National UniversitySeoul 08826Republic of Korea Department of Biomedical-Chemical Engineering Catholic University of KoreaBucheon-si 03083Republic of Korea Department of Biotechnology The Catholic University of KoreaBucheon-si 14662Republic of Korea Department of Materials Science and Engineering Chosun UniversityGwangju 61452Republic of Korea

Biodegradable stents made of magnesium(Mg)and its alloys have been developed to minimize persistent inflammation or in-stent restenosis,which are the main problems for permanent stents.However,their rapid corrosion behavior under physiological conditions leads to poor vascular compatibility and premature structural failure,which remains an important unsolved clinical problem.Herein,we demonstrate a new strategy for solving this problem by combining poly(ether imide)(PEI)coating and subsequent tantalum(Ta)ion implantation.The PEI coating covers the whole surface of the Mg stent uniformly via a spray coating technique and provides Mg with superior corrosion resistance and stable sirolimus-carrying ability.Ta ion implantation is conducted by a sputtering-based plasma immersion ion implantation technique only onto the luminal surface of the PEI-coated Mg stent.Its extremely short processing time(ion of the PEI coating’s corrosion protection ability and sirolimus loading characteristics.In addition,a Ta-implanted skin layer that forms on the topmost surface of the PEI coating plays an effective role in not only preventing a rapid release of sirolimus from the surface but also improving the PEI coating’s surface hydrophilicity.Based on in vitro cellular response and blood compatibility tests,Ta ion implantation leads to the improvement of endothelial cell adhesion/proliferation and suppression of platelet adhesion/activation regardless of sirolimus loading.These results indicate that the combination of PEI coating and Ta ion implantation has significant innovative potential to provide excellent vascular compatibility and prevent in-stent restenosis and thrombosis.

关键词： Magnesium stent Biodegradability Tantalum plasma immersion ion implantation Multifunctionality