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fabrication and testing of optical free-form convex mirror

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Chinese Optics Letters 2015年第13期13卷 70-73页

作者：张峰 Key Laboratory of optical System Advanced Manufhcturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

In order to obtain precise optical free-form convex nfirror, we present a perfect process specification for fabricating and testing optical t}ee-form convex mirror. Some technical requirements of 84×84 （mm） optical free-form convex silicon carbide （SIC） mirror are introduced. Firstly, the SiC blank is milled to the best-fitting sphere by means of DMG Ultrasonic 100-5 computer-controlled machine. Secondly, the best-fitting sphere is grinded and polished to optical free-form surface with certain figure accuracy by computer-controlled small tool fabrication. Finally, in order to meet the requirement of design, the optical free-form convex mirror is fabricated by advanced ion beam figuring. The contour testing technique is used for measuring the optical free-form convex mirror in milling and grinding processes, and the computer-generated hologram null testing technique for measuring the optical free-form convex mirror in polishing process is studied. The final testing result indicates that the figure accuracy of the optical free-form convex mirror is 0.022 （root mean square）.

关键词： 220.4610 optical fabrication 220.4840 Testing 220.5450 Polishing 220.1250 Aspherics

Advances in the design and manufacturing of novel freeform optics

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International Journal of Extreme Manufacturing 2022年第3期4卷 65-97页

作者： Sumit Kumar Zhen Tong Xiangqian Jiang EPSRC Future Metrology Hub Centre for Precision TechnologiesUniversity of HuddersfieldHuddersfield HD13DHUnited Kingdom

Freeform optics has become the most prominent element of the optics industry. Advanced freeform optical designs supplementary to ultra-precision manufacturing and metrology techniques have upgraded the lifestyle, thinking, and observing power of existing *** related to space explorations, portability, accessibility have also witnessed sensible in today’s time with freeform optics. Present-day design methods and fabrications techniques applicable in the development of freeform optics and the market requirements are focussed and explained with the help of traditional and non-traditional optical applications. Over the years,significant research is performed in the emerging field of freeform optics, but no standards are established yet in terms of tolerances and definitions. We critically review the optical design methods for freeform optics considering the image forming and non-image forming applications. Numerous subtractive manufacturing technologies including figure correction methods and metrology have been developed to fabricate extreme modern freeform optics to satisfy the demands of various applications such as space, astronomy, earth science, defence,biomedical, material processing, surveillance, and many more. We described a variety of advanced technologies in manufacturing and metrology for novel freeform optics. Next, we also covered the manufacturing-oriented design scheme for advanced optics. We conclude this review with an outlook on the future of freeform optics design, manufacturing and metrology.

关键词： freeform optics optical design optical fabrication ultra-precision machining surface metrology

Ion Beam Figuring System for Synchrotron X-Ray Mirrors Achieving Sub-0.2-µrad and Sub-0.5-nm Root Mean Square

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Nanomanufacturing and Metrology 2023年第3期6卷 1-11页

作者： Tianyi Wang Lei Huang Yi Zhu Stefano Giorgio Philip Boccabella Nathalie Bouet Mourad Idir Brookhaven National Laboratory National Synchrotron Light Source II(NSLS-II)PO Box 5000UptonNY11973USA

Optics with high-precision height and slope are increasingly desired in numerous industrial *** instance,Kirkpatrick-Baez(KB)mirrors play an important role in synchrotron X-ray applications.A KB system is composed of two aspherical,grazing-incidence mirrors used to focus an X-ray *** fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height *** this paper,we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring(IBF)and metrology ***,the key aspects of figuring and finishing processes with IBF are illustrated in *** effect of positioning error on the convergence of the residual slope error is highlighted and ***,inspection and cross-validation using different metrology instruments are performed and used as the final validation of the *** confirm that relative to the requested off-axis ellipse,the mirror has achieved 0.15-μrad root mean square(RMS)and 0.36-nm RMS residual slope and height errors,respectively,while maintaining the initial 0.3-nm RMS microroughness.

关键词： Ion beam figuring Kirkpatrick-Baez Synchrotron X-ray mirrors Stitching interferometry optical fabrication optical metrology

Advanced optical methods and materials for fabricating 3D tissue scaffolds

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Light(Advanced Manufacturing) 2022年第3期3卷 28-59页

作者： Xiaobo Li Wanping Lu Xiayi Xu Yintao Wang Shih-Chi Chen Department of Mechanical and Automation Engineering The Chinese University of Hong KongShatinN.T.Hong Kong SARChina Centre for Perceptual and Interactive Intelligence Building 17W17 Science Park West AvenueHong Kong Science ParkPak Shek KokN.T.Hong Kong SARChina

Three-dimensional(3D)printing,also known as additive manufacturing(AM),has undergone a phase of rapid development in the fabrication of customizable and high-precision *** to the advancements in 3D printing technologies,it is now a reality to print cells,growth factors,and various biocompatible materials altogether into arbitrarily complex 3D scaffolds with high degree of structural and functional similarities to the native tissue ***,with overpowering advantages in molding efficiency,resolution,and a wide selection of applicable materials,optical 3D printing methods have undoubtedly become the most suitable approach for scaffold fabrication in tissue engineering(TE).In this paper,we first provide a comprehensive and up-to-date review of current optical 3D printing methods for scaffold fabrication,including traditional extrusion-based processes,selective laser sintering,stereolithography,and two-photon polymerization ***,we review the optical design,materials,and representative applications,followed by fabrication performance *** metrics include fabrication precision,rate,materials,and application ***,we summarize and compare the advantages and disadvantages of each technique to guide readers in the optics and TE communities to select the most fitting printing approach under different application scenarios.

关键词： 3D printing Tissue scaffolds optical fabrication

Direct laser writing breaking diffraction barrier based on two-focus parallel peripheralphotoinhibition lithography

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Advanced Photonics 2022年第5期4卷 56-63页

作者： Dazhao Zhu Liang Xu Chenliang Ding Zhenyao Yang Yiwei Qiu Chun Cao Hongyang He Jiawei Chen Mengbo Tang Lanxin Zhan Xiaoyi Zhang Qiuyuan Sun Chengpeng Ma Zhen Wei Wenjie Liu Xiang Fu Cuifang Kuang Haifeng Li Xu Liu Zhejiang Lab Research Center for Intelligent Chips and DevicesHangzhouChina Zhejiang University College of Optical Science and EngineeringState Key Laboratory of Modern Optical InstrumentationHangzhouChina Zhejiang University College of Control Science and EngineeringState Key Laboratory of Industrial Control TechnologyHangzhouChina Zhejiang Lab Research Center for Humanoid SensingZhejiang LabHangzhouChina

Direct laser writing(DLW)enables arbitrary three-dimensional ***,the diffraction limit poses a major obstacle for realizing nanometer-scale ***,it is challenging to improve the fabrication efficiency using the currently prevalent single-focal-spot systems,which cannot perform high-throughput *** overcome these challenges,a parallel peripheral-photoinhibition lithography system with a sub-40-nm two-dimensional feature size and a sub-20-nm suspended line width was developed in our study,based on two-photon polymerization *** lithography efficiency of the developed system is twice that of conventional systems for both uniform and complex *** proposed system facilitates the realization of portable DLW with a higher resolution and throughput.

关键词： optical fabrication parallel direct laser writing peripheral-photoinhibition diffraction barrier breaking

Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad

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Chinese Optics Letters 2014年第A1期12卷 140-144页

作者：王旭张峰 Key Laboratory of optical System Advanced Manufacturing Technology Changchun Laboratory of Optics Fine Mechanics and Physics Chinese Academy of Science Changchun 130033 China

The removal function test is carried out on the earlier round-pellet polishing pad. The concept of filling factor is introduced to evaluate the removal function obtained from the experiments mentioned in the paper. To improve the filling factor and characteristics of the polishing pad, the pad structure is optimized according to the experimental results of the round-pellet pad. The removal function of the new polishing pad is simulated with MATLAB. The stability experiment is carried out in full aperture at the same time. The fixed abrasive and the slurry abrasive polishing experiment both are performed under the same conditions. Finally, the structural similarity index is introduced to evaluate the similarity between simulations and experiments. The best structural similaritv index of multi-square-mellet oad is 0.4257. The comparison results are acceptable and Positive. The optimized fixed abrasive polishing pad is proved to be highly promising for large-diameter SiC mirror fabrication.

关键词： 220.0220 optical design and fabrication 220.4000 Microstructure fabrication 220.4610 optical fabrication 220.5450 Polishing

Directly writing binary multi-sector phase plates on fused silica using femtosecond laser

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High Power Laser Science and Engineering 2018年第1期6卷 33-37页

作者： Li Zhou Youen Jiang Peng Zhang Wei Fan Xuechun Li Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences

Light carrying orbital angular momentum(OAM) has a spatial distribution of intensity and phase, which attracts considerable interest regarding several potential applications in optical and quantum scenarios recently. Spiral phase plates are commonly used elements for generating and analyzing OAM states. In this study, we put forward a method of directly writing binary multi-sector phase plates using the femtosecond laser. These phase plates are engraved on fused silica, which could be applied in high-intensity regimes. Different binary multi-sector phase plates were generated with high quality, which were proved by the observation of their structures, accompanied by detecting the beam patterns with the Gaussian beams. The proposed method provides a crucial basis for the rapid manufacturing of phase plates using convenient equipment, which can generate the superposition OAM states and may lead to the capability of measuring the high-dimensional entanglement.

关键词： femtosecond laser and applications optical fabrication phase plate orbital angular momentum modes

Grinding strategies for machining the off-axis aspherical reaction-bonded SiC mirror blank

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Chinese Optics Letters 2014年第A1期12卷 135-139页

作者：张志宇郑立功 Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Science Dongnanhu Road 3888 Changchun Jilin 130033 China

Demand for large-scale off-axis aspherical mirrors is increasing in next-generation space-borne optical imaging systems. In this paper, a variable-axis single-point grinding strategy is developed for precisely, cost-effectively figuring silicon carbide （SIC） mirror blanks that have high-order high-gradient off-axis aspherical surfaces on a precision five-axis machining center. The grinding strategies also include tool path generation/optimization, feeding direction control and wheel wear reduction/compensation. Applying the developed grinding strategies, by only one grinding cycle, a near-circular Ф372-mm SiC mirror blank is successfully grounded to 7.8 pm in peak to valley, which is comparable to the reported machining accuracy of the BoX~ ultraprecision grinding machine. Moreover, the wheel need not have to be dressed during the whole grinding cycle due to the rotary ultrasonic grinding method. Therefore, this paper offers an efficient and economic solution for grinding off- axis aspherical and free from surfaces to micron-level accuracy, thus significantly decreasing the subsequent lapping/polishing production cycle time.

关键词： 220.1920 Diamond machining 220.4610 optical fabrication

Polishing experiments of thin mirror with magnetic medium assistant polishing technology

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Chinese Optics Letters 2013年第14期11卷 99-100页

作者：邓伟杰张峰 Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

The thin mirrors are widely used in active optical system. In this letter, magnetic medium assistant polishing （MMAP） technology and device are discussed for thin mirrors optical finishing. The principle of MMAP is introduced, the magnetic tool for polishing is designed, and the removal function of magnetic polishing tool is studied. On the basis study of the material removal function especially removal property in the edge region, the tool-path is optimized, and the dwell time distribution of computer-controlled MMAP is researched. The glass thin mirror is polished by MMAP technology. The diameter of the work-piece equals S22201 150 mm and the thickness is 5 mm. The initial surface error is 0.19 λ （root mean square （RMS）） , and after two steps fabrication, the final surface error reaches 0.02 λ. The experimental rsults verify that the technology is effective for thin mirrors finishing.

关键词： 220.4610 optical fabrication 230.4040 Mirrors 220.1080 Active or adoptive optics