Fabrication and testing of optical free-form convex mirror

作     者：张峰 

作者机构：Key Laboratory of Optical System Advanced Manufhcturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2015年第13卷第13期

页      面：70-73页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0803[工学-光学工程] 0702[理学-物理学] 080201[工学-机械制造及其自动化] 

主　　题：220.4610 Optical fabrication 220.4840 Testing 220.5450 Polishing 220.1250 Aspherics 

摘      要：In order to obtain precise optical free-form convex nfirror, we present a perfect process specification for fabricating and testing optical t}ee-form convex mirror. Some technical requirements of 84×84 （mm） optical free-form convex silicon carbide （SIC） mirror are introduced. Firstly, the SiC blank is milled to the best-fitting sphere by means of DMG Ultrasonic 100-5 computer-controlled machine. Secondly, the best-fitting sphere is grinded and polished to optical free-form surface with certain figure accuracy by computer-controlled small tool fabrication. Finally, in order to meet the requirement of design, the optical free-form convex mirror is fabricated by advanced ion beam figuring. The contour testing technique is used for measuring the optical free-form convex mirror in milling and grinding processes, and the computer-generated hologram null testing technique for measuring the optical free-form convex mirror in polishing process is studied. The final testing result indicates that the figure accuracy of the optical free-form convex mirror is 0.022 （root mean square）.