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Swing arm profilometer： improving the testing accuracy of large mirrors with shorter arms

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Chinese Optics Letters 2014年第A02期12卷 111-116页

作者：罗霄 Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanical and Physics CAS Changchun 130033 China

Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 μm RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.

关键词： 220.1250 aspherics 220.4610 Optical fabrication 220.4840 Testing

Null testing toroidal surface and biconic surface with cylinder compensator

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Chinese Optics Letters 2013年第14期11卷 101-105页

作者：刘壮巩岩 State Key Laboratory of Applied Optics Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China University of Chinese Academy of Sciences Beijing 100049 China

Toroidal surface and biconic surface are employed increasingly, however their profile cannot be null tested easily for they are non-rotationally symmetrical. Null testing method with cylinder compensator is proposed to solve this problem. The theory of this method is revealed. The errors of this method are present. Three typical testing optical systems with cylinder compensator are demonstrated at last. The design results and total error indicate that this method is feasible.

关键词： 220.1000 Aberration compensation 220.1250 aspherics 220.3620 Lens system design 220.4840 Testing

Measuring method for the vertex radius of curvature of an asphere with a laser tracker

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Chinese Optics Letters 2015年第13期13卷 66-69页

作者：李锐钢 Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

Aspheric elements are widely applied in optical systems and the vertex radius of curvature （VROC） is one of the important fundamental parameters of an asphere. We present a method for measuring the VROC of asphere. We use a portable laser tracker to measure the optical interval of the null testing path and then determine the VROC of the asphere through ray tracing. Based on this method, we carry out an accurate measurenlent. The accuracy can reach up to 0.056 mm on an asphere with VROC of approximately 2 m and the relative error is 0.003%.

关键词： 220.0220 Optical design and fabrication 220.1250 aspherics 220.4840 Testing 120.0120 Instrumentation, measurement, and metrology

Fabrication and testing of optical free-form convex mirror

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Chinese Optics Letters 2015年第13期13卷 70-73页

作者：张峰 Key Laboratory of Optical System Advanced Manufhcturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

In order to obtain precise optical free-form convex nfirror, we present a perfect process specification for fabricating and testing optical t}ee-form convex mirror. Some technical requirements of 84×84 （mm） optical free-form convex silicon carbide （SIC） mirror are introduced. Firstly, the SiC blank is milled to the best-fitting sphere by means of DMG Ultrasonic 100-5 computer-controlled machine. Secondly, the best-fitting sphere is grinded and polished to optical free-form surface with certain figure accuracy by computer-controlled small tool fabrication. Finally, in order to meet the requirement of design, the optical free-form convex mirror is fabricated by advanced ion beam figuring. The contour testing technique is used for measuring the optical free-form convex mirror in milling and grinding processes, and the computer-generated hologram null testing technique for measuring the optical free-form convex mirror in polishing process is studied. The final testing result indicates that the figure accuracy of the optical free-form convex mirror is 0.022 （root mean square）.

关键词： 220.4610 Optical fabrication 220.4840 Testing 220.5450 Polishing 220.1250 aspherics