Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad

作     者：王旭 张峰 

作者机构：Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Laboratory of Optics Fine Mechanics and Physics Chinese Academy of Science Changchun 130033 China 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2014年第12卷第A1期

页      面：140-144页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0835[工学-软件工程] 0803[工学-光学工程] 081202[工学-计算机软件与理论] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：973 national funding of "Study on the basic theory and key techniques of space optical fabrication and metrology" [2011CB01320005] 

主　　题：220.0220 Optical design and fabrication 220.4000 Microstructure fabrication 220.4610 Optical fabrication 220.5450 Polishing 

摘      要：The removal function test is carried out on the earlier round-pellet polishing pad. The concept of filling factor is introduced to evaluate the removal function obtained from the experiments mentioned in the paper. To improve the filling factor and characteristics of the polishing pad, the pad structure is optimized according to the experimental results of the round-pellet pad. The removal function of the new polishing pad is simulated with MATLAB. The stability experiment is carried out in full aperture at the same time. The fixed abrasive and the slurry abrasive polishing experiment both are performed under the same conditions. Finally, the structural similarity index is introduced to evaluate the similarity between simulations and experiments. The best structural similaritv index of multi-square-mellet oad is 0.4257. The comparison results are acceptable and Positive. The optimized fixed abrasive polishing pad is proved to be highly promising for large-diameter SiC mirror fabrication.