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Continuous-wave single-mode quantum cascade laser at 5.1 THz based on graded sampled grating design

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Photonics Research 2022年第12期10卷 2686-2692页

作者： WEIJIANG LI YU MA YUNFEI XU JUNQI LIU LIJUN WANG NING ZHUO QUANYONG LU JINCHUAN ZHANG shenqiang zhai SHUMAN LIU FENGQI LIU Key Laboratory of Semiconductor Materials Science Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China College of Materials Science and Opto-Electronic Technology University of Chinese Academy of SciencesBeijing 101408China Division of Quantum Materials and Devices Beijing Academy of Quantum Information SciencesBeijing 100193China

We report on the terahertz(THz)quantum cascade lasers in continuous-wave(CW)operation with an emitting frequency above 5 *** performance with a smaller leakage current and higher population inversion efficiency is obtained by one-well bridged bound-to-continuum hybrid quantum design at 5 *** designing and fabricating a graded metallic sampled distributed feedback grating in the waveguide,the first single-mode THz quantum cascade laser at 5.13 THz in CW operation mode is *** maximum single-mode optical power of~48 mW is achieved at 15 K with a side-mode suppression ratio above 24 *** will draw great interest in the spectroscopy applications above the 5 THz range for THz quantum cascade lasers.

关键词： waveguide mode quantum

Single-Mode Fabry-Pérot Quantum Cascade Lasers at λ~10.5 μm

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Journal of Materials Science and Chemical Engineering 2020年第6期8卷 85-91页

作者： Shouzhu Niu Junqi Liu Jinchuan Zhang Ning Zhuo shenqiang zhai Xiaohua Wang Zhipeng Wei State Key Laboratory of High Power Semiconductor Lasers School of Science Changchun University of Science and Technology Changchun China Key Laboratory of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Beijing China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

In this paper, we report a single-mode Fabry-Pérot long wave infrared quantum cascade lasers based on the double phonon resonance active region design. For room temperature CW operation, the wafer with 35 stages was processed into buried heterostructure lasers. For a 4 mm long and 13 μm wide laser with high-reflectivity (HR) coating on the rear facet, continuous wave output power of 43 mW at 288 K and 5 mW at 303 K is obtained with threshold current densities of 2.17 and 2.7 kA/cm2. The lasing wavelength is around 10.5 μm. Single mode emission was observed for this particular device over the whole investigated current and temperature range.

关键词： Quantum Cascade Laser Long Wave Infrared Double Phonon Resonance

High-power distributed feedback lasers based on InP corrugated sidewalls atλ~2μm

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维普期刊数据库

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光子学研究:英文版 2023年第8期11卷 1390-1396页

作者： YONGQIANG SUN YUNFEI XU JINCHUAN ZHANG FENGMIN CHEN JUNQI LIU SHUMAN LIU QUANYONG LU NING ZHUO LIJUN WANG FENGQI LIU shenqiang zhai Key Laboratory of Semiconductor Materials Science Institute of SemiconductorsBeijing Key Laboratory of Low Dimensional Semiconductor Materials and DevicesChinese Academy of SciencesBeijing 100083China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Beijing Academy of Quantum Information Sciences Beijing 100193China

We report a high-power single-mode InP-based 2μm distributed feedback(DFB)laser with a second-order buried grating and corrugated sidewalls.A second-order semiconductor grating is used for in-plane feedback and vertical *** corrugated sidewalls are used to eliminate higher-order transverse *** the DFB laser with a 2 mm long cavity and 15μm wide ridge,the maximum continuous-wave edge-emitting and surface-emitting single-mode powers at 300 K are up to 81 and 42 m W,respectively.A single-lobed far-field radiation pattern with a low divergence angle of approximately 8.6°is achieved by a device with a ridge width of 15μ*** single-longitudinal-mode emission wavelength of the fabricated laser can be adjusted from2003.8 nm at 288 K to 2006.9 nm at 313 K without any mode *** single-mode emission with a side-mode suppression ratio of 30 dB is achieved under all injection currents and temperature conditions.

关键词： 2μm power walls

Dual-mode distributed feedback quantum cascade laser based on stacked 3D monolithic integration for on-chip multi-channel gas sensing

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Photonics Research 2023年第12期11卷 2113-2120页

作者： XIYU LU YANJIAO GUAN PENGCHANG YANG SHAN NIU YU MA LIJUN WANG NING ZHUO JINCHUAN ZHANG shenqiang zhai FENGMIN CHENG SHUMAN LIU FENGQI LIU JUNQI LIU Key Laboratory of Semiconductor Materials Science Institute of SemiconductorsChinese Academy of SciencesBeijing Key Laboratory of Low Dimensional Semiconductor Materials and DevicesBeijing 100083China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

To facilitate the development of on-chip integrated mid-infrared multi-channel gas sensing systems,we propose a high-power dual-mode(7.01 and 7.5μm)distributed feedback quantum cascade laser based on stacked 3D monolithic *** mode control is achieved by preparing longitudinal nested bi-periodic compound one-dimensional Bragg gratings along the direction of the cavity length in the confinement ***,transverse coherent coupling ridges perpendicular to the cavity length direction are fabricated in the upper waveguide layer to promote the fundamental transverse mode output when all ridges are in *** dual-wavelength simultaneous emission with a side-mode suppression ratio of more than 20 dB was achieved by holographic exposure and wet *** entire spectral tuning range covers nearly 100 nm through joint tuning of the injection current and heat-sink *** peak power and beam quality are guaranteed by the parallel coherent integration of seven-element ridge *** device operates in a fundamental supermode with a single-lobed far-field pattern,and its peak output power reaches 3.36 W in pulsed mode at 20℃.This dual-mode laser chip has the potential for in-situ on-chip simultaneous detection of CH4and C2H6gases in leak monitoring.

关键词： tuning waveguide mode

Coupled-ridge waveguide quantum cascade laser array lasing at λ~5μm

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Journal of Semiconductors 2021年第9期42卷 72-76页

作者： Pengchang Yang Jinchuan Zhang Zenghui Gu Chuanwei Liu Yue Zhao Fengmin Cheng shenqiang zhai Ning Zhuo Junqi Liu Lijun Wang Shuman Liu Fengqi Liu School of Microelectronics University of Chinese Academy of SciencesBeijing 100049China Key Laboratory of Semiconductor Materials Science Institute of SemiconductorsChinese Academy of SciencesBeijing Key Laboratory of Low Dimensional Semiconductor Materials and DevicesBeijing 100083China School of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)***-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffraction-limited intensity curve of about 10°was observed by properly designing a geometric shape of the ridges and *** introducing a buried 2nd-order distributed feedback(DFB)grating,substrate emission with a radiation power above 1 W at 25℃ is *** longitudinal mode operation is obtained by changing the temperature of the heatsink with a good linear wavelength tuning coefficient of -0.2 cm^(-1)/K.

关键词： quantum cascade laser array coupled-ridge waveguide mid-infrared

14 μm quantum cascade lasers based on diagonal transition and nonresonant extraction

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Photonics Research 2019年第11期7卷 1244-1248页

作者： Shouzhu Niu Junqi Liu Fengmin Cheng Huan Wang Jinchuan Zhang Ning Zhuo shenqiang zhai Lijun Wang Shuman Liu Fengqi Liu Zhanguo Wang Xiaohua Wang Zhipeng Wei State Key Laboratory of High Power Semiconductor Lasers School of ScienceChangchun University of Science and TechnologyChangchun 130022China Key Laboratory of Semiconductor Materials Science Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

We report In P-based room-temperature high-average-power quantum cascade lasers emitting at 14 μm. Using a novel active region design, a diagonal bound-to-bound lasing transition is guaranteed by efficient electron injection into the upper laser level and fast nonresonant electron extraction through a miniband from the lower laser level. For a 4 mm long and 40 μm wide double channel ridge waveguide laser with 55 stages of the active region, the threshold current density is only 3.13 k A∕cm^2 at room temperature. At 293 K, the maximum singlefacet peak power and average power are up to 830 m W and 75 m W, respectively. The laser exhibits a characteristic temperature T0 of 395 K over a temperature range from 293 to 353 K.

关键词： temperature. waveguide lasers

Single-Mode Fabry-Pérot Quantum Cascade Lasers at λ～10.5 μm

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Single-Mode Fabry-Pérot Quantum Cascade Lasers at λ～10.5 ...

Quantum dot quantum cascade photodetector using a laser structure

作者： Shouzhu Niu Junqi Liu Jinchuan Zhang Ning Zhuo shenqiang zhai Xiaohua Wang Zhipeng Wei State Key Laboratory of High Power Semiconductor Lasers School of Science Changchun University of Science and Technology Key Laboratory of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences

In this paper, we report a single-mode Fabry-Pérot long wave infrared quantum cascade lasers based on the double phonon resonance active region design. For room temperature CW operation, the wafer with 35 stages was processed into buried heterostructure lasers. For a 4 mm long and 13 μm wide laser with high-reflectivity(HR) coating on the rear facet, continuous wave output power of 43 mW at 288 K and 5 mW at 303 K is obtained with threshold current densities of 2.17 and 2.7 kA/cm. The lasing wavelength is around 10.5 μm. Single mode emission was observed for this particular device over the whole investigated current and temperature range.

关键词： Quantum Cascade Laser Long Wave Infrared Double Phonon Resonance

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Chinese Optics Letters 2017年第10期15卷 85-89页

作者： Fengjiao Wang Ning Zhuo Shuman Liu Fei Ren shenqiang zhai Junqi Liu Jinchuan Zhang Fengqi Liu Zhanguo Wang Key Laboratory of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices Beijing 100083 China College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences Beijing 100049 China

We report on a quantum dot quantum cascade detector（QD-QCD）, whose structure is derived from a QD cascade laser. In this structure, more ordered In As QD layers formed in the Stranski-Krastanow growth mode on a thin Ga As buffer layer are incorporated into the active region. This QD-QCD can operate up to room temperature with a peak detection wavelength of 5.8 μm. A responsivity of 3.1 mA/W at 160 K and a detectivity of 3.6 × 10~8 Jones at 77 K are obtained. The initial performance of the detector is promising, and, by further optimizing the growth of InA s QDs, integrated QD-quantum cascade laser/QCD applications are expected.

关键词： As In Quantum dot quantum cascade photodetector using a laser structure QDs QCD

Interband cascade lasers with short electron injector

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Chinese Optics Letters 2022年第2期20卷 142-147页

作者： Chao Ning Tian Yu Shuman Liu Jinchuan Zhang Lijun Wang Junqi Liu Ning Zhuo shenqiang zhai Yuan Li Fengqi Liu Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices Key Laboratory of Semiconductor Materials ScienceInstitute of SemiconductorsChinese Academy of SciencesBeijing 100083China Center of Materials Science and Opto-Electronic Engineering University of Chinese Academy of SciencesBeijing 100049China Beijing Academy of Quantum Information Sciences Beijing 100193China

We demonstrate Ga Sb-based interband cascade lasers(ICLs) emitting around 3.65 μm, which exhibit a room-temperature continuous-wave(CW) output power above 100 m W. Cavity-length analysis showed that the laser structure has a low internal loss of 3 cm^(-1) while maintaining a total internal quantum efficiency greater than one. After 6400 h CW operation at 25°C,the threshold current of the laser increased by 3%, and the output power decreased by 7%, indicating good reliability of the device.

关键词： interband cascade lasers quantum well mid-infrared semiconductor lasers