Coupled-ridge waveguide quantum cascade laser array lasing at λ~5μm

作     者：Pengchang Yang Jinchuan Zhang Zenghui Gu Chuanwei Liu Yue Zhao Fengmin Cheng Shenqiang Zhai Ning Zhuo Junqi Liu Lijun Wang Shuman Liu Fengqi Liu Pengchang Yang;Jinchuan Zhang;Zenghui Gu;Chuanwei Liu;Yue Zhao;Fengmin Cheng;Shenqiang Zhai;Ning Zhuo;Junqi Liu;Lijun Wang;Shuman Liu;Fengqi Liu

作者机构：School of MicroelectronicsUniversity of Chinese Academy of SciencesBeijing 100049China Key Laboratory of Semiconductor Materials ScienceInstitute of SemiconductorsChinese Academy of SciencesBeijing Key Laboratory of Low Dimensional Semiconductor Materials and DevicesBeijing 100083China School of Materials Science and Optoelectronics EngineeringUniversity of Chinese Academy of SciencesBeijing 100049China 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2021年第42卷第9期

页      面：72-76页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by National Basic Research Program of China(Grant Nos.2018YFA0209103,2018YFB2200504) in part by National Natural Science Foundation of China(Grant Nos.61991430,61774146,61790583,61734006,61835011,61674144,61774150,61805168) in part by Beijing Municipal Science&Technology Commission(Grant No.Z201100004020006) in part by the Key projects of the Chinese Academy of Sciences(Grant No.2018147,Grant No.YJKYYQ20190002,Grant No.QYZDJ-SSW-JSC027,Grant No.XDB43000000,Grant No.ZDKYYQ20200006) 

主　　题：quantum cascade laser array coupled-ridge waveguide mid-infrared 

摘      要：In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)***-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffraction-limited intensity curve of about 10°was observed by properly designing a geometric shape of the ridges and *** introducing a buried 2nd-order distributed feedback(DFB)grating,substrate emission with a radiation power above 1 W at 25℃ is *** longitudinal mode operation is obtained by changing the temperature of the heatsink with a good linear wavelength tuning coefficient of -0.2 cm^(-1)/K.