A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip
A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip作者机构：Department of Mechanical Engineering Inha University Incheon Republic of Korea Division of Mechanical Engineering Inha University Incheon Republic of Korea
出 版 物：《Journal of Applied Mathematics and Physics》 (应用数学与应用物理（英文）)
年 卷 期：2015年第3卷第2期
页 面：201-207页
学科分类：1002[医学-临床医学] 100214[医学-肿瘤学] 10[医学]
主 题：A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip
摘 要：In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and contains probe tip that contacts to semiconductor. Through probe tip, it can inspect defects of semiconductor. In this paper, optimization method is used with response surface analysis to design MEMS type probe tip. And fabricating probe tip uses maskless lithography, electro-plating and lapping process.
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