Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability作者机构：Department of Mechanical Engineering Lamar University State Key Laboratory of Solid State Lighting School of Materials Science and Engineering Georgia Tech Delft University of Technology Institute of Semiconductors Chinese Academy of Sciences
出 版 物：《Engineering》 (工程（英文）)
年 卷 期：2015年第1卷第3期
页 面：384-390页
核心收录：
学科分类：080903[工学-微电子学与固体电子学] 0810[工学-信息与通信工程] 0830[工学-环境科学与工程（可授工学、理学、农学学位）] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0703[理学-化学] 0812[工学-计算机科学与技术（可授工学、理学学位）]
主 题：vapor pressure moisture semiconductor reliability microelectromechanical systems (MEMS) superhydrophobic nanocomposite coating
摘 要：Modeling vapor pressure is crucial for studying the moisture reliability of microelectronics, as high vapor pressure can cause device failures in environments with high temperature and humidity. To minimize the impact of vapor pressure, a super-hydrophobic(SH) coating can be applied on the exterior surface of devices in order to prevent moisture penetration. The underlying mechanism of SH coating for enhancing device reliability, however, is still not fully understood. In this paper, we present several existing theories for predicting vapor pressure within microelectronic materials. In addition, we discuss the mechanism and effectiveness of SH coating in preventing water vapor from entering a device, based on experimental results. Two theoretical models, a micro-mechanics-based whole-field vapor pressure model and a convection-diffusion model, are described for predicting vapor pressure. Both methods have been successfully used to explain experimental results on uncoated samples. However, when a device was coated with an SH nanocomposite, weight gain was still observed, likely due to vapor penetration through the SH surface. This phenomenon may cast doubt on the effectiveness of SH coatings in microelectronic devices. Based on current theories and the available experimental results, we conclude that it is necessary to develop a new theory to understand how water vapor penetrates through SH coatings and impacts the materials underneath. Such a theory could greatly improve microelectronics reliability.
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