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Cantilever with immobilized antibody for liver cancer biomarker detection

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Journal of Semiconductors 2014年第10期35卷 60-65页

作者：王帅鹏王晶晶朱银芳杨晋玲杨富华 Institute of Semiconductors Chinese Academy of Sciences State Key Laboratory of Transducer Technology

A novel cantilever array-based bio-sensor was batch-fabricated with IC compatible MEMS technology for precise liver cancer bio-marker detection. A micro-cavity was designed in the free end of the cantilever for local antibody-immobilization, thus the adsorption of the cancer biomarker takes place only in the local region of the cantilever instead of the whole lever, and the effect of adsorption-induced k variation can be dramatically reduced. These structural features offer several advantages： high sensitivity, high throughput, high mass detection accuracy, and a portable system. In addition, an analytical model has been established to eliminate the effect of the adsorption-induced lever stiffness change and has been applied to the precise mass detection of the cancer biomarker AFP; the experimentally detected AFP antigen mass by the sensor （7.6 pg/mL） is quite close to the calculated one （5.5 pg/mL）, two orders of magnitude better than those of the fully antibody-immobilized cantilever sensor. These approaches can promote real applications of the cantilever sensors in cancer diagnosis.

关键词： MEMS cantilever mass detection liver cancer biomarker local reaction adsorption-induced stiffnesschange

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

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Chinese Physics B 2014年第4期23卷 351-357页

作者：吴少华杜利东孔德义平皓月方震赵湛 State Key Laboratory of Transducer Technology Institute of Electronics Chinese Academy of Sciences State Key Laboratory of Transducer Technology Institute of Intelligent Machines Chinese Academy of Sciences University of Chinese Academy of Sciences

A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro- perforated panel （MPP） resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems （MEMS） tech- nology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezo- electric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

关键词： hybrid device noise energy harvesting acoustic noise reduction silicon micro-perforated panel

Polyphenol-mediated interfacial deposition strategy for supported manganese oxide catalysts with excellent pollutant degradation performance

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Chinese Chemical Letters 2024年第5期35卷 493-498页

作者： Dong Cheng Youyou Feng Bingxi Feng Ke Wang Guoxin Song Gen Wang Xiaoli Cheng Yonghui Deng Jing Wei The key laboratory of Biomedical Information Engineering of Ministry of Education State Key Lab of Transducer TechnologySchool of Life Science and TechnologyXi’an Jiaotong UniversityXi’an 710049China School of Environmental and Municipal Engineering Xi’an University of Architecture and TechnologyXi’an 710055China Department of Chemistry State Key Laboratory of Molecular Engineering of PolymersState Key Laboratory of Transducer TechnologyFudan UniversityShanghai 200433China key laboratory of Functional Inorganic Material Chemistry Ministry of EducationSchool of Chemistry and Materials ScienceHeilongjiang UniversityHarbin 150080China

In persulfate-based advanced oxidation process(PS-AOPs),fixing nanosized metal oxide on processable substrates is highly desirable to avoid the aggregation and loss of nanocatalysts during the practical application.However,it is still challenging to develop a versatile strategy for the deposition of metal oxide nanocatalysts on various substrates with different physicochemical properties.Herein,polyphenols are utilized as a“molecular glue”and reductant to mediate the interfacial deposition of MnO_(2) nanocatalysts on different substrates.MnO_(2) nanocatalysts were in-situ grown on macroscope mineral substrates(e.g.,airstone)via an interfacial redox strategy between tannic acid(TA)and oxidized KMnO4,and then employed as a fixed catalyst of peroxymonosulfate(PMS)activation for treating pharmaceutical and personal care products(PPCPs)in water.The fixed MnO_(2) exhibited superior catalytic performance toward different PPCPS via a singlet oxygen(^(1)O_(2))-dominated nonradical oxidation pathway.PPCPs in the secondary effluent of wastewater treatment plants could be effectively removed by a fixed-bed column of the fixed MnO_(2) with long term stability.Redox cycle of Mn^(4+)/Mn^(3+)and surface hydroxyl group of the fixed MnO_(2) was proved to be responsible for the activation of PMS.This work provides a new avenue for developing fixed metal oxides for sustainable water treatment.

关键词： Redox strategy Manganese oxides Fixed catalyst Peroxymonosulfate PPCPs

Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch

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Journal of Semiconductors 2013年第4期34卷 94-99页

作者：韩国威司朝伟宁瑾钟卫威孙国胜赵永梅杨富华 Institute of Semiconductors Chinese Academy of Sciences State Key Laboratory of Transducer Technology

This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.

关键词： MEMS filter feed-through cancellation difference method notch

Reactive ion etching of Ti-diffused LiNbO_3 slab waveguides

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Journal of Semiconductors 2013年第8期34卷 188-192页

作者：吴建杰李金洋要彦清祁志美 State Key Laboratory of Transducer Technology Institute of ElectronicsChinese Academy of Sciences

Reactive ion etching（RIE） of LiNbO_3（LN） in SF_6 plasma atmosphere was studied for optimizing the preparation conditions for LN ridge waveguides.The samples to be etched are Ti-diffused LN slab waveguides overlaid with a chromium film mask that has a Mach-Zehnder interferometer（MZI） array pattern.The experimental results indicate that the LN-etching rate（R_（LN）） and the Cr-etching rate（R_（Cr）） as well as the rate ratio R_（LN）/R_（Cr） increase with either increasing the radio-frequency（RF） power at a given SF_6 flow rate or increasing the SF_6 flow rate at a fixed RF power.The maximum values of R_（LN） = 43.2 nm/min and R_（LN）/R_（Cr） = 3.27 were achieved with 300 W RF power and 40 sccm SF_6 flow.When the SF_6 flow rate exceeds 40 sccm,an increase in the flow rate causes the etching rates and the rate ratio to decrease.The scanning electron microscope images of the LN ridge prepared after～20 min etching show that the ridge height is 680 nm and the sidewall slope angle is about 60°.

关键词： reactive ion etching Ti-diffused LiNbO_3 slab waveguide optimal etching parameters ridge waveguide

Preparation of Sn-Ag-In ternary solder bumps by electroplating in sequence and reliability

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Journal of Semiconductors 2011年第8期32卷 27-32页

作者：王栋良袁媛罗乐 State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Graduate of University Chinese Academy of Sciences State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information TechnologyChinese Academy of Sciences

This paper describes a technique that can obtain ternary Sn-Ag-In solder bumps with fine pitch and homogenous composition distribution.The main feature of this process is that tin-silver and indium are electroplated on copper under bump metallization（UBM） in sequence.After an accurate reflow process,Sn_（1.8）Ag_（9.4）In solder bumps are obtained.It is found that the intermetallic compounds（IMCs） between Sn-Ag-In solder and Cu grow with the reflow time,which results in an increase in Ag concentration in the solder area.So during solidification, more Ag_2In nucleates and strengthens the solder.

关键词： Sn-Ag-In solder bumps electroplating microstructure shear strength

Dependence of wet etch rate on deposition,annealing conditions and etchants for PECVD silicon nitride film

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Journal of Semiconductors 2009年第9期30卷 151-154页

作者：唐龙娟朱银芳杨晋玲李艳周威解婧刘云飞杨富华 Institute of Semiconductors Chinese Academy of Sciences State Key Laboratory of Transducer Technology

The influence of deposition, annealing conditions, and etchants on the wet etch rate of plasma enhanced chemical vapor deposition （PECVD） silicon nitride thin film is studied. The deposition source gas flow rate and annealing temperature were varied to decrease the etch rate of SiNx：H by HF solution. A low etch rate was achieved by increasing the SiH4 gas flow rate or annealing temperature, or decreasing the NH3 and N2 gas flow rate. Concentrated, buffered, and dilute hydrofluoric acid were utilized as etchants for Sit2 and SiNx：H. A high etching selectivity of Sit2 over SiNx：H was obtained using highly concentrated buffered HE

关键词： plasma enhanced chemical vapor deposition silicon nitride HF solution etch rate

Portable System for Rapid Field Test of CEA in Human Serum Based on Chemiluminescence Enzyme Immunoassay

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Chinese Journal of Electronics 2017年第1期26卷 152-155页

作者： LIU Juntao QU Shuxue LUO Jinping WANG Bin CAI Xinxia State Key Laboratory of Transducer Technology Institute of Electronics Chinese Academy of Sciences University of Chinese Academy of Sciences

Carcinoembryonic antigen(CEA) is one of the most widely used tumor markers worldwide. A portable system was designed for rapid field specific test of CEA based on immunomagnetic separation and chemiluminescence immunoassay, which consisted of chemiluminescent immunosensor and optical test instrument. The chemiluminescent immunosensor was based on immunomagnetic separation and chemiluminescence immunoassay, which utilized a immuno-sandwich scheme as-say with Horseradish peroxidase(HRP) labeled anti-CEA antibody and Immunomagnetic beads(IMBs). And the test instrument consisted of optical detection module and central processing and control system. The optical noise of this instrument was below 40 photons/s. The system could achieve a sample test in 30 minutes, and the detecting result showed a good liner relationship between the intensity of luminescence and concentration of CEA in the range from 1 to1000ng/m L, with a correlation coefficient of 0.9858. Real human samples were also detected with this system in comparison with clinical results and a correlation coefficient of0.9934 was obtained. The instrument is portable and easy to operate, which will provide potential application in cancer clinical test.

关键词： Chemiluminescence immunoassay Carcinoembryonic antigen Rapid field test Optical sensor FPGA NIOS II processor

Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications

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Journal of Semiconductors 2009年第8期30卷 34-38页

作者：解婧刘云飞杨晋玲唐龙娟杨富华 Institute of Semiconductors Chinese Academy of Sciences State Key Laboratory of Transducer Technology

The simultaneous control of residual stress and resistivity of polysilicon thin films by adjusting the deposition parameters and annealing conditions is studied. In situ boron doped polysilicon thin films deposited at 520 ℃ by low pressure chemical vapor deposition （LPCVD） are amorphous with relatively large compressive residual stress and high resistivity. Annealing the amorphous films in a temperature range of 600-800 ℃ gives polysilicon films nearly zero-stress and relatively low resistivity. The low residual stress and low resistivity make the polysilicon films attractive for potential applications in micro-electro-mechanical-systems （MEMS） devices, especially in high resonance frequency （high-f） and high quality factor （high-Q） MEMS resonators. In addition, polysilicon thin films deposited at 570 ℃ and those without the post annealing process have low resistivities of 2-5 mΩ·cm. These reported approaches avoid the high temperature annealing process （〉 1000 ℃）, and the promising properties of these films make them suitable for high-Q and high-f MEMS devices.

关键词： low pressure chemical vapor deposition polysilicon residual stress film resistivity annealing micro-electromechanical systems