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Optical coating and nano-structuring on plastics

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光学精密工程 2005年第4期13卷 459-464页

作者： U. Schulz P. Munzert A. Kaless N. Kaiser Fraunhofer Institut für Angewandte optik und Feinmechnik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechnik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechnik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechnik Albert-Einstein-Str. 7D-07745 Jena Germany

The coating of plastics for optical applications is intended to improve the mechanical durability of soft polymers and to serve an antireflection function. Usually a classic four-layer antireflection system is added on top of a single-layer hard coating. With needle optimisation,an alternative coating design has been developed. Plasma ion assisted deposition was used to deposit coatings upon polymers. Uniform antireflection and high scratch resistance have been achieved.

关键词：光学涂覆技术纳米结构塑料光学仪器

Multilayer optics for the EUV and soft X-rays

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光学精密工程 2005年第4期13卷 421-429页

作者： Torsten Feigl Sergiy Yulin Nicolas Benoit Norbert Kaiser Fraunhofer Institut für Angewandte optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena Germany

The demand to enhance the optical resolution, to structure and observe ever smaller details, has pushed the way towards the EUV and soft X-rays. Induced mainly by the production of more powerful electronic circuits with the aid of projection lithography, optics developments in recent years can be characterized by the use of electromagnetic radiation with smaller wavelength. The good prospects of the EUV and soft X-rays for next generation lithography systems (λ=13.5 nm), microscopy in the “water window” (λ=2.3～4.4 nm), astronomy (λ=5～31 nm), spectroscopy, plasma diagnostics and EUV/soft X-ray laser research have led to considerable progress in the development of different multilayer optics. Since optical systems in the EUV/soft X-ray spectral region consist of several mirror elements a maximum reflectivity of each multilayer is essential for a high throughput. This paper covers recent results of the enhanced spectral behavior of Mo/Si, Cr/Sc and Sc/Si multilayer optics.

关键词： EUV X射线多层膜光学涂覆技术 Mo/Si Cr/Sc Sc/Si 光电子技术

Optical coatings:trends and challenges

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光学精密工程 2005年第4期13卷 389-396页

作者： Norbert Kaiser Torsten Feigl Olaf Stenzel Ulrike Schulz Fraunhofer Institut für Angewandte optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena Germany

New applications in optoelectronics, photonics, telecommunication, displays, optical data processing, biomedicine, sensors, energy control, automobile, aerospace, and architecture stimulation are important developments in physics and technology of optical coatings. This paper will focus on the latest advances in the areas of new optical film systems and devices, new optical coating materials and film fabrication techniques, process control and monitoring, and different advanced applications. Particularly, focus is on optical films that combine optical design with microstructural features tailored on the nanometer and micrometer scales. Evaluation of film stability and integrity in harsh industrial environments and their compatibility with organic polymers are important as well.

关键词：光学涂覆技术光电子技术光学仪器光学材料

Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry(Invited Paper)

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Chinese Optics Letters 2009年第12期7卷 1109-1112页

作者： G. Pedrini J. Gaspar O. Paul W. Osten Institut fr Technische optik Universitt Stuttgart Department of Microsystems Engineering-IMTEK Universitt Freiburg

The reliability of microsystems is an important issue and for their quality inspection, it is necessary to know the displacements or deformations due to the applied mechanical, thermal, or electrostatic loads. We show how interferometrical techniques like digital holography and speckle interferometry can be used for the measurement of in plane deformations of microsystems with nanometric accuracy and we give a description of the measurement uncertainties.

关键词： Invited Paper Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Lau Effect Using LED Array for Lithography

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Nanomanufacturing and Metrology 2021年第3期4卷 165-174页

作者： Xinrui Cao Patrick FeBer Stefan Sinzinger Fachgebiet Technische optik Institut flir Mikro-und Nanotechnologien(IMN)MacroNano■Technische Universitat IlmenauIlmenauGermany

Illumination with LEDs is of increasing interest in imaging and *** particular,compared to lasers,LEDs are temporally and spatially incoherent,so that speckle effects can be avoided by the application of ***,LED arrays are qualified due to their high optical output ***,LED arrays have not been widely used for investigating optical effects,e.g.,the Lau *** this paper,we propose the application of an LED array for realizing the Lau effect by taking into account the influence of the coherence properties of illumination on the Lau *** spatially incoherent illumination with the LED array or a single LED,triangular distributed Lau fringes can be *** apply the obtained Lau fringes in the optical lithography to produce analog *** to a single LED,the Lau fringes using the LED array have significantly higher ***,the exposure time in the lithography process is largely reduced.

关键词： Lau effect LED array Lithography Spatial coherence properties of illumination

A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data

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光学精密工程 2005年第4期13卷 487-491页

作者： S. Wilbrandt O. Stenzel D. Gbler N. Kaiser Friedrich-Schiller-Universitt Jena Institut für Angewandte Physik Max-Wien-Platz 1 07743 Jena GermanyFraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena Germany

Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings, a new model was developed, which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process, a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally, a significantly improved accuracy of the modelled transmittance was achieved.

关键词：光学涂覆技术折射率宽带混合模型管理方式

Lensless light-field imaging through diffuser encoding

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Light(Science & Applications) 2020年第1期9卷 637-645页

作者： Zewei Cai Jiawei Chen Giancarlo Pedrini Wolfgang Osten Xiaoli Liu Xiang Peng Institut fur Technische optik Universitat StuttgartPfaffenwaldring 970569 StuttgartGermany College of Physics and Optoelectronic Engineering Shenzhen University518060 GuangdongShenzhenChina

Microlens array-based light-field imaging has been one of the most commonly used and effective technologies to record high-dimensional optical signals for developing various potential high-performance applications in many ***,the use of a microlens array generally suffers from an intrinsic trade-off between the spatial and angular *** this paper,we concentrate on exploiting a diffuser to explore a novel modality for light-field *** demonstrate that the diffuser can efficiently angularly couple incident light rays into a detected image without needing any *** characterize and analyse this phenomenon,we establish a diffuser-encoding light-field transmission model,in which four-dimensional light fields are mapped into two-dimensional images via a transmission matrix describing the light propagation through the ***,a calibration strategy is designed to flexibly determine the transmission matrix,so that light rays can be computationally decoupled from a detected image with adjustable spatio-angular resolutions,which are unshackled from the resolution limitation of the *** proof-of-concept approach indicates the possibility of using scattering media for lensless four-dimensional light-field recording and processing,not just for two-or three-dimensional imaging.

关键词： scattering light field

Excitation and relaxation dynamics in ultrafast laser irradiated optical glasses

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High Power Laser Science and Engineering 2016年第4期4卷 1-8页

作者： C.Mauclair A.Mermillod-Blondin K.Mishchik J.Bonse A.Rosenfeld J.P.Colombier R.Stoian Laboratoire Hubert Curien UMR 5516 CNRSUniversité de LyonUniversité Jean Monnet Max-Born-Institut für Nichtlineare optik und Kurzzeitspektroskopie Bundesanstalt für Materialforschung und-prüfung (BAM)

We discuss the dynamics of ultrashort pulsed laser excitation in bulk optical silica-based glasses(fused silica and borosilicate BK7) well-above the permanent modification threshold. We indicate subsequent structural and thermomechanical energy relaxation paths that translate into positive and negative refractive index changes, compression and rarefaction zones. If fast electronic decay occurs at low excitation levels in fused silica via self-trapping of excitons,for carrier densities in the vicinity of the critical value at the incident wavelength, persistent long-living absorptive states indicate the achievement of low viscosity matter states manifesting pressure relaxation, rarefaction, void opening and compaction in the neighboring domains. An intermediate ps-long excited carrier dynamics is observed for BK7 in the range corresponding to structural expansion and rarefaction. The amount of excitation and the strength of the subsequent hydrodynamic evolution is critically dependent on the pulse time envelope, indicative of potential optimization schemes.

关键词： carrier plasmas glasses pulse shaping refractive index engineering ultrafast laser excitation

Recent advances and applications of machine learning in solidstate materials science

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npj Computational Materials 2019年第1期5卷 394-429页

作者： Jonathan Schmidt Mário R.G.Marques Silvana Botti Miguel A.L.Marques Institut für Physik Martin-Luther-Universität06120 Halle-WittenbergHalle(Saale)Germany Institut für Festkörpertheorie und-optik Friedrich-Schiller-Universität JenaMax-Wien-Platz 107743 JenaGermany

One of the most exciting tools that have entered the material science toolbox in recent years is machine *** collection of statistical methods has already proved to be capable of considerably speeding up both fundamental and applied *** present,we are witnessing an explosion of works that develop and apply machine learning to solid-state *** provide a comprehensive overview and analysis of the most recent research in this *** a starting point,we introduce machine learning principles,algorithms,descriptors,and databases in materials *** continue with the description of different machine learning approaches for the discovery of stable materials and the prediction of their crystal *** we discuss research in numerous quantitative structure–property relationships and various approaches for the replacement of first-principle methods by machine *** review how active learning and surrogate-based optimization can be applied to improve the rational design process and related examples of *** major questions are always the interpretability of and the physical understanding gained from machine learning *** consider therefore the different facets of interpretability and their importance in materials ***,we propose solutions and future research paths for various challenges in computational materials science.

关键词： learning gained starting