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A self-centering and stiffness-controlled MEMS accelerometer

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microsystems & Nanoengineering 2024年第1期10卷 27-40页

作者： Yiming Jin Zhipeng Ma Ziyi Ye Mingkang Li Xudong Zheng Zhonghe Jin School of Aeronautics and Astronautics Zhejiang UniversityHangzhou 310013China Key laboratory of micro/Nano-Satellite research of Zhejiang Province Hangzhou 310007PR China

This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic stiffness tuning capability based on double-sided parallel plates(DSPPs).DC and AC electrostatic tuning enable the adjustment of the effective stiffness and the calibration of the geometric offset of the proof mass,respectively.A dynamical model of the proposed accelerometer was developed considering both DC/AC electrostatic tuning and the temperature *** on the dynamical model,a self-centering closed loop is proposed for pulling the reference position of the forceto-rebalance(FTR)to the geometric center of *** self-centering accelerometer operates at the optimal reference position by eliminating the temperature drift of the readout circuit and nulling the net electrostatic tuning *** stiffness closed-loop is also incorporated to prevent the pull-in instability of the tuned low-stiffness accelerometer under a dramatic temperature ***-time adjustments of the reference position and the DC tuning voltage are utilized to compensate for the residue temperature drift of the proposed *** a result,a novel controlling approach composed of a self-centering closed loop,stiffness-closed loop,and temperature drift compensation is achieved for the accelerometer,realizing a temperature drift coefficient(TDC)of approximately 7μg/℃ and an Allan bias instability of less than 1μg.

关键词： stiffness electrostatic centering

Recent progress in lanthanide ions doped inorganic metal halide perovskites

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Journal of Rare Earths 2024年第2期42卷 237-250,I0001页

作者： Yiyan Zhang Tianyu Zhao Guanying Chen MIIT Key laboratory of Critical Materials Technology for New Energy Conversion and Storage School of Chemistry and Chemical EngineeringState Key Laboratory of Urban Water Resource and EnvironmentKey Laboratory of Micro-systems and Micro-structuresMinistry of EducationHarbin Institute of TechnologyHarbin150001China

Benefiting from their large molar extinction coefficient,high carrier mobility,narrow and tunable emissions,inorganic metal halide perovskites(IMHPs) demonstrate great potential in various optoelectrical devices including solar cells,light emitting diodes and photodetectors in the past few *** ions doping,well-known as a modification method of semiconductors,has been extensively applied in IMHPs as *** metal ions have been doped in IMHPs including alkali metals,alkali earth metals,transition metals and lanthanide metals,which either improve their optical performances or induce intriguing brand-new *** them,lanthanide metals feature plentiful energy levels and stable optical properties and are one of the most noteworthy *** we review recent progress in lanthanide ions doped *** summarize Yb,Eu or Er ions singly doping in detail,which was the most investigated species in *** lanthanide ions are also reviewed ***,we introduce lanthanide ions multi-doped IMHPs and at last we put forward several potential development *** the interests in lanthanide ions doped IMHPs rise,researchers have made some achievements in the *** though,there are more unexplored *** there are review articles focusing on metal ions doped IMHPs or lanthanide ions doped perovskites,this review aims to provide an overall introduction of lanthanide ions doped *** review may help researchers learn about lanthanide ions doped IMHPs and is to inspire researchers to make further promotion in this field.

关键词： Halide perovskite Lanthanide Doping Rare earths

Improving surface integrity of micro-holes in ECDM using ultrahigh-speed rotary of tool cathode and non-water-based electrolyte

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Chinese Journal of Aeronautics 2024年第5期37卷 506-519页

作者： Jiwen SHEN Weijing KONG Zhengyang XU Yongbin ZENG Jiangsu Key laboratory of Precision and micro-Manufacturing Technology Nanjing University of Aeronautics and AstronauticsNanjing 210016China

The surface integrity of metal micro-hole structures produced by electrochemical discharge machining is unsatisfactory owing to the insufficient reaction area and strength of electrolysis action.A novel ultrahigh-speed Rotary Electrochemical Discharge Machining(R-ECDM)using non-water-based electrolyte is proposed to improve surface integrity by changing the breakdown medium of spark discharge and increasing the reaction area and strength of electrolysis.A mathematical model was developed to establish the relationship between rotational speed and forces acting on the *** on the magnitude of forces,controlling rotational speed changed the behavior and departure radius of bubbles on the cathode ***-speed photographs validate that,in the mathematical model,the number and departure radius of bubbles on the cathode surface gradually decrease with the increase of rotational *** experimental results show that the roughness(Ra)of the micro-hole sidewall decreases from 2.54μm to 0.20μm when the rotational speed increases from 500 r/min to 40000 r/*** length loss and wear ratio of the cathode are only 9.75μm and 6.5%,***,the micro-holes array with recast-free and surface roughness of 0.20μm is fabricated,demonstrating that the proposed approach contributes to improving surface integrity of metal micro-holes.

关键词： Electrochemical discharge machining micro-holes Recast layer Ultrahigh-speed rotary Bubbles Force analysis Non-water-based solution

A spaceborne advanced storage system for remote sensing microsatellites

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Frontiers of Information Technology & Electronic Engineering 2024年第4期25卷 600-615页

作者： Shilei TU Huiquan WANG Yue HUANG Zhonghe JIN micro-Satellite research Center Zhejiang UniversityHangzhou 310027China Key laboratory of micro-Nano Satellite research Zhejiang ProvinceHangzhou 310027China

With the development of satellite miniaturization and remote sensing,the establishment of microsatellite constellations is an inevitable *** to their limited size,weight,and power,spaceborne storage systems with excellent scalability,performance,and reliability are still one of the technical bottlenecks of remote sensing *** on the commercial off-the-shelf field-programmable gate array and memory devices,a spaceborne advanced storage system(SASS)is proposed in this *** work provides a dynamic programming,queue scheduling multiple-input multiple-output cache technique and a high-speed,high-reliability NAND flash controller for multiple microsatellite payload *** results show that SASS has outstanding scalability with a maximum write rate of 2429 Mb/s and preserves at least 78.53%of the performance when a single NAND flash *** scheduling technique effectively shortens the data scheduling time,and the data remapping method of the NAND flash controller can reduce the retention error by at least 50.73%and the program disturbance error by at least 37.80%.

关键词： microsatellite Spaceborne advanced storage system(SASS) Scalability Performance Reliability

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

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microsystems & Nanoengineering 2024年第3期10卷 169-180页

作者： Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu Ningbo Institute of Northwestern Polytechnical University College of Mechanical EngineeringNorthwestern Polytechnical University710072 Xi’anChina Key laboratory of micro/Nano Systems for Aerospace(Ministry of Education) Shaanxi Province Key Laboratory of Micro and Nanoelectromechanical SystemsNorthwestern Polytechnical University710072 Xi’anChina

As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many ***,two crucial challenges exist in the fabrication of such devices:the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual *** solve these issues,an innovative processing method assisted by temporary anchors is *** approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon ***,these temporary anchors are strategically placed within the primary etching areas,enabling easy removal without additional processing *** a result,we successfully achieved wafer-level,high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%.Demonstrating superior capabilities to those of original MMAs,our enhanced version boasts a total of 60 linear micromirror elements,each featuring a length-to-width ratio of 52.6,and the entire optical aperture measures 5 mm×6 *** linear MMA exhibits an optical deflection angle of 20.4°at 110 Vdc while maintaining exceptional deflection flatness and *** study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields,and the proposed MMA is promising as a replacement for digital micromirror devices(DMDs,by TI Corp.)in fields such as spectral imaging and optical communication.

关键词： mirror exceptional anodic

Local environment regulation of transition metal dichalcogenide-based single-atom catalysts

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Rare Metals 2024年第9期43卷 4019-4037页

作者： Ming-Hui Li Jing Li Xiao-Yu Zheng Yao Zhou Advanced research Institute of Multidisciplinary Science andSchool of Chemistry and Chemical Engineering Beijing Institute of Technology Laser micro/Nano Fabrication laboratory School of Mechanical Engineering Beijing Institute of Technology

Single-atom catalysts have risen significant attention in the realm of green electrocatalytic energy conversion to address energy and environmental sustainability challenges. Transition metal dichalcogenide（TMD）-based single-atom catalysts are considered highly effective in electrocatalysis due to the TMDs' notable specific surface area, tunable elemental species and efficient utilization of single atoms. In order to enhance electrocatalytic performance, it is imperative to elaborately engineer the local environment surrounding the active sites of single atoms within TMDs. In this review, we initially explore the effects of synthesis methods on single-atom active sites and the influence of loading of single atoms on catalytic performance for TMDs. The modulation strategies of the local environment surrounding single-atom sites in TMDs are elaborated, including substitution engineering,surface adsorption, vacancies, spatial confinement and dual-atom site strategies. For each modulation strategy, the effects of diverse local environments on various electrocatalytic applications are presented, such as the oxygen evolution reaction, oxygen reduction reaction, nitrogen reduction reaction, CO2reduction reaction and CO oxidation. Ultimately, this study presents a comprehensive overview of the challenges encountered and the potential directions for the advancement of single-atom catalysts based on TMDs in the realm of electrocatalysis.

关键词： Electrocatalysis

Simple electrode assembly engineering:Toward a multifunctional lead-acid battery

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Journal of Energy Chemistry 2024年第9期96卷 536-543页

作者： Xiaojuan Cao Xiaoyu Yan Kai Zhao Le Ke Xiaoyi Jiang Lingjiao Li Ning Yan Key laboratory of Artificial micro-and Nano-Structures of Ministry of Education School of Physics and TechnologyWuhan UniversityWuhan 430072HubeiChina Shenzhen research Institute of Wuhan University Shenzhen 518057GuangdongChina

Electrochemical energy storage is a promising technology for the integration of renewable ***-acid battery is perhaps among the most successful commercialized systems ever since thanks to its excellent cost-effectiveness and safety *** of 165 years of development,the low energy density as well as the coupled power and energy density scaling restrain its wider application in real *** address this challenge,we optimized the configuration of conventional Pb-acid battery to integrate two gas diffusion *** novel device can work as a Pb-air battery using ambient air,showing a peak power density of 183 mW cm^(−2),which was comparable with other state-of-the-art metal-O_(2)*** can also behave as a fuel cell,simultaneously converting H_(2)and air into electricity with a peak power density of 75 mW cm^(−2).Importantly,this device showed little performance degradation after 35 h of the longevity *** work shows the exciting potential of lead battery technology and demonstrates the importance of battery architecture optimization toward improved energy storage capacity.

关键词： Lead-acid battery Decoupled electrode reaction Energy storage Discharge capacity Fuel cell

Solar manipulations of perpendicular magnetic anisotropy for flexible spintronics

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Frontiers of physics 2024年第4期19卷 73-79页

作者： Zhexi He Yifan Zhao Yujing Du Meng Zhao Yuxuan Jiang Ming Liu Ziyao Zhou State Key laboratory for Manufacturing Systems Engineering Electronic Materials Research LaboratoryKey Laboratory of the Ministry of Education&International Center for Dielectric ResearchSchool of Electronic Science and EngineeringThe International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologyXi’an Jiaotong UniversityXi’an 710049China School of Materials Science&Engineering Changzhou UniversityChangzhou 213164China

Flexible electronics/spintronics attracts researchers’attention for their application potential abroad in wearable devices,healthcare,and other *** devices’performance(speed,energy consumption)is highly dependent on manipulating information bits(spin-orientation in flexible spintronics).In this work,we established an organic photovoltaic(OPV)/ZnO/Pt/Co/Pt heterostructure on flexible PET substrates with perpendicular magnetic anisotropy(PMA).Under sunlight illumination,the photoelectrons generated from the OPV layer transfer into the PMA heterostructure,then they reduce the PMA strength by enhancing the interfacial Rashba field *** coercive field(Hc)reduces from 800 Oe to 500 Oe at its maximum,and the magnetization can be switched up and down *** stability of sunlight control of magnetization reversal under various bending conditions is also tested for flexible spintronic ***,the voltage output of sunlight-driven PMA is achieved in our prototype device,exhibiting an excellent angular dependence and opening a door towards solar-driven flexible spintronics with much lower energy consumption.

关键词： interfacial magnetoelectric coupling perpendicular magnetic anisotropy deterministic magnetization reversal photovoltaic control of magnetism

Fast charge transfer kinetics in Sv-ZnIn_(2)S_(4)/Sb_(2)S_(3)S-scheme heterojunction photocatalyst for enhanced photocatalytic hydrogen evolution

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Rare Metals 2024年第2期43卷 533-542页

作者： Wei Li Jia-Jun Li Zhi-Fei Liu Hong-Yu Ma Peng-Fei Fang Rui Xiong Jian-Hong Wei Key laboratory of Artificial micro-and Nano-Structures of Ministry of Education School of Physics and TechnologyWuhan UniversityWuhan430072China

Constructing a S-scheme heterojunction with tight interface contact and fast charge transfer is beneficial to improving the photocatalytic hydrogen evolution ***,a unique one-dimensional(1D)/two-dimensional(2D)S-scheme heterojunction containing 1D Sb_(2)S_(3) nanorods and 2D ZnIn_(2)S_(4) with affluent sulfur vacancies(denoted as Sv-ZnIn_(2)S_(4)@Sb_(2)S_(3)) was *** introduced sulfur vacancy can promote the effective adsorption of H+for the following interfacial hydrogen-evolution ***,the larger contact area and stronger electron interaction between Sb_(2)S_(3) and ZnIn_(2)S_(4) effectively inhibits the recombination of photo-generated electron–hole pairs and abridges the migration distance of *** a result,the optimal Sv-ZnIn_(2)S_(4)@Sb_(2)S_(3) sample achieves H_(2) evolution activity of 2741.3 mol·h^(−1)·g^(−1),which is 8.6 times that of pristine ZnIn_(2)S_(4) and 3.0 times that of the Sv-ZnIn_(2)S_(4) *** on the experimental result,the photo-reactivity S-scheme mechanism of hydrogen evolution from water splitting with Sv-ZnIn_(2)S_(4)@Sb_(2)S_(3) is *** work provides an effective method for developing S-scheme heterojunction composites of transition metal sulfide with high hydrogen evolution performance.

关键词： ZnIn_(2)S_(4) nanosheets S-scheme heterojunction Sulfur vacancy Charge transfer and separation Photocatalytic H_(2)evolution