A self-centering and stiffness-controlled MEMS accelerometer
作者机构：School of Aeronautics and AstronauticsZhejiang UniversityHangzhou 310013China Key Laboratory of Micro/Nano-Satellite Research of Zhejiang ProvinceHangzhou 310007PR China
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2024年第10卷第1期
页 面：27-40页
核心收录：
学科分类：07[理学] 070202[理学-粒子物理与原子核物理] 0702[理学-物理学]
基 金：supported by a Grant from the National Natural Science Foundation of China(Grant No.62104211)
主 题：stiffness electrostatic centering
摘 要：This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic stiffness tuning capability based on double-sided parallel plates(DSPPs).DC and AC electrostatic tuning enable the adjustment of the effective stiffness and the calibration of the geometric offset of the proof mass,respectively.A dynamical model of the proposed accelerometer was developed considering both DC/AC electrostatic tuning and the temperature *** on the dynamical model,a self-centering closed loop is proposed for pulling the reference position of the forceto-rebalance(FTR)to the geometric center of *** self-centering accelerometer operates at the optimal reference position by eliminating the temperature drift of the readout circuit and nulling the net electrostatic tuning *** stiffness closed-loop is also incorporated to prevent the pull-in instability of the tuned low-stiffness accelerometer under a dramatic temperature ***-time adjustments of the reference position and the DC tuning voltage are utilized to compensate for the residue temperature drift of the proposed *** a result,a novel controlling approach composed of a self-centering closed loop,stiffness-closed loop,and temperature drift compensation is achieved for the accelerometer,realizing a temperature drift coefficient(TDC)of approximately 7μg/℃ and an Allan bias instability of less than 1μg.
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