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An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers

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Microsystems & Nanoengineering 2024年第3期10卷 409-419页

作者： Yuwen Su Yingtao Ding Lei Xiao Ziyue Zhang Yangyang Yan Zhifang Liu Zhiming Chen Huikai Xie School of Integrated Circuits and Electronics Beijing Institute of TechnologyBeijingChina Chongqing institute of Microelectronics and Microsystems Beijing Institute of TechnologyChongqingChina

Silicon interposers embedded with ultra-deep through-silicon vias(TSVs)are in great demand for the heterogeneous integration and packaging of opto-electronic chiplets and microelectromechanical systems(MEMS)*** the cost-effective and reliable manufacturing of ultra-deep TSVs,the formation of continuous barrier and seed layers remains a crucial challenge to ***,we present a novel dual catalysis-based electroless plating(ELP)technique by tailoring polyimide(PI)liner surfaces to fabricate dense combined Ni barrier/seed layers in ultradeep *** additional to the conventional acid catalysis procedure,a prior catalytic step in an alkaline environment is proposed to hydrolyze the PI surface into a polyamide acid(PAA)interfacial layer,resulting in additional catalysts and the formation of a dense Ni layer that can function as both a barrier layer and a seed layer,particularly at the bottom of the deep *** with depths larger than 500μm and no voids are successfully fabricated in this *** fabrication process involves low costs and *** a fabricated 530-μm-deep TSV with a diameter of 70μm,the measured depletion capacitance and leakage current are approximately 1.3 pF and 1.7 pA at 20 V,respectively,indicating good electrical *** proposed fabrication strategy can provide a cost-effective and feasible solution to the challenge of manufacturing ultra-deep TSVs for modern 3D heterogeneous integration and packaging applications.

关键词： properties. catalysis alkaline

Uncovering the dominant contribution of intermediate volatility compounds in secondary organic aerosol formation from biomass-burning emissions

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National Science Review 2024年第3期11卷 150-158页

作者： Kun Li Jun Zhang David M.Bell Tiantian Wang Houssni Lamkaddam Tianqu Cui Lu Qi Mihnea Surdu Dongyu Wang Lin Du Imad El Haddad Jay G.Slowik Andre S.H.Prevot Environment Research institute Shandong University Laboratory of Atmospheric Chemistry Paul Scherrer Institute

Organic vapors from biomass burning are a major source of secondary organic aerosols(SOAs). Previous smog chamber studies found that the SOA contributors in biomass-burning emissions are mainly volatile organic compounds(VOCs). While intermediate volatility organic compounds(IVOCs) are efficient SOA precursors and contribute a considerable fraction of biomass-burning emissions, their contribution to SOA formation has not been directly observed. Here, by deploying a newly-developed oxidation flow reactor to study SOA formation from wood burning, we find that IVOCs can contribute ～70% of the formed SOA, i.e.>2 times more than VOCs. This previously missing SOA fraction is interpreted to be due to the high wall losses of semi-volatile oxidation products of IVOCs in smog chambers. The finding in this study reveals that SOA production from biomass burning is much higher than previously thought, and highlights the urgent need for more research on the IVOCs from biomass burning and potentially other emission sources.

关键词： atmospheric chemistry biomass burning secondary organic aerosol intermediate volatility organic compounds

Ru-doped functional porous materials for electrocatalytic water splitting

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Nano Research 2024年第3期17卷 982-1002页

作者： Chongao Tian Rui Liu Yu Zhang Wenxiu Yang Bo Wang Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials Advanced Technology Research Institute(Jinan)Advanced Research Institute of Multidisciplinary ScienceSchool of Chemistry and Chemical EngineeringBeijing Institute of TechnologyBeijing 100081China Beijing institute of Technology Library Beijing Institute of TechnologyBeijing 100081China

Electrolytic water splitting(EWS)is an attractive and promising technique for the production of hydrogen ***,the sluggish kinetic rate of hydrogen/oxygen evolution reactions leads to a high overpotential and low energy *** to date,Pt/Ir-based nanocatalysts have become the state-of-the-art EWS catalysts,but disadvantages such as high cost and low earth abundance greatly limit their applications in EWS *** an attractive candidate for the Pt/Ir catalysts,series of Ru-based nanomaterials have aroused much attention for their low price,Pt-like hydrogen bond strength,and high EWS *** particular,Ru-doped functional porous materials have been becoming one of the most representative EWS catalysts,which can not only achieve the dispersion and adjustment for active Ru sites,but also simultaneously solve the problems of mass transfer and catalytic conversion in *** this review,the design and preparation strategies of Ru-doped functional porous materials toward EWS in recent years are summarized,including Ru-doped metal organic frameworks(MOFs),Ru-doped porous organic polymers(POPs),and their ***,detailed structure–activity relationships induced by the tuned geometric/electronic structures of Ru-doped functional porous materials are further depicted in this *** but not least,the challenges and perspectives of Ru-doped functional porous materials catalysts are reasonably proposed to provide fresh ideas for the design of Ru-based EWS catalysts.

关键词： Ru-based catalyst functional porous materials electrolytic water splitting oxygen evolution reaction hydrogen evolution reaction

Motion of charged particles in bright squeezed vacuum

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Light(Science & Applications) 2024年第2期13卷 347-353页

作者： Matan Even Tzur Oren Cohen Solid State institute and Physics Department Technion-Israel Institute of TechnologyHaifa3200003Israel

The motion of laser-driven electrons quivers with an average energy termed pondermotive *** explore electron dynamics driven by bright squeezed vacuum(BSV),finding that BSV induces width oscillations,akin to electron quivering in laser light,with an equivalent ponderomotive *** identify closed and open trajectories of the electronic width that are associated with high harmonic generation and above-threshold ionization,respectively,similarly to trajectories of the electron position when its motion is driven by coherent *** the case of bound electrons,the width oscillations may lead to ionization with noisy sub-cycle *** results are foundational for strong-field and free-electron quantum optics,as they shed light on ionization,high harmonic generation,and nonlinear Compton scattering in BSV.

关键词： structure vacuum ionization

On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

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Nano-Micro Letters 2024年第7期16卷 98-108页

作者： Qun Jin Tianxiao Guo Nicolas Perez Nianjun Yang Xin Jiang Kornelius Nielsch Heiko Reith institute for Metallic Materials Leibniz Institute for Solid State and Materials Research01069 DresdenGermany institute of Materials Engineering University of Siegen57076 SiegenGermany institute of Applied Physics Technical University of Dresden01069 DresdenGermany institute of Materials Science Technical University of Dresden01069 DresdenGermany

Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern ***,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely ***,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane *** tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are *** proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.

关键词： Temperature control Low-power electronics On-chip micro temperature controller Freestanding thermoelectric nano films Temperature-sensitive components

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Wireless multisite sensing systems for continuous physiological monitoring

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Science China Materials 2024年第6期67卷 2045-2047页

作者： Ruilai Wei Qilin Hua Guozhen Shen School of Integrated Circuits and Electronics Beijing Institute of TechnologyBeijing 100081China institute of Flexible Electronics Beijing Institute of TechnologyBeijing 102488China

Respiratory diseases rank as the third leading cause of adult mortality[1],while cardiopulmonary and gastrointestinal issues are the primary cause of death within the first five years of a child’s life[2].The monitoring of cardiac,respiratory,and gastrointestinal sounds plays a vital role in routine care,as alterations or absence of these body sounds can serve as indicators of underlying diseases.

关键词： routine continuous monitoring

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Perspective on powder technology for all-solid-state batteries:How to pair sulfide electrolyte with high-voltage cathode

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Particuology 2024年第3期86卷 55-66页

作者： Jiangkui Hu Shijie Yang Yingying Pei Xilong Wang Yulong Liao Shuai Li Aolong Yue Jia-Qi Huang Hong Yuan School of Materials Science&Engineering Beijing Institute of TechnologyBeijing100081China Advanced Research institute of Multidisciplinary Science Beijing Institute of TechnologyBeijing100081China

Sulfide solid electrolytes(SEs)have attracted ever-increasing attention due to their superior roomtemperature ionic conductivity(~10^(-2) S cm^(-1)).Additionally,the integration of sulfide SEs and highvoltage cathodes is promising to achieve higher energy ***,the incompatible interfaces between sulfide SEs and high-voltage cathodes have been one of the key factors limiting their ***,this review presents a critical summarization of the interfacial issues in all-solid-state lithium batteries based on sulfide SEs and high-voltage cathodes and proposes strategies to stabilize the electrolyte/cathode ***,the future research direction of electrolyte/cathode interfaces and application prospects of powder technology in sulfide-based ASSLBs were also discussed.

关键词： Sulfide solid electrolytes High-voltage cathodes Electrode/electrolyte interfaces All-solid-state lithium batteries

A new fluorocarbon adhesive:Inhibiting agglomeration during combustion of propellant via efficient F-Al2O3 preignition reaction

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Carbon Energy 2024年第6期6卷 292-305页

作者： Qifa Yao Min Xia Chao Wang Fanzhi Yang Wei Yang Yunjun Luo School of Materials Science and Engineering Beijing Institute of TechnologyBeijingChina Key Laboratory of High Energy Density Materials Ministry of EducationBeijing Institute of TechnologyBeijingChina School of Aerospace Engineering Beijing Institute of TechnologyBeijingChina Advanced Research institute of Multidisciplinary Science Beijing Institute of TechnologyBeijingChina

Inhibiting the agglomeration of molten aluminum particles packed in the binder network is a promising scheme to achieve efficient combustion of solid *** this investigation,the hydroxyl-terminated structured fluorinated alcohol compound(PFD)was introduced to modify the traditional polyethylene glycol/polytetrahydrofuran block copolymerization(HTPE)binder;that is,a unique fluorinated polyether(FTPE)binder was synthesized by embedding fluorinated organic segments into the HTPE binder via crosslinking *** FTPE was applied in aluminum-based propellants for the first *** to the complete release of fluorinated organic active segments in the range of 300℃to 400℃,the burning rate of FTPEbased propellant increased from 4.07(0%PFD)to 6.36 mm/s(5%PFD),increased by 56.27%under 1 *** reaction heat of FTPE propellants increased from 5.95(0%PFD)to 7.18 MJ/kg(5%PFD)under 3.0 MPa,indicating that HTPE binder modified with PFD would be conducive to inhibiting the D90 of condensed combustion products(CCPs)dropped by 81.84%from 75.46(0%PFD)to 13.71μm(5%PFD)under 3.0 MPa,in consistent with the significant reduction of aluminum agglomerates observed on the quenched burning surface of the *** results demonstrated that a novel FTPE binder with PFD can release fluorinated organic active segments,which motivate preignition reaction with the alumina shell in the early stage of aluminum combustion,and then enhance the melting diffusion effect of aluminum to inhibit the agglomeration.

关键词： agglomeration characteristics aluminum particles combustion fluorine alcohol compounds HTPE propellants

Enhanced activity and durability of FeCoCrMoCBY nanoglass in acidic hydrogen evolution reaction

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Journal of Materials Science & Technology 2024年第3期170卷 212-220页

作者： Mengyang Yan Shuangqin Chen Shangshu Wu Xuechun Zhou Shu Fu Di Wang Christian Kübel Horst Hahn Si Lan Tao Feng Herbert Gleiter institute of Nanoscience School of Material Science and EngineeringNanjing University of Science and TechnologyNanjing 210094China institute of Nanotechnology Karlsruhe Institute of TechnologyKarlsruhe 76021Germany

In the present work,a multi-element nanoglass(m-NG)of FeCoCrMoCBY is obtained first time by the laser ablation combined with inert gas condensation(laser-IGC)*** with the conventional rapid-quenched metallic glass(MG)with identical composition,the Fe-based m-NG demonstrates a superior performance as a self-supported electrocatalyst for hydrogen evolution reaction(HER)in acidic *** enhanced HER activity of m-NG is proposed to be closely related to its high en-ergy states,which is originated from the unique inhomogeneous nanostructures with a high density of low-coordinated ***,the Fe-based m-NG exhibits an outstanding comprehensive catalytic performance even beyond the commercial Pt/C catalyst in long-term test due to its self-optimization *** work not only opens the way to the preparation of m-NGs by the novel laser-IGC technique,but also makes a great contribution to developing low-cost,high-efficient,and super-durable HER electrocat-alysts in acidic environment.

关键词： Nanoglass Inert gas condensations High energy states Hydrogen evolution reactions