On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

作     者：Qun Jin Tianxiao Guo Nicolas Perez Nianjun Yang Xin Jiang Kornelius Nielsch Heiko Reith Qun Jin;Tianxiao Guo;Nicolás Pérez;Nianjun Yang;Xin Jiang;Kornelius Nielsch;Heiko Reith

作者机构：Institute for Metallic MaterialsLeibniz Institute for Solid State and Materials Research01069 DresdenGermany Institute of Materials EngineeringUniversity of Siegen57076 SiegenGermany Institute of Applied PhysicsTechnical University of Dresden01069 DresdenGermany Institute of Materials ScienceTechnical University of Dresden01069 DresdenGermany 

出 版 物：《Nano-Micro Letters》 (纳微快报（英文版）)

年 卷 期：2024年第16卷第7期

页      面：98-108页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：The authors thank D.Berger D.Hofmann and C.Kupka in IFW Dresden for helpful technical support.H.R.acknowledges funding from the DFG(Deutsche Forschungsgemeinschaft)within grant number RE3973/1-1.Q.J. H.R.and K.N.conceived the work.With the support from N.Y.and X.J. Q.J.and T.G.fabricated the thermoelectric films and conducted the structural and compositional characterizations.Q.J.prepared microchips and fabricated the on-chip micro temperature controllers.Q.J.and N.P.carried out the temperature-dependent material and device performance measurements.Q.J.and H.R.performed the simulation and analytical calculations.Q.J. H.R.and K.N.wrote the manuscript with input from the other coauthors.All the authors discussed the results and commented on the manuscript 

主　　题：Temperature control Low-power electronics On-chip micro temperature controller Freestanding thermoelectric nano films Temperature-sensitive components 

摘      要：Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern ***,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely ***,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane *** tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are *** proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.