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Correction of Interferometric High-Order nonlinearity error in Metrological Atomic Force Microscopy

Nanomanufacturing and Metrology 2022年第4期5卷 412-422页

作者： Gaoliang Dai Xiukun Hu Physikalisch-Technische Bundesanstalt Bundesallee 10038116BraunschweigGermany Key Laboratory for Magnetism of Zhejiang Province College of Materials and ChemistryChina Jiliang UniversityHangzhou310018People’s Republic of China

Metrological atomic force microscopes(***)with built-in interferometers are one of the main workhorses for versatile dimensional *** interferometric nonlinearity error,particularly the high-order(i.e.,3rd-and 4th-order)nonlinearity errors,is a dominant error source for further improving their metrology performance,which cannot be corrected using the conventional Heydemann correction *** solve this problem,two new methods were *** uses a capacitive sensor embedded in the ***,and the other applies an external physical artifact with a flat *** methods can be applied very conveniently and can effectively reduce the nonlinearity *** this paper,the propagation of the(residual)nonlinearity error in step height calibrations is ***,the performance of the improved tool is verified in the calibration of a highly demanding industrial *** the measurements performed at 25 different positions and repeated six times,the standard deviation of the total 150 measured values is 0.08 nm,which includes the contributions from the reproducibility of the metrology tool and sample *** research has significantly improved our dimensional nanometrology *** instance,the extended measurement uncertainty(k=2)is reduced from 1.0 to 0.3 nm for the step height or etching depth calibrations.

关键词： Dimensional nanometrology Traceable calibration Metrological atomic force microscopy Interferometry nonlinearity error Step height

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Angle measurement technology based on magnetization vector for narrow space applications

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Nanotechnology and Precision Engineering 2020年第3期3卷 167-173页

作者： Yinguo Huang Shiyu Zhang Le Gao Yelong Zheng State Key Laboratory of Precision Measuring Technology and Instruments Tianjin UniversityTianjin 300072China Science and Technology on Rotorcraft Aeromechanics Laboratory China Helicopter Research and Development InstituteJingdezhen 333001China

With the wide application of laser in the field of skin plastic surgery, micro laser galvanometer scanner has made great progress in this field with its portability. However, the measurement method used to measure the deflection angle of laser galvanometer in the narrow space of scanner with high precision remains to be studied. In this paper, an angle measurement method based on magnetic field is proposed, and the effect of the shapes of permanent magnets(PMs) on the measurement is studied by theoretical and experimental study under the condition that the maximum available space for the PMs is a 10 mm side cube. An angle measuring experimental device is set up, and the contrast experiment is carried out with different PMs which are the same as simulation. The experimental results show that cylindrical PM is more suitable than other PMs, which is consistent with the simulation results, and the maximum nonlinearity error is 0.562%. This method has the advantages of small volume,non-contact measurement, small moment of inertia, good dynamic response and no external excitation for the PMs, so it has a broad application prospect in micro laser galvanometer scanner.

关键词： Micro laser galvanometer scanner Deflection angle Narrow space Shapes of permanent magnets nonlinearity error

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