Angle measurement technology based on magnetization vector for narrow space applications

作     者：Yinguo Huang Shiyu Zhang Le Gao Yelong Zheng Yinguo Huang;Shiyu Zhang;Le Gao;Yelong Zheng

作者机构：State Key Laboratory of Precision Measuring Technology and InstrumentsTianjin UniversityTianjin 300072China Science and Technology on Rotorcraft Aeromechanics LaboratoryChina Helicopter Research and Development InstituteJingdezhen 333001China 

出 版 物：《Nanotechnology and Precision Engineering》 (纳米技术与精密工程（英文）)

年 卷 期：2020年第3卷第3期

页      面：167-173页

核心收录：

学科分类：0831[工学-生物医学工程（可授工学、理学、医学学位）] 1004[医学-公共卫生与预防医学(可授医学、理学学位)] 08[工学] 10[医学] 

基　　金：supported by the Aeronautical Science Foundation of China [grant numbers 20175748009] 

主　　题：Micro laser galvanometer scanner Deflection angle Narrow space Shapes of permanent magnets Nonlinearity error 

摘      要：With the wide application of laser in the field of skin plastic surgery, micro laser galvanometer scanner has made great progress in this field with its portability. However, the measurement method used to measure the deflection angle of laser galvanometer in the narrow space of scanner with high precision remains to be studied. In this paper, an angle measurement method based on magnetic field is proposed, and the effect of the shapes of permanent magnets(PMs) on the measurement is studied by theoretical and experimental study under the condition that the maximum available space for the PMs is a 10 mm side cube. An angle measuring experimental device is set up, and the contrast experiment is carried out with different PMs which are the same as simulation. The experimental results show that cylindrical PM is more suitable than other PMs, which is consistent with the simulation results, and the maximum nonlinearity error is 0.562%. This method has the advantages of small volume,non-contact measurement, small moment of inertia, good dynamic response and no external excitation for the PMs, so it has a broad application prospect in micro laser galvanometer scanner.