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microsystems & Nanoengineering 2023年第3期9卷 51-60页

作者： Hao Hong Jiangtao Wei Xin Lei Haiyun Chen pasqualina m.sarro Guoqi Zhang Zewen Liu Department of microelectronics Delft University of Technology2628 CD DelftThe Netherlands School of Integrated Circuits Tsinghua University100084 BeijingChina School of Chemistry Beihang University100084 BeijingChina School of Electronic and Information Engineering Beijing Jiaotong University100084 BeijingChina

The application of single-crystal silicon(SCS)nanopore structures in single-molecule-based analytical devices is an emerging approach for the separation and analysis of *** key challenge is to fabricate individual SCS nanopores with precise sizes in a controllable and reproducible *** paper introduces a fast-stop ionic current-monitored three-step wet etching(TSWE)method for the controllable fabrication of SCS *** the nanopore size has a quantitative relationship with the corresponding ionic current,it can be regulated by controlling the ionic *** to the precise current-monitored and self-stop system,an array of nanoslits with a feature size of only 3 nm was obtained,which is the smallest size ever reported using the TSWE ***,by selecting different current jump ratios,individual nanopores of specific sizes were controllably prepared,and the smallest deviation from the theoretical value was 1.4 *** translocation measurement results revealed that the prepared SCS nanopores possessed the excellent potential to be applied in biosensing.

关键词： smallest precise sizes

Highly-sensitive wafer-scale transfer-free graphene mEmS condenser microphones

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microsystems & Nanoengineering 2024年第1期10卷 267-275页

作者： Roberto Pezone Sebastian Anzinger Gabriele Baglioni Hutomo Suryo Wasisto pasqualina m.sarro Peter G.Steeneken Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Infineon Technologies AG Am Campeon 1-15Neubiberg 85579Germany Kavli Institue of Nanoscience Department of Quantum NanoscienceDelft University of TechnologyDelftthe Netherlands Department of Precision and microsystems Engineering(PmE) Delft University of TechnologyDelftThe Netherlands

Since the performance of micro-electro-mechanical system(mEmS)-based microphones is approaching fundamental physical,design,and material limits,it has become challenging to improve *** works have demonstrated graphene’s suitability as a microphone *** potential for achieving smaller,more sensitive,and scalable onchip mEmS microphones is yet to be *** address large graphene sizes,graphene-polymer heterostructures have been proposed,but they compromise performance due to added polymer mass and *** work demonstrates the first wafer-scale integrated mEmS condenser microphones with diameters of 2R=220-320μm,thickness of 7 nm multi-layer graphene,that is suspended over a back-plate with a residual gap of 5μ*** microphones are manufactured with mEmS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the *** designs,all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive *** devices show high mechanical compliances C_(m)=0.081-1.07μmPa^(−1)(10-100×higher than the silicon reported in the state-of-the-art diaphragms)and pull-in voltages in the range of 2-9.5 *** addition,to validate the proof of concept,we have electrically characterized the graphene microphone when subjected to sound *** estimated sensitivity of S_(1kHz)=24.3-321 mV Pa^(−1)for a V_(bias)=1.5 V was determined,which is 1.9-25.5×higher than of state-of-the-art microphone devices while having a~9×smaller area.

关键词： transfer plate approaching

Integrated 64 pixel UV image sensor and readout in a silicon carbide CmOS technology

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microsystems & Nanoengineering 2022年第5期8卷 207-223页

作者： Joost Romijn Sten Vollebregt Luke m.middelburg BrahimEl mansouri Henk W.van Zeijl Alexandermay Tobias Erlbacher Johan Leijtens Guoqi Zhang pasqualina m.sarro Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Fraunhofer Institute for Integrated Systems and Devices Technology IISB ErlangenGermany Lens R&D NoordwijkThe Netherlands

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CmOS,which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100mm^(2) *** reported image sensor offers serial digital,analog,and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60μW,which are significant improvements over previous *** optoelectronics have applications in flame detection,satellites,astronomy,UV photography,and *** complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.

关键词： optoelectronic image carbide

The Diagnostic Stability in Dual Diagnosis Study on a Sample of Patients with Opiate Addiction

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Journal of Health Science 2017年第1期5卷 18-24页

作者： pasqualina Rocco Roberto manera Graziano Bellio Dependence Department Local Health Unit n. 8 Veneto Italy

It is known that in psychiatry, despite the introduction of standardized system, there is still a portion of diagnostic instability. This study aims to evaluate the stability of psychiatric diagnoses in a cohort of patients with dual diagnosis, under treatment of the Dependence Department of the Local Health Unit n.8 Veneto, Italy. 34 patients with opioid dependence, in treatment with methadone or buprenorphine, have been evaluated. They had participated to a previous study in 2006, in which psychiatric comorbidity was documented. These 34 patients have been retested with some of the tests already used in 2006： m.I.N.I. （for Axis I） and S.C.I.D. II （for Axis II）. The preceding evaluations and those current have been compared to assess the stability of psychiatric diagnosis. Almost all patients （95%） had at least a change of diagnosis. Psychoses are the most stable diagnoses. Also the substance use disorder is quite stable （80%）. Neuroses are more unstable. Personality disorders showed greater variability. Personality disorders appear more unstable in dual diagnosis. The diagnosis of personality disorder based on DSm, common in drug addicts, requires caution. Anyway, the longitudinal observation is important for a correct diagnosis.

关键词： Diagnostic stability dual diagnosis psychiatric comorbidity.

mASS SENSITIVITY OF ALUmINUm NITRIDE THIN FILm BASED SURFACE ACOUSTIC WAVE SENSORS PREPARED FOR BIOSENSING APPLICATIONS

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MASS SENSITIVITY OF ALUMINUM NITRIDE THIN FILM BASED SURFACE...

2016年全国压电和声波理论及器件应用研讨会

作者： Ying-ge LI Lian-xiang mA A.T.TRAN G.FIORENTINO P.m.sarro Dong-xing DU College of Automation and Electrical Engineering Qingdao University of Science and Technology College of Electromechanical Engineering Qingdao University of Science and Technology Department of Precision and microsystems Engineering Delft University of Technology Department of microelectronics Delft University of Technology

Background, motivation and Objective Aluminum Nitride(AlN) thin film piezoelectric materials based surface acoustic wave resonators have attracted great interests in the sensing applications, especially serving as biosensors. many studies on microfluidic applications using ZnO based SAW devices have been reported recently. However, ZnO films present potential issues for biomedical and microfluidic applications, making them less ideal materials for microfluidic applications than other thin film piezoelectric materials such as AlN. Therefore in this paper, the mass sensitivity of AIN thin film based SAW sensors is studied for its potential biosensing applications. Statement of Contribution/methods The mass sensitivity of surface acoustic wave sensors, which are based on Si/Aluminum Nitride(AlN) structure by depositing aluminum oxide(Al

关键词： SAW sensor AlN thin film mass sensitivity Contact angle Biosensing

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一种用于硅基mEmS加工的深刻蚀技术

微细加工技术 2005年第4期 37-41页

作者：陈瑜吴俊徐郭平生王连卫 m.van der Zwan P.m.sarro 华东师范大学电子科学技术系纳米中心上海200062 DImES-ECTm Delft University of TechnologyFeldmannweg 17P.O.Box 50532600GB DelftNetherlands

研究了光辅助电化学刻蚀技术,并特别研究了阵列和硅衬底之间的边缘效应。在阵列边缘由于电流分布不均匀以及空穴从孔的侧壁注入,因此可以在边缘区域观察到结构的坍塌,采用一个周期性变化的信号来调制光照的强度,边缘效应会得到一定的抑... 详细信息

研究了光辅助电化学刻蚀技术,并特别研究了阵列和硅衬底之间的边缘效应。在阵列边缘由于电流分布不均匀以及空穴从孔的侧壁注入,因此可以在边缘区域观察到结构的坍塌,采用一个周期性变化的信号来调制光照的强度,边缘效应会得到一定的抑制。同时,也观察到了硅的电化学深刻蚀工艺中大电流情况下的抛光现象(阳极氧化条件下,硅表面在氢氟酸溶液中快速均匀溶解不形成孔的现象)。光学测试表明,制作的正方格子结构具有光子晶体行为,其光学禁带位于6μm附近。

关键词：电化学刻蚀 DRIE 深沟槽深孔光子晶体

Assessment of the Quality of Life of Patients with mycobacterial Pulmonary Diseases

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Open Journal of Respiratory Diseases 2022年第2期12卷 56-63页

作者： Khadidia Ouattara Bocar Baya Dianguina Soumaré Tenin Kanouté mohamed Tolofodie Kafui Komla Gaglo Koudemon Salif Koné Bassirou Diarra Yaya Sadio sarro Yacouba Toloba mamoudou maiga Pneumology Department CHU Point-G Bamako Mali University of Sciences Techniques and Technologies of Bamako (USTTB) Bamako Mali University Clinical Research Center (UCRC) Bamako Mali

Introduction: mycobacteria pulmonary diseases are chronic illnesses with various impacts on patients’ health status, and wellbeing. These diseases currently represent a global health issue due to increasing burdens and the lack of new development on therapeutic options. Policies based on the quality of life may help to improve the management of this chronic respiratory disease;this study was designed to assess the quality of life of patients treated for the pulmonary mycobacterial disease. materials and methods: Participants diagnosed with a mycobacterial pulmonary disease were selected from the University Clinical Research Centers’ (UCRC) 2019 mycobacterial cohort database. A telephone interview was conducted using the medical Outcome Study Short Form (SF-36) which has 36 items evaluating physical and mental wellbeing. Scores range from 0 - 100, with higher scores indicating greater Health-related quality of life (HRQOL). Statistical analysis was performed with SPSS 23.0 and the Fisher test was used to compare percentages. A p-value less than 0.05 was considered significant. Results: A total of 26 participants were reached and interviewed by phone. The mean age was 42 ± 10.6 years, and 76.9% (20/26) were male. The most common cause of the mycobacterial pulmonary disease was mycobacterium tuberculosis, with 84.6% (22/26). Four cases of Non-Tuberculous mycobacteria (NTm) were diagnosed including one mycobacterium avium complex strain (mAC). HIV-positive cases were 46.2% (12/26), and the main respiratory sign was cough for all the participants (100%), followed by dyspnea 46.2% (12/26), chest pain 38.5% (10/26). The mean BmI was 19.7 ± 6.9 kg/m2, the mean respiratory rate was 24.7 ± 8.6, and the mean hemoglobin was 11.8 ± 2.2 g/dl. The mean SF-36 score was 75.1 ± 16.6, and impairment was mainly related to mental problems in 59.6%. The mean total score was significantly lower with age more than 42 years than age less than 42 years. But HIV positive and BmI le

关键词： Quality of Life mycobacteria Lung

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数字人文与数字社交阅读

数字人文研究 2022年第1期2卷 52-67页

作者：西蒙妮·雷博拉彼得·布特费德里科·皮亚佐拉布里吉特·加斯 J.贝雷尼克·赫尔曼玛丽亚·克拉森伯格莫尼克・m.库佩斯盖哈特·劳尔皮罗斯卡·伦德瓦伊托马斯·C.梅塞利帕斯夸利纳·索伦蒂诺王立锐(译) 德国比勒菲尔德大学瑞士巴塞尔大学数字人文实验室荷兰阿姆斯特丹惠更斯历史研究所荷兰格罗宁根大学计算语言学系德国比勒费尔德大学语言学和文学研究学院瑞士巴塞尔大学英语语言文学系德国哥廷根大学德语文学系中国人民大学艺术学院韩国西江大学媒体、艺术和科学学院

Web2.0在促进社会发展中最突出的表现是数字社交阅读(DSR):在许多平台上,都有创建书评、对书籍文本进行“内联”评论、在线故事写作(通常是同人小说的形式)、非正式的图书讨论、图书视频博客等功能。文章认为,DSR为研究文学、阅读、阅... 详细信息

Web2.0在促进社会发展中最突出的表现是数字社交阅读(DSR):在许多平台上,都有创建书评、对书籍文本进行“内联”评论、在线故事写作(通常是同人小说的形式)、非正式的图书讨论、图书视频博客等功能。文章认为,DSR为研究文学、阅读、阅读的影响及文学传播提供了独特的可能性,在这种情况下,计算工具尤其重要,这使得DSR成为一个特别适合应用数字人文方法的领域。文章对DSR研究进行初步分类,简要参查了每一类别的相关文献,并将DSR研究作为一个考察更广泛的文学交流过程的透镜,从而区别于将本身即是一种有趣现象的DSR文化作为对象的研究区分开来。通过七个DSR研究的例子,文章探讨了所选择的数字人文研究路径及其与文学研究中的研究问题之间的联系。

关键词：社交网络阅读案例分析