Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
作者机构：Department of MicroelectronicsDelft University of Technology2628 CD DelftThe Netherlands School of Integrated CircuitsTsinghua University100084 BeijingChina School of ChemistryBeihang University100084 BeijingChina School of Electronic and Information EngineeringBeijing Jiaotong University100084 BeijingChina
出 版 物：《微系统与纳米工程(英文)》 (Microsystems & Nanoengineering)
年 卷 期：2023年第9卷第3期
页 面：51-60页
核心收录：
学科分类：0710[理学-生物学] 07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0702[理学-物理学]
基 金：This research was supported by the Beijing Innovation Center for Future Chips Beijing National Research Center for Information and The National Key R&D Program(2019YFA0707002)
摘 要：The application of single-crystal silicon(SCS)nanopore structures in single-molecule-based analytical devices is an emerging approach for the separation and analysis of *** key challenge is to fabricate individual SCS nanopores with precise sizes in a controllable and reproducible *** paper introduces a fast-stop ionic current-monitored three-step wet etching(TSWE)method for the controllable fabrication of SCS *** the nanopore size has a quantitative relationship with the corresponding ionic current,it can be regulated by controlling the ionic *** to the precise current-monitored and self-stop system,an array of nanoslits with a feature size of only 3 nm was obtained,which is the smallest size ever reported using the TSWE ***,by selecting different current jump ratios,individual nanopores of specific sizes were controllably prepared,and the smallest deviation from the theoretical value was 1.4 *** translocation measurement results revealed that the prepared SCS nanopores possessed the excellent potential to be applied in biosensing.
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