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Multilayer optics for the EUV and soft X-rays

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光学精密工程 2005年第4期13卷 421-429页

作者： Torsten Feigl Sergiy Yulin Nicolas Benoit norbert kaiser Fraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 D-07745 Jena Germany

The demand to enhance the optical resolution, to structure and observe ever smaller details, has pushed the way towards the EUV and soft X-rays. Induced mainly by the production of more powerful electronic circuits with the aid of projection lithography, optics developments in recent years can be characterized by the use of electromagnetic radiation with smaller wavelength. The good prospects of the EUV and soft X-rays for next generation lithography systems (λ=13.5 nm), microscopy in the “water window” (λ=2.3～4.4 nm), astronomy (λ=5～31 nm), spectroscopy, plasma diagnostics and EUV/soft X-ray laser research have led to considerable progress in the development of different multilayer optics. Since optical systems in the EUV/soft X-ray spectral region consist of several mirror elements a maximum reflectivity of each multilayer is essential for a high throughput. This paper covers recent results of the enhanced spectral behavior of Mo/Si, Cr/Sc and Sc/Si multilayer optics.

关键词： EUV X射线多层膜光学涂覆技术 Mo/Si Cr/Sc Sc/Si 光电子技术

Optical coatings:trends and challenges

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光学精密工程 2005年第4期13卷 389-396页

作者： norbert kaiser Torsten Feigl Olaf Stenzel Ulrike Schulz Fraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena GermanyFraunhofer Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7D-07745 Jena Germany

New applications in optoelectronics, photonics, telecommunication, displays, optical data processing, biomedicine, sensors, energy control, automobile, aerospace, and architecture stimulation are important developments in physics and technology of optical coatings. This paper will focus on the latest advances in the areas of new optical film systems and devices, new optical coating materials and film fabrication techniques, process control and monitoring, and different advanced applications. Particularly, focus is on optical films that combine optical design with microstructural features tailored on the nanometer and micrometer scales. Evaluation of film stability and integrity in harsh industrial environments and their compatibility with organic polymers are important as well.

关键词：光学涂覆技术光电子技术光学仪器光学材料

Pulsed DC magnetron sputtering of transparent conductive oxide layers

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Chinese Optics Letters 2013年第13期11卷 21-25页

作者： Astrid Bingel Kevin Fiichsel norbert kaiser Andreas Tunnerman Institute of Applied Physics Abbe Center of Photonics Friedrich-Schiller-Universitgt Jena Max-Wien-Platz 1 07743 Jena Germany Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Str. 7 07745 3ena Germany

A comprehensive material study of different transparent conductive oxides （TCOs） is presented. The layers are deposited by pulsed direct current （DC） magnetron sputtering in an inline sputtering system. Indium tin oxide （ITO） films are studied in detail. The optimum pressure of 0.33 Pa （15Ar：202） produces a 300- nm thin film with a specific resistivity p of 2.2 × 10-6 Ωm and a visual transmittance of 81%. Alternatively, ZnO：A1 and ZnO：Ga layers with thicknesses of 200 and 250 nm are deposited with a minimum resistivity of 5.5× 10-6 and 6.8× 10-6Ωm, respectively. To compare the optical properties in the ultraviolet （UV） range, the optical spectra are modeled and the band gap is determined.

关键词： 310.0310 Thin films 220.0220 Optical design and fabrication 160.0160 Materials

EUV/Soft X-Ray Multilayer Optics

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EUV/Soft X-Ray Multilayer Optics

创新区域:纽伦堡(大都市圈)的创新与技术管理案例研究

Photonics Asia 2004;Optoelectronics,Microelectronics,and Nanotech

作者： Sergiy Yulin Torsten Feigl Nicolas Benoit norbert kaiser Fraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 07745 Jena Germany Fraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 07745 Jena Germany Fraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 07745 Jena Germany Fraunhofer-Institut für Angewandte Optik und Feinmechanik Albert-Einstein-Str. 7 07745 Jena Germany

Most applications of Mo/Si multilayer optics in Extreme ultraviolet lithography (EUVL) require a high normal incidence reflectivity. Using dc magnetron sputtering we achieved R = 68.8 % @ λ = 13.45 nm

关键词： EUV, Mo/Si, barrier layers, interface-engineered mirrors, thermal stability, broadband mirror, narrowband mirror, laterally graded coatings.

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浙江科技学院学报 2020年第5期32卷 501-508页

作者：诺伯特·维尔纳·凯泽安斯巴赫应用科学大学国际战略项目研究院德国安斯巴赫91522

在全球竞争中,区域吸引力对赢得国际伙伴、保持地区内部稳定增长至关重要。区域差异化是大都市圈战略管理的关键因素。以精英研究集群为例,在大都市经济圈中,通过刺激和鼓励创新环境和创新环节,如政策、管理、大学和企业,就能从根本上... 详细信息

在全球竞争中,区域吸引力对赢得国际伙伴、保持地区内部稳定增长至关重要。区域差异化是大都市圈战略管理的关键因素。以精英研究集群为例,在大都市经济圈中,通过刺激和鼓励创新环境和创新环节,如政策、管理、大学和企业,就能从根本上推动和调控地区的发展与变革。德国经济结构的典型特征是大型企业与中小型企业兼而有之。跨学科案例研究发现,近25年来(巴伐利亚州)纽伦堡(大都市圈)的创新科技环境形成了由高校联盟、用户俱乐部、技术集群和能力驱动体系及微型校区构成的四大结构体系。在战略性地区管理的背景下,通过自上而下的政策调节,纽伦堡大都市圈的相关战略决策也给巴赫应用科学大学的各项活动带来了影响。

关键词：区域创新校地合作科技政策

Degradable magnesium-hydroxyapatite interpenetrating phase composites processed by current assisted metal infiltration in additive-manufactured porous preforms

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Journal of Magnesium and Alloys 2022年第12期10卷 3641-3656页

作者： Mariano Casas-Luna Edgar B.Montufar norbert Hort Sebastian Díaz-de-la-Torre JoséClaudio Méndez-García Lucie Vištejnová Adam Brínek AlešDanhel Karel Dvorak Jozef kaiser Ladislav Celko Central European Institute of Technology Brno University of TechnologyPurkynova 123Brno 61200Czech Republic Institute of Metallic Biomaterials Helmholtz-Zentrum HereonMax-Planck-Straße 1Geesthacht 21502Germany Institute of Product and Process Innovation Leuphana University LüneburgUniversitätsallee 1Lüneburg 21335Germany Centro de Investigación e Innovación Tecnológica Instituto Politécnico NacionalCerrada de Cecati s/nMexico City 02250Mexico Biomedical Center Faculty of Medicine in PilsenCharles UniversityAlej Svobody 1655/76Plzen 32300Czech Republic Institute of Biophysics of the Czech Academy of Sciences Královopolská135Brno 61265Czech Republic Faculty of Civil Engineering Brno University of TechnologyPurkynova 139Brno 61200Czech Republic

This work explores ceramic additive manufacturing in combination with liquid metal infiltration for the production of degradable interpenetrating phase magnesium/hydroxyapatite(Mg/HA) composites. Material extrusion additive manufacturing was used to produce stoichiometric,and calcium deficient HA preforms with a well-controlled open pore network, allowing the customization of the topological relationship of the composite. Pure Mg and two different Mg alloys were used to infiltrate the preforms by means of an advanced liquid infiltration method inspired by spark plasma sintering, using a novel die design to avoid the structural collapse of the preform. Complete infiltration was achieved in 8 min, including the time for the Mg melting. The short processing time enabled to restrict the decomposition of HA due to the reducing capacity of liquid Mg. The pure Mg-base composites showed compressive yield strength above pure Mg in cast state. Mg alloy-based composites did not show higher strength than the bare alloys due to grain coarsening, but showed similar mechanical properties than other Mg/HA composites that have significantly higher fraction of metallic phase. The composites showed faster degradation rate under simulated body conditions than the bare metallic component due to the formation of galvanic pairs at microstructural level. Mg dissolved preferentially over HA leaving behind a scaffold after a prolonged degradation period. In turn, the fast production of soluble degradation products caused cell metabolic changes after 24 h of culture with not-diluted material extracts. The topological optimization and reduction of the degradation rate are the topics for future research.

关键词： Interpenetrating phase composite Biodegradable metal Topological relationship Direct ink writing Metal infiltration Computed aided design