Research and development of VUV optical coatings for micro mirror applications

作     者：Alexandre Gatto Norbert Kaiser 

作者机构：Fraunhofer IOF Albert-Einstein-Str. 7 D-07745 Jena GermanyFraunhofer IOF Albert-Einstein-Str. 7 D-07745 Jena Germany 

出 版 物：《光学精密工程》 (Optics and Precision Engineering)

年 卷 期：2005年第13卷第4期

页      面：465-470页

核心收录：

学科分类：08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080402[工学-测试计量技术及仪器] 0803[工学-光学工程] 

基　　金：The presented results have been developed in a joint project (economic based strategic alliance ("WISA") called "Next Generation Micro Mechanical Mirrors" of four German Fraunhofer institutes 德国Fraunhofer Society资助 

主　　题：VUV 光学涂覆技术 微镜技术 薄膜 调节器 

摘      要：This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.