Comparative Analysis of Ti,Ni,and Au Electrodes on Characteristics of TiO_2 Nanofibers for Humidity Sensor Application

作     者：S.S.Batool Z.Imran M.Israr Qadir M.Usman H.Jamil M.A Rafiq M.M.Hassan M.Willander 

作者机构：Micro and Nano Devices GroupDepartment of Metallurgy and Materials EngineeringPakistan Institute of Engineering and Applied SciencesPO NiloreIslamabad 45650Pakistan Department of Science and TechnologyCampus NorrkpingLinkping UniversitySE-60174 NorrkpingSweden 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2013年第29卷第5期

页      面：411-414页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：support of the Higher Education Commission(HEC) Pakistan 

主　　题：Titanium dioxide Nanofibers Metal electrodes Humidity sensor 

摘      要：The effect of metal （Ti, Ni, and Au） electrodes on humidity sensing properties of electrospun TiO2 nanofibers was investigated in this work. The devices were fabricated by evaporating metal contacts on SiO2 layer thermally grown on silicon substrate. The separation between the electrodes was 90 μm for all sensors. The sensors were tested from 40% to 90% relative humidity （RH） by AC electrical characterization at room temperature. When sensors are switched between 40% and 90% RH, the corresponding response and recovery time are 3 s and 5 s for Ti-electrode sensor, 4 s and 7 s for Ni-electrode sensor, and 7 s and 13 s for Au-electrode sensor. The hysteresis was 3%, 5% and 15% for sensitivity of Ti, Ni, and Au-electrode sensors are Ti-, Ni-, and Au-electrode sensor, respectively. The 7.53 MΩ/%RH, 5.29 MΩ/%RH and 4.01 MΩ/%RH respectively at 100 Hz. Therefore Ti-electrode sensor is found to have linear response, fast response and recovery time and higher sensitivity as compared with those of Ni- and Au-electrode sensors. Comparison of humidity sensing properties of sensors with different electrode material may propose a compelling route for designing and optimizing humidity sensors.