Experimental studies of N^+ implantation into CVD diamond thin films

作     者：辛火平 林成鲁 王建新 邹世昌 石晓红 林梓鑫 周祖尧 刘祖刚 

作者机构：National Laboratory of Functional Materials for Informatics Shanghai Institute of Metallurgy Chinese Academy of Sciences Shanghai 200050 China National Laboratory of Infrared Physics Shanghai Institute of Technical Physics Chinese Academy of Sciences Shanghai 200083 China Ion Beam Laboratory Shanghai Institute of Metallurgy Chinese Academy of Sciences Shanghai 200050 China Department of Materials Science Shanghai University Shanghai 201800 China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：1997年第40卷第4期

页      面：361-368页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

主　　题：N+ implantation into diamond films Raman spectroscopy ultraviolet photoluminescence spec-troscopy (UV-PL) electrically inactive deep-level impurity C≡N covalent bond carbon nitride X-ray photoelec-tron spectroscopy (XPS). N+ implantation 

摘      要：The effects of N+ implantation under various conditions on CVD diamond films were analyzed with Raman spectroscopy, four-point probe method, X-ray diffraction (XRD), Rutherford backseattering spectroscopy (RBS), ultraviolet photoluminescence spectroscopy (UV-PL), Fourier transformation infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The results show that the N+ implantation doping without any graphitization has been successfully realized when 100 keV N+ ions at a dosage of 2 × 1016 cm-2 were implanted into diamond films at 550℃ . UV-PL spectra indicate that the implanted N+ ions formed an electrically inactive deep-level impurity in diamond films. So the sheet resistance of the sample after N+ implantation changed little. Carbon nitride containing C≡N covalent bond has been successfully synthesized by 100 keV, 1.2×1018 N/cm2 N+ implantation into diamond films. Most of the implanted N+ ions formed C≡N covalent bonds with C atoms. The others were free state