The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers
作者机构：Department of Mechanical EngineeringCheng Shiu UniversityKaohsiung83347Taiwan Quanta Computer Inc.Taiwa Department of Mechanical and Electro-Mechanical EngineeringNational Sun Yat-Sen UniversityKaohsiung80424Taiwan
出 版 物：《Communications in Computational Physics》 (计算物理通讯（英文）)
年 卷 期：2018年第24卷第6期
页 面：253-267页
核心收录：
学科分类：07[理学] 0704[理学-天文学] 0701[理学-数学] 0702[理学-物理学] 070101[理学-基础数学]
基 金：The financial support by the Ministry of Science and Technology TAIWAN through Grant MOST 105-2221-E-230-004 of the Cheng Shiu University is gratefully acknowledged
主 题：Microelectromechanical pull-in Differential Quadrature Method(DQM) MEMS electrostatic micro-tweezers
摘 要：This work addresses the nonlinear dynamic behavior of different electrostaticmicro-tweezers,amicro electric *** actuator,a cantilever beamelectrostatic micro-tweezers,has been extensively used in micro-electro-mechanical systems(MEMS).The importance of micro electric actuators manufactured is higher than the other part of MEMS since it is the power source of the entire micro-electro-mechanical *** actual operation,the instability and bad dynamic characteristics of the electric actuators will cause larger displacement mobility error,such as transport behavior and response procedures failure,etc.,and even damage the micro-electro-mechanical *** improve the actuator dynamic displacement accuracy,the dynamic behavior in the electric actuator system must be studied,especially for nonlinear dynamic behavior of *** this work,the differential quadrature method(DQM)was employed to solve the problem of nonlinearity in the equation of *** results reveal that the proposed DQM model can be used to simulate the nonlinear behavior of the micro-tweezers efficiently Micro-tweezers of various shapes were studied to examine the feasibility of applying the DQMin analyzing their nonlinear *** simulated results agree very closely with the calculated and experimental data in the literature.
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