Modification of TiN Coatings by N^(+) and C^(+) Implantation with High Ion Flux
作者机构：Institute of Low Energy Nuclear PhysicsRadiation Beam and Materials Engineering Open Laboratory of Department of Education of ChinaBeijing Radiation CenterBeijing Normal UniversityBeijing 100875
出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)
年 卷 期：1999年第16卷第3期
页 面：196-198页
核心收录：
学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0704[理学-天文学]
基 金：Supported by the 863 High Technology Program of China(863-715-023-02-01) the National Natural Science Foundation of China under Grant No.59671051
主 题：coating wear resistance
摘 要：The TiN coating changed from columnar structure to compact texture after N^(+)and C^(+)implantation.X-ray analysis showed that combining with N atoms,Ti and Ti_(2)N would be transformed into TiN Phases during N *** ternary solid solution mixtures TiCN have been formed,while Ti,Ti_(2)N would be transformed into TiC and TiCN phases combining with C atoms after C *** hardness of the TiN coating increased by 2.3-2.4 times after N^(+)or C^(+)*** wear resistance of implanted TiN coatings is 2-3 times higher than that of unimplanted TiN *** the drills were treated with the method,their lifetime would increase by 7 times comparing with unimplanted *** an attractive procedure,the ion implantation of the TiN coatings would find new applications in many fields.
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