Electron Field Emission from Different sp3 Content Diamond-Like Carbon Films

作     者：MAO Dong-sheng ZHAO Jun LI Wei WANG Xi LIU Xiang-huai ZHU Yu-kun ZHOU Jiang-yun FAN Zhong LI Qiong XU Jing-fang 茅东升;赵俊;李炜;王曦;柳襄怀;诸玉坤;周江云;范忠;李琼;徐静芳

作者机构：Ion Beam LaboratoryShanghai Institute of MetallurgyChinese Academy of SciencesShanghai 200050 Department of Electronics Science and TechnologyEast China Normal UniversityShanghai 200062 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：1999年第16卷第2期

页      面：152-154页

核心收录：

学科分类：0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 070205[理学-凝聚态物理] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0702[理学-物理学] 

基　　金：Supported by the 863 Program of the National Science and Technology Committee of China 

主　　题：structure. deposition. theory. 

摘      要：Different sp^(3) content diamond-like carbon films are deposited on to highly n-doped Si(111)substrates by a new plasma deposition technique-filtered arc *** electron field emission properties are studied by using a simple diode *** is showed that the turn-on field is decreased and field emission current density is increased with the increasing sp3 content(75-80%,80-83%,and 88-90%)of the *** emission current of 0.1μA from the three samples was detected under the electric field of 10.1,5.6,and 2.9 V/μm and emission current density of 4.4,15.2,and 43.2μA/cm^(2),respectively,under 14.3 V/μ***-Nordheim(F-N)plots of the three samples nearly show of lineaity indicating that electron field emission obeys F-N theory.