An effective round ball tool in electrochemistry process as novel reuse fabrication technology

作     者：P.S.PA 

作者机构：Department of Digital Content DesignGraduate School of Toy and Game DesignNational Taipei University of Education 

出 版 物：《中国有色金属学会会刊：英文版》 (Transactions of Nonferrous Metals Society of China)

年 卷 期：2012年第22卷第S3期

页      面：825-830页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：Project(100-2221-E-152-003)supported by National Science Council 

主　　题：thin film round-ball tool In2O3SnO2 micro electrochemistry digital paper display 

摘      要：A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was *** etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge *** a small size of the round-ball tool takes less time for the same amount of In2O3 SnO 2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power.A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate.A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the *** the ultra-precise etching of In2O 3 SnO2,the optoelectronic semiconductor industry can effectively reuse the defective products,reducing production *** precision etching process is of high efficiency and requires only a short period of time to remove the In2O3 SnO2 nanostructures.