Curvy surface conformal ultra-thin transfer printed Sioptoelectronic penetrating microprobe arrays

作     者：Kyoseung Sim Zhoulyu Rao Yanbin Li Dong Yang Cunjiang Yu 

作者机构：Materials Science and Engineering ProgramUniversity of HoustonHoustonTX 77204USA Department of Mechanical EngineeringUniversity of HoustonHoustonTX 77204USA Department of Electrical and Computer EngineeringUniversity of HoustonHoustonTX 77204USA Department of Biomedical EngineeringUniversity of HoustonHoustonTX 77204USA 

出 版 物：《npj Flexible Electronics》 (npj-柔性电子（英文）)

年 卷 期：2018年第2卷第1期

页      面：8-13页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：This work is partially supported by NSF grants(1509763,1554499) the Startup Fund and Bill D.Cook Faculty Scholarship from the University of Houston 

主　　题：optoelectronic arrays transfer 

摘      要：Penetrating neural probe arrays are powerful bio-integrated devices for studying basic neuroscience and applied neurophysiology,underlying neurological disorders,and understanding and regulating animal and human *** paper presents a penetrating microprobe array constructed in thin and flexible fashion,which can be seamlessly integrated with the soft curvy *** function of the microprobes is enabled by transfer printed ultra-thin Si *** a proof-of-concept device,microprobe array with Si photodetector arrays are demonstrated and their capability of mapping the photo intensity in space are *** design strategies of utilizing thin polyimide based microprobes and supporting substrate,and employing the heterogeneously integrated thin optoelectronics are keys to accomplish such a *** experimental and theoretical investigations illustrate the materials,manufacturing,mechanical and optoelectronic aspects of the *** this paper primarily focuses on the device platform development,the associated materials,manufacturing technologies,and device design strategy are applicable to more complex and multi-functionalities in penetrating probe array-based neural interfaces and can also find potential utilities in a wide range of bio-integrated systems.