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Effective bias warm-up time reduction for MEMS gyroscopes based on active suppression of the coupling stiffness

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Microsystems & nanoengineering 2019年第1期5卷 492-503页

作者： Jian Cui Qiancheng Zhao Guizhen Yan The National Key laboratory of Science and technology on Micro/nano fabrication Institute of MicroelectronicsPeking University100871 BeijingChina

Bias warm-up time is the time required for MEMS gyroscopes to reach a relatively stable state with specified performance after the power supply is turned on,is a critical factor for short time-of-flight navigation *** paper demonstrates an effective method to improve the bias warm-up time of a custom-designed MEMS gyroscope operating in split-mode based on open-loop readout scheme with active suppression of the coupling stiffness(ASCS).A semi-quantitative mathematical model for the temperature sensitivity of the bias is established that indicates the resonant frequency of the primary mode,the frequency difference and the coupling stiffness between the primary and sense modes together with the demodulation phase error,and these are the main factors that affect bias warmup *** all these parameters,the stiffness coupling variation contributes the most to the start-up warm-up time,followed by the phase error *** experimental result shows that the bias warm-up time decreases from 2000 to 2 s under the condition that the bias stability(1σ)falls into about 10 deg/h within an hour of testing time using closedloop control for the coupling stiffness,resulting in a reduction of three orders of *** addition,the bias instability of the gyroscope is improved two-fold from 4 to 2 deg/h with ASCS.

关键词： coupling stiffness mode

Inkjet printing-based fabrication of microscale 3D ice structures

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Microsystems & nanoengineering 2020年第1期6卷 305-314页

作者： Fengyi Zheng Zhongyan Wang Jiasheng Huang Zhihong Li National Key laboratory of Science and technology on Micro/nano fabrication Institute of MicroelectronicsPeking UniversityBeijing 100871China

This study proposed a method for fabricating 3D microstructures of ice without a supporting *** inkjet printing process was performed in a low humidity environment to precisely control the growth direction of the ice *** the printing process,water droplets(volume=hundreds of picoliters)were deposited onto the previously formed ice structure,after which they immediately *** 3D structures(maximum height=2000µm)could be formed by controlling the substrate temperature,ejection frequency and droplet *** growth direction was dependent on the landing point of the droplet on the previously formed ice structure;thus,3D structures could be created with high degrees of freedom.

关键词： printing structures hundreds

Photovoltaic enhancement of Si solar cells by assembled carbon nanotubes

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nano-Micro Letters 2010年第1期2卷 22-25页

作者： Y.F.Zhang Y.F.Wang N.Chen Y.Y.Wang Y.Z.Zhang Z.H.Zhou L.M.Wei Key laboratory for Thin Film and Microfabrication of the Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University

Photovoltaic conversion was enhanced by directly assemble of a network of single-walled carbon nanotubes(SWNTs) onto the surface of n-p junction silicon solar cells. When the density of SWNTs increased from 50 to 400 tubes μm^(-2), an enhancement of 3.92% in energy conversion efficiency was typically obtained. The effect of the SWNTs network is proposed for trapping incident photons and assisting electronic transportation at the interface of silicon solar cells.

关键词： Solar cell Carbon nanotube Photovoltaic enhancement Heterojunction

Characterization of focusing performance of spiral zone plates with fractal structure

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Chinese Physics B 2019年第6期28卷 184-188页

作者： Hua-Ping Zang Cheng-Long Zheng Zi-Wen Ji Quan-Ping Fan Lai Wei Yong-Jie Li Kai-Jun Mu Shu Chen Chuan-Ke Wang Xiao-Li Zhu Chang-Qing Xie Lei-Feng Cao Er-Jun Liang School of Physics Science and Engineering Zhengzhou UniversityZhengzhou 450001China National Key laboratory for Laser Fusion Research Center of Laser FusionChina Academy of Engineering PhysicsMianyang 621900China Information and Telecommunication Company of State Grid Henan Electric Power Corporation Zhengzhou 450001China Key laboratory of nano-fabrication and novel devices integrated technology Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China

We propose an efficient method of generating a vortex beam with multi-foci by using a fractal spiral zone plate(FSZP), which is designed by combining fractal structure with a spiral zone plate(SZP) in the squared radial *** theoretical analysis reveals that the number of foci that embed vortices is significantly increased as compared with that obtained by using a conventional SZP. Furthermore, the influence of topological charge on the intensity distribution in focal plane is also discussed in detail. For experimental investigation, an FSZP with topological charge p = 1 and 6.4 mm diameter is fabricated by using a photo-etching technique. The calibration indicates that the focusing performances of such a kind of zone plane(ZP) accord well with simulations, thereby providing its potential applications in multi-dimensional optical manipulation and optical imaging technology.

关键词： optical vortices spiral zone plate diffractive optical elements

Progress of Microfluidics for Biology and Medicine

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nano-Micro Letters 2013年第1期5卷 66-80页

作者： Jingdong Chen Di Chen Yao Xie Tao Yuan Xiang Chen Science and technology on Micro/nano fabrication laboratory Research Institute of Micro/Nano Science and TechnologyShanghai Jiao Tong University Key laboratory for Thin Film and Microfabrication of the Ministry of Education Research Institute of Micro/Nano Science and TechnologyShanghai Jiao Tong University

Microfluidics has been considered as a potential technology to miniaturize the conventional equipments and technologies. It offers advantages in terms of small volume, low cost, short reaction time and highthroughput. The applications in biology and medicine research and related areas are almost the most extensive and profound. With the appropriate scale that matches the scales of cells, microfluidics is well positioned to contribute significantly to cell biology. Cell culture, fusion and apoptosis were successfully performed in microfluidics. Microfluidics provides unique opportunities for rare circulating tumor cells isolation and detection from the blood of patients, which furthers the discovery of cancer stem cell biomarkers and expands the understanding of the biology of metastasis. Nucleic acid amplification in microfluidics has extended to single-molecule, high-throughput and integration treatment in one chip. DNA computer which is based on the computational model of DNA biochemical reaction will come into practice from concept in the future. In addition, microfluidics offers a versatile platform for protein-protein interactions, protein crystallization and high-throughput screening. Although microfluidics is still in its infancy, its great potential has already been demonstrated and will provide novel solutions to the high-throughput applications.

关键词： Microfluidics Lab-on-a-chip Droplet High-throughput Cell Nucleic acid amplification

Comparison of the RF MEMS switches with dielectric layers on the bridge’s lower surface and on the transmission line

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Science China(Information Sciences) 2011年第2期54卷 396-406页

作者： CHEN KenLe & ZHANG JinWen National Key laboratory of Micro/nano fabrication technology, Institute of Microelectronics, Peking University, Beijing 100871, China 1. National Key laboratory of Micro/nano fabrication technology Institute of Microelectronics Peking University Beijing 100871 China

Previously, we proposed that the dielectric layer of RF MEMS switch can be fabricated either on the transmission line, as traditional switches, or on the lower surface of the bridge. This paper presents a detailed comparison of the RF MEMS switches with different positions of dielectric layer. Through theoretically analyzing the physical model of fringing capacitance, it is revealed that different positions of dielectric layer can result in different switch capacitances. Therefore, the change of dielectric-layer position can reduce the switch capacitance and insertion loss when the bridge is much wider than t-line. The theoretical analysis is demonstrated by Maxwell 3D and HFSS simulation, showing that the insertion loss is reduced by around 13% when the bridge width is three times of transmission line width. Further, the inffuence of switch’s structural parameters, such as dielectric material and dimensions of dielectric layer, on the differences between these two kinds of switches is discussed. To achieve high integration together with low-loss and low-actuation-voltage design, the novel switch with dielectric layer on bridge’s lower surface can be expected to have broad applications in the future.

关键词： RF MEMS switch insertion loss fringing capacitance dielectric layer

A MEMS stronglink with multi-try function used for PC startup in authentication system

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Journal of Harbin Institute of technology(New Series) 2009年第2期16卷 159-164页

作者：李胜勇陈文元张卫平肖奇军谈顺毅冯敏华 National Key laboratory of nano/Micro fabrication technology Key Laboratory for Thin Film and Microfabrication of Ministry of Education Research Institute of Micro/Nano Science and Technology Shanghai Jiaotong University

The stronglink with muhi-try function based on MEMS technology and the PC startup in authentication system have been designed and fabricated. The generation principle and structure of UQS code are introduced, which consists of two groups of metal counter-meshing gears, two pawl/ratchet mechanisms, two driving micromotors and two resetting micromotors. The energy-coupling element is a photoelectric sensor with a circular and notched plate. It is fabricated using the UV-LiGA process and precision mechanical engineering. The PC startup authentication system is controlled by BIOS program, which is written into the chip according with special format. The program in BIOS output signals controls the running of stronglink to finish the process of authentication. The device can run more than 10000 times before a stop. The driving voltage is 12 V, and the normal decoding time is 3 s.

关键词： stronglink multi-try UQS authentication PC startup

Microstructure of Electrodeposited Cu Micro-cylinders in High-Aspect-Ratio Blind Holes and Crystallographic Texture of the Cu Overburden Film

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Journal of Materials Science & technology 2016年第4期32卷 355-361页

作者： Yazhou Zhang Guifu Ding Hong Wang Ping Cheng National Key laboratory of Science and technology on Micro/nano fabrication Department of Micro/Nano Electronics School of Electronic Informationand Electrical Engineering Shanghai Jiao Tong University Shanghai 200240 China

Microstructure and texture of electrodeposited Cu micro-cylinders in the blind hole play a vitally im- portant role in the electrical and mechanical properties of the three-dimensional （3-D） IC （integrated circuit）/Si integrations. In this paper, a new commercial additive system, which is specifically devel- oped for the high-aspect-ratio through-silicon-via （TSV） filling, was used to electrodeposit Cu in the blind holes. The microstructure of electrodeposited Cu micro-cylinder in the blind hole with a diameter of 40 μm and a depth of 140 μm was investigated by electron back-scattered diffraction （EBSD） technique. Grain size distribution of the Cu micro-cylinder in the blind hole differed from the bottom to the top. The grain boundaries contained a high fraction of Z3 CSL （coincident site lattice） boundaries. It has been reported that the Cu overburden film on the surface of the blind hole influenced the crystallographic orientation of Cu grains inside the damascene trench. So the effects of the current density and additive concentra- tion on the crystal structure of the overburden Cu film were also studied in this study. The experimental results indicated that the preferred orientation of the Cu overburden film changed from {111} to {220} when the current density increased from 2 to 80 mA cm-2. However, the effect of additives on the crystal structure of the Cu overburden film was dependent on the crystal structure of the seed layer.

关键词： Cu micro-cylinder electrodepositionElectron back-scattered diffraction (EBSD)Crystallographic orientationCu overburden film

A strong physical unclonable function with machine learning immunity for Internet of Things application

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Science China(Information Sciences) 2024年第1期67卷 271-283页

作者： Pengpeng REN Yongkang XUE Linglin JING Lining ZHANG Runsheng WANG Zhigang JI National Key laboratory of Science and technology on Micro/nano fabrication Shanghai Jiao Tong University Department of Micro/nano Electronics Shanghai Jiao Tong University School of Electronic and Computer Engineering Peking University School of integrated Circuits Peking University

The physical unclonable functions(PUFs) are novel cryptographic primitives in modern hardware security *** with traditional alternatives based on digital keys and non-volatile memory(NVM),the PUF system shows great unclonability,high efficiency,and physical attack ***,the conventional PUF design suffers from weak machine learning immunity,high storage overhead,and unreliability,making it difficult to implement in the Internet of Things(Io T) and edge computing *** paper presents a new PUF design that could solve the proposed *** utilizing the emission probability of traps commonly found in nano-scaled transistors,a model-based PUF system with strong machine learning resistance could be *** PUF design,called Prob-PUF,needs fewer challengeresponse pairs(CRPs) space and reveals superior resistance to modeling attacks due to the mixture of stable/random bits in its output ***,the Prob-PUF system could reach a high level of uniqueness and robustness,making it a potential candidate for future cryptographically secured protocols within the IoT.

关键词： physical unclonable function (PUF) electron traps authentication encryption cryptography security

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