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A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

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microsystems & Nanoengineering 2024年第3期10卷 169-180页

作者： Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu Ningbo institute of Northwestern Polytechnical University College of Mechanical EngineeringNorthwestern Polytechnical University710072 Xi’anChina Key Laboratory of micro/Nano systems for Aerospace(Ministry of Education) Shaanxi Province Key Laboratory of Micro and Nanoelectromechanical SystemsNorthwestern Polytechnical University710072 Xi’anChina

As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many ***,two crucial challenges exist in the fabrication of such devices:the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual *** solve these issues,an innovative processing method assisted by temporary anchors is *** approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon ***,these temporary anchors are strategically placed within the primary etching areas,enabling easy removal without additional processing *** a result,we successfully achieved wafer-level,high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%.Demonstrating superior capabilities to those of original MMAs,our enhanced version boasts a total of 60 linear micromirror elements,each featuring a length-to-width ratio of 52.6,and the entire optical aperture measures 5 mm×6 *** linear MMA exhibits an optical deflection angle of 20.4°at 110 Vdc while maintaining exceptional deflection flatness and *** study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields,and the proposed MMA is promising as a replacement for digital micromirror devices(DMDs,by TI Corp.)in fields such as spectral imaging and optical communication.

关键词： mirror exceptional anodic

Recent progress in lanthanide ions doped inorganic metal halide perovskites

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Journal of Rare Earths 2024年第2期42卷 237-250,I0001页

作者： Yiyan Zhang Tianyu Zhao Guanying Chen MIIT Key Laboratory of Critical Materials Technology for New Energy Conversion and Storage School of Chemistry and Chemical EngineeringState Key Laboratory of Urban Water Resource and EnvironmentKey Laboratory of Micro-systems and Micro-structuresMinistry of EducationHarbin Institute of TechnologyHarbin150001China

Benefiting from their large molar extinction coefficient,high carrier mobility,narrow and tunable emissions,inorganic metal halide perovskites(IMHPs) demonstrate great potential in various optoelectrical devices including solar cells,light emitting diodes and photodetectors in the past few *** ions doping,well-known as a modification method of semiconductors,has been extensively applied in IMHPs as *** metal ions have been doped in IMHPs including alkali metals,alkali earth metals,transition metals and lanthanide metals,which either improve their optical performances or induce intriguing brand-new *** them,lanthanide metals feature plentiful energy levels and stable optical properties and are one of the most noteworthy *** we review recent progress in lanthanide ions doped *** summarize Yb,Eu or Er ions singly doping in detail,which was the most investigated species in *** lanthanide ions are also reviewed ***,we introduce lanthanide ions multi-doped IMHPs and at last we put forward several potential development *** the interests in lanthanide ions doped IMHPs rise,researchers have made some achievements in the *** though,there are more unexplored *** there are review articles focusing on metal ions doped IMHPs or lanthanide ions doped perovskites,this review aims to provide an overall introduction of lanthanide ions doped *** review may help researchers learn about lanthanide ions doped IMHPs and is to inspire researchers to make further promotion in this field.

关键词： Halide perovskite Lanthanide Doping Rare earths

Recent advances in bioinspired vision systems with curved imaging structures

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Rare Metals 2024年第4期43卷 1407-1434页

作者： Ze-Ping He Xun Han Wen-Qiang Wu Zhang-Sheng Xu Cao-Feng Pan CAS Center for Excellence in Nanoscience Beijing Key Laboratory of Micro-Nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing100083China School of Nanoscience and Technology University of Chinese Academy of SciencesBeijing100049China ZJU-Hangzhou Global Scientific and Technological Innovation Center School of Micro-Nano ElectronicsZhejiang UniversityHangzhou311200China institute of microscale Optoelectronics Shenzhen UniversityShenzhen518060China

Limited by the planar imaging structure,the commercial camera needs to introduce additional optical elements to compensate for the curved focal plane to match the planar image *** results in a complex and bulky *** contrast,biological eyes possess a simple and compact structure due to their curved imaging structure that can directly match with the curved focal *** by the structures and functions of biological eyes,curved vision systems not only improve the image quality,but also offer a variety of advanced ***,we review the recent advances in bioinspired vision systems with curved imaging ***,we focus on their applications in implementing different functions of biological eyes,as well as the emerging curved neuromorphic imaging systems that incorporate bioinspired optical and neuromorphic processing *** addition,the challenges and opportunities of bioinspired curved imaging systems are also discussed.

关键词： Bioinspired Curved vision system Compound eye Chambered eye Neuromorphic

Boosting solar hydrogen production via electrostatic interaction mediated ***-TiO_(2−x)biohybrid system

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Nano Research 2024年第6期17卷 5390-5398页

作者： Xingxing Lv Weicheng Huang Ya Gao Rui Chen Xiaowei Chen Danqing Liu Ling Weng Liangcan He Shaoqin Liu School of Material Science and Chemical Engineering Harbin University of Science and TechnologyHarbin 150040China School of Medicine and Health and Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of EducationHarbin Institute of TechnologyHarbin 150001China Department of Physics School of ScienceJimei UniversityXiamen 361021China Zhengzhou Research institute Harbin Institute of TechnologyZhengzhou 450046China

Hydrogen is garnering growing attention as a green energy source with zero carbon ***,most hydrogen production technologies still rely on the consumption of fossil fuels and are therefore *** has driven the search for more environmentally friendly methods of hydrogen *** this work,we present an innovative approach to enhance hydrogen generation via electrostatic interaction in the Escherichia coli and defective titanium dioxide(TiO_(2−x))*** method involves narrowing the forbidden bandwidth of TiO2 while introducing defect bands into its conduction band to facilitate visible light absorption and efficient charge *** biohybrid system,consisting of *** and TiO_(2−x),demonstrates a remarkable capability to produce 1.25 mmol of hydrogen within a 3-h timeframe under visible light *** accomplishment signifies a 3.31-fold rise in hydrogen production in comparison to ***,signifying a substantial enhancement in hydrogen production ***,we delve into the alterations in biological metabolites associated with hydrogen production and the changes in electron transfer in different biohybrid *** provides valuable insights into the understanding of the intrinsic mechanisms that drive the *** work introduces a novel and promising avenue for achieving this exciting goal.

关键词： Escherichia coli TiO_(2−x)nanoparticles biohybrid system hydrogen production

Design and Gait Planning of a Worm-inspired Metameric Robot for Pipe Crawling

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Journal of Bionic Engineering 2024年第3期21卷 1265-1277页

作者： Yu Liu Qingbiao Shi Zhen Chen Pen-Tung Sah institute of micro-Nano Science and Technology Xiamen UniversityXiamen361102China

The earthworm has been attracted much attention in the research and development of biomimetic robots due to their unique locomotion mechanism,compact structure,and small motion *** paper presents a new design and prototype of a worm-inspired metameric robot with a movement pattern similar to that of *** robot consists of multiple telescopic modules connected in series through joint *** telescopic module mimics the contraction and elongation motion modes of the earthworm segments.A kinematic and dynamic analysis is conducted on the telescopic module,and an input torque calculation method is provided to ensure sufficient friction between the robot and the pipe *** gait modes of the prototype robot for straight and turning locomotion are introduced,and these modes are extended to robots constructed by different numbers of telescopic *** addition,a method is proposed to increase the friction between the robot and the pipe wall in the aforementioned gait modes without changing the robot structure,thereby improving the robot’s motion ability in *** theoretical model of gait modes has also been validated through gait *** findings of this paper would provide a useful basis for the design,modeling,and control of future worm inspired robots.

关键词： Bio-inspired robot Spatial linkage mechanism Kinematics model Peristaltic locomotion

Triboelectric nanogenerator integrated with a simple controlled switch for regularized water wave energy harvesting

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Nano Research 2024年第8期17卷 7585-7592页

作者： Hongbo Yang Xi Liang Junwu Kan Zhong Lin Wang Tao Jiang Zhanyong Hong College of Engineering Zhejiang Normal UniversityJinhua 321004China Beijing Key Laboratory of micro-Nano Energy and sensor Center for High-Entropy Energy and SystemsBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing 101400China The Beijing Key Laboratory for Nano-Photonics and Nano-Structure Department of PhysicsCapital Normal UniversityBeijing 100048China Guangzhou institute of Blue Energy Guangzhou 510555China Georgia institute of Technology AtlantaGA 30332-0245USA Yonsei Frontier Lab Yonsei UniversitySeoul 03722Republic of Korea

Ocean is full of low-frequency,irregular,and widely distributed wave energy,which is suitable as the energy source for maritime Internet of Things(IoTs).Utilizing triboelectric nanogenerators(TENGs)to harvest ocean wave energy and power sensors is proven to be an effective ***,in random ocean waves,the irregular electrical energy output by general TENGs restricts the *** present,achieving regularized water wave energy harvesting relies on rather complex mechanical structure designs,which is not conducive to *** this work,we proposed a novel mechanical controlled TENG(MCTENG)with a simple controlled switch to realize the regularization *** structural parameters of the MC-TENG are optimized,and the optimal output voltage,output current,and transferred charge respectively reach 1684.2 V,85.4μA,and 389.9 nC,generating a peak power density of 38.46 W·m^(−3)·Hz^(−1).Under real water wave environment,the output of the MC-TENG is regularized and keeps stable regardless of any wave ***,the potential applications of the MC-TENG are demonstrated in powering environmental temperature,humidity,and wind speed *** work renders a simple approach to achieve effective regularized ocean wave energy harvesting,promoting the TENG industrialization toward practical application of maritime IoTs.

关键词： water wave energy harvesting triboelectric nanogenerators random excitation mechanical control regular output

Giant piezotronic effect in ferroelectric field effect transistor

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Nano Research 2024年第9期17卷 8465-8471页

作者： Haiming Zhang Mengshuang Chi Shidai Tian Tian Liang Jitao Liu Xiang Zhang Lingyu Wan Zhong Lin Wang Junyi Zhai Center on Nanoenergy Research School of Physical Science&TechnologyGuangxi UniversityNanning 530004China Beijing Key Laboratory of micro-Nano Energy and sensor Center for High-Entropy Energy and SystemsBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing 101400China School of Nanoscience and Engineering University of Chinese Academy of ScienceBeijing 100049China School of Electronic Science and Engineering University of Electronic Science and Technology of ChinaChengdu 610054China Georgia institute of Technology AtlantaGA 30332USA

The piezotronics effect utilizes a piezopotential to modulate and control current in *** materials,as a type of piezoelectric materials,possess piezoelectric coefficients that are significantly larger than those found in conventional piezoelectric ***,we propose a strain modulated ferroelectric field-effect transistor(St-FeFET)utilizing external strain instead of gate voltage to achieve ferroelectric modulation,which eliminates the need for gate *** applying a very small strain(0.01%),the St-FeFET can achieve a maximum on-off current ratio of 1250%and realizes a gauge factor(GF)of 1.19×10^(6),which is much higher than that of conventional strain *** work proposes a new method for realizing highly sensitive strain sensors and presents innovative approaches to the operation methods of ferroelectric field-effect transistors as well as potential applications for coupling of strain sensors and various devices across different fields.

关键词： ferroelectric field-effect transistors piezotronics [Pb(Mg_(1/3)Nb_(2/3))O_(3)]_((1-x)^(-))[PbTiO_(3)]_(x)(PMN-PT) strain sensors

Acousto-optic scanning multi-photon lithography with high printing rate

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Opto-Electronic Advances 2024年第2期7卷 1-3页

作者： Minghui Hong Pen-Tung Sah institute of micro-Nano Science and Technology Xiamen UniversityXiamen 361005China

As a manufacturing method that is focused on end-users,3D printing has gained a lot of attention in recent years due to its unique advantages in fabricating complex three-dimensional *** new micro-nano 3D printing methods have been developed to meet the demand for high-precision and high-yield *** them,multi-photon-photon lithography(MPL) is a promising 3D nanofabrication technology due to its capability of true 3D digital processing and nanoscale processing resolution beyond the diffraction *** has been widely used to fabricate microoptics10,11,photonic crystals12,microfluidics13,meta-surfaces14,and mechanical metamaterials15.

关键词： photon Acous scanning

Intelligent ion gels: Design, performance, and applications

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SmartMat 2024年第1期5卷 38-58页

作者： Naiwei Gao Caofeng Pan Beijing Key Laboratory of micro‐nano Energy and sensor CAS Center for Excellence in NanoscienceBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijingChina Key Laboratory of Optoelectronic Devices and systems of Ministry of Education Center for Stretchable Electronics and Nano SensorsCollege of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhenChina School of Nanoscience and Engineering University of Chinese Academy of SciencesBeijingChina

Intelligent ion gels,which possess highly tunable mechanical,electrical,and stimulus‐responsive properties,have emerged as powerful candidates in the field of artificial intelligence,telemedicine,and health *** enrich the functionality of ion gels,it is critical to explore the link between the structure and function of ion *** this review,we provide an overview of the synthesis path and functional derivatives of ion *** conformational relationships of ion gels have been discussed,such as the effect of structure on electrical conductivity as well as sensing *** the perspective of stimulus response,the role of ion gels in areas such as bionic haptics,neural devices,artificial muscles,and intelligent displays has also been *** is possible that smart ion gels will open up a new horizon in the upcoming smart era,especially after the current challenges are resolved.

关键词： chemical structure intelligent electronics ion gels stimulus‐responsive