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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment r&d Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process development department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process development department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(Cd)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCd)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of drAM cell blocks,areas previously challenging to inspect with conventional OCd *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3d structures of semiconductor devices.

关键词： metrology resolution enable

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discovery and structure-activity relationship studies of novel tetrahydro-β-carboline derivatives as apoptosis initiators for treating bacterial infections

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Journal of Integrative Agriculture 2024年第4期23卷 1259-1273页

作者： Shanshan Su Hongwu Liu Junrong Zhang Puying Qi Yue ding Ling Zhang Linli Yang Liwei Liu Xiang Zhou Song Yang National Key Laboratory of Green Pesticide/Key Laboratory of Green Pesticide and Agricultural Bioengineering Ministry of Education/Center for R&D of Fine ChemicalsGuizhou UniversityGuiyang 550025China

developing and excavating new agrochemicals with highly active and safe is an important tactic for protecting crop health and food *** this paper,to discover the new bactericide candidates,we designed,prepared a new type of1,2,3,4-tetrahydro-β-carboline(THC)derivatives and evaluated the in vitro and in vivo bioactivities against the Xanthomonas oryzae ***(Xoo),Xanthomonas axonopodis ***(Xac),and Pseudomonas syringae ***(Psa).The in vitro bioassay results exhibited that most title molecules possessed good activity toward the three plant pathogenic bacteria,the compound A17 showed the most active against Xoo and Xac with EC50 values of 7.27 and 4.89 mg mL^(-1)respectively,and compound A8 exhibited the best inhibitory activity against Psa with EC50value of 4.87 mg mL^(-1).Pot experiments showed that compound A17 exhibited excellent in vivo antibacterial activities to manage rice bacterial leaf blight and citrus bacterial canker,with protective efficiencies of 52.67 and 79.79%at 200 mgmL^(-1),***,compound A8 showed good control efficiency(84.31%)against kiwifruit bacterial canker at 200 mg mL^(-1).Antibacterial mechanism suggested that these compounds could interfere with the balance of the redox system,damage the cell membrane,and induce the apoptosis of Xoo *** together,our study revealed that tetrahydro-β-carboline derivatives could be a promising candidate model for novel broadspectrum bactericides.

关键词： tetrahydro-β-carboline derivatives antibacterial activity rOS cell apoptosis

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New structure transistors for advanced technology node CMOS ICs

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National Science review 2024年第3期11卷 24-41页

作者： Qingzhu Zhang Yongkui Zhang Yanna Luo Huaxiang Yin Integrated Circuit Advanced Process r&d center Institute of Microelectronics of Chinese Academy of Sciences(IMECAS) State key Lab of Fabrication Technologies for Integrated Circuits Institute of Microelectronics of Chinese Academy of Sciences School of Integrated Circuits University of Chinese Academy of Sciences

Over recent decades, advancements in complementary metal-oxide-semiconductor integrated circuits(ICs)have mainly relied on structural innovations in transistors. From planar transistors to the fin field-effect transistor(FinFET) and gate-all-around FET(GAAFET), more gate electrodes have been added to three-dimensional(3d) channels with enhanced control and carrier conductance to provide higher electrostatic integrity and higher operating currents within the same device footprint. Beyond the 1-nm node, Moore's law scaling is no longer expected to be applicable to geometrical shrinkage. Vertical transistor stacking, e.g. in complementary FETs(CFET), 3d stack(3dS) FETs and vertical-channel transistors(VFET), for enhanced density and variable circuit or system design represents a revolutionary scaling approach for sustained IC development. Herein, innovative works on specific structures, key process breakthroughs, shrinking cell sizes and design methodologies for transistor structure research and development are reviewed. Perspectives on future innovations in advanced transistors with new channel materials and operating theories are also discussed.

关键词： transistor CMOS GAAFET CFET 3dS FET

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Three-dimensional breast cancer tumor models based on natural hydrogels:a review

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Journal of Zhejiang University-Science B(Biomedicine & Biotechnology) 2024年第9期25卷 736-755页

作者： Yan SHU Bing LI Hailin MA Jiaqi LIU Yuen Yee CHENG Xiangqin LI Tianqing LIU Chuwei YANG Xiao MA Kedong SONG State Key Laboratory of Fine Chemicals Dalian R&D Center for Stem Cell and Tissue EngineeringDalian University of TechnologyDalian116024China Institute for Biomedical Materials and devices Faculty of ScienceUniversity of Technology SydneySydneyNSW2007Australia Emergency center The Second Hospital of Dalian Medical UniversityDalian116023China department of Anesthesia The First Affiliated Hospital of Dalian Medical UniversityDalian116011China

Breast cancer is the most common cancer in women and one of the deadliest cancers *** to the distribution of tumor tissue,breast cancer can be divided into invasive and non-invasive *** cancer cells in invasive breast cancer pass through the breast and through the immune system or systemic circulation to different parts of the body,forming metastatic breast *** resistance and distant metastasis are the main causes of death from breast *** on breast cancer has attracted extensive attention from *** vitro construction of tumor models by tissue engineering methods is a common tool for studying cancer mechanisms and anticancer drug *** tumor microenvironment consists of cancer cells and various types of stromal cells,including fibroblasts,endothelial cells,mesenchymal cells,and immune cells embedded in the extracellular *** extracellular matrix contains fibrin proteins(such as types Ⅰ,Ⅱ,Ⅲ,Ⅳ,Ⅵ,and Ⅹ collagen and elastin)and glycoproteins(such as proteoglycan,laminin,and fibronectin),which are involved in cell signaling and binding of growth *** current traditional two-dimensional(2d)tumor models are limited by the growth environment and often cannot accurately reproduce the heterogeneity and complexity of tumor tissues in ***,in recent years,research on three-dimensional(3d)tumor models has gradually increased,especially 3d bioprinting models with high precision and *** with a 2d model,the 3d environment can better simulate the complex extracellular matrix components and structures in the tumor ***-dimensional models are often used as a bridge between 2d cellular level experiments and animal *** matrix,gelatin,sodium alginate,and other natural materials are widely used in the construction of tumor models because of their excellent biocompatibility and non-immune ***,we review various natural scaffold materials and con

关键词： Breast cancer Tumor microenvironment 3d tumor model decellularized extracellular matrix Natural scaffold materials

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Improving lipid production by rhodotorula glutinis for renewable fuel production based on machine learning

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Frontiers of Chemical Science and Engineering 2024年第5期18卷 23-35页

作者： Lihe Zhang Changwei Zhang Xi Zhao Changliu He Xu Zhang National Energy r&d center for Biorefinery Beijing University of Chemical TechnologyBeijing 100029China Collage of Life Science and Technology Beijing University of Chemical TechnologyBeijing 100029China Beijing Key Laboratory of Bioprocess Beijing University of Chemical TechnologyBeijing 10029China

Microbial lipid fermentation encompasses intricate complex cell growth processes and heavily relies on expert experience for optimal *** modeling of the fermentation process assists researchers in making intelligent decisions,employing logical reasoning and strategic planning to optimize lipid *** this study,the effects of medium components and concen-trations on lipid fermentation were investigated,*** then,leveraging the collated data,a variety of machine learning algorithms were used to model and optimize the lipid fermentation *** models,based on artificial neural networks and support vector machines,achieved r?values all higher than 0.93,ensuring accurate predictions of the fermentation *** linear regression was used to evaluate the respective target parameter,which were affected by the medium components of lipid ***,single and multi-objective optimiza-tion were conducted for lipid fermentation using the genetic *** results demonstrated the maximum biomass of 50.3 g·L^(-1) and maximum lipid concentration of 14.1 g:L^(-1) with the error between the experimental and predicted values less than 5%.The results of the multi-objective optimization reveal the synergistic and competitive relationship between biomass,lipid concentration,and conversion rate,which lay a basis for in-depth optimization and amplification.

关键词： microbial lipid machine learning artificial neural network support vector machine genetic algorithm

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Practical operating flexibility of a bifunctional freestanding membrane for efficient anion exchange membrane water electrolysis across all current ranges

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Carbon Energy 2024年第9期6卷 306-324页

作者： Hong-Jin Son Jeemin Hwang Min Young Choi Seung Hee Park Jae Hyuk Jang Byungchan Han Sung Hoon Ahn department of Bio-Chemical Engineering Chosun UniversityGwangjuRepublic of Korea fuel cell research and demonstration center Hydrogen Energy Research DivisionKorea Institute of Energy Research(KIER)Buan-gunJeollabuk-doRepublic of Korea department of Chemical and Biomolecular Engineering Yonsei UniversitySeoulRepublic of Korea center for research Equipment Korea Basic Science InstituteDaejeonRepublic of Korea

This study explores a symmetric configuration approach in anion exchange membrane(AEM)water electrolysis,focusing on overcoming adaptability challenges in dynamic ***,a rapid and mild synthesis technique for fabricating fibrous membrane-type catalyst electrodes is *** method leverages the contrasting oxidation states between the sulfur-doped NiFe(OH)2 shell and the metallic Ni core,as revealed by electron energy loss *** evaluations confirm that the S–NiFe(OH)_(2) active sites optimize free energy for alkaline water electrolysis *** technique bypasses traditional energy-intensive processes,achieving superior bifunctional activity beyond current *** symmetric AEM water electrolyzer demonstrates a current density of 2 A cm^(-2) at 1.78 V at 60℃ in 1 M KOH electrolyte and also sustains ampere-scale water electrolysis below 2.0 V for 140 h even in ambient *** results highlight the system's operational flexibility and structural stability,marking a significant advance-ment in AEM water electrolysis technology.

关键词： AEM water electrolysis fibrous membrane ir correction free operational stability symmetric configuration

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cell architecture designs towards high-energy-density microscale energy storage devices

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Nano research Energy 2024年第2期3卷 69-82页

作者： Kwon-Hyung Lee Sang-Young Lee Ulsan Advanced Energy Technology r&d center Korea Institute of Energy Research(KIER)Ulsan44776Republic of Korea department of Chemical and Biomolecular Engineering Yonsei UniversitySeoul03722Republic of Korea

The rapid growth of miniaturized electronics has led to an urgent demand for microscale energy storage devices(MESds)to sustainably power the micro electronic ***,most MESds reported to date have suffered from the limited energy densities and shape versatility compared to conventional large-scale counterparts because of the architectural constraints inherent in microfabrication-based cell manufacturing and cell dimension/*** review addresses the cell architecture design for MESds that can achieve both miniaturization and high energy *** provide a comprehensive overview of five types of cell architectures of MESds and their fabrication *** addition,to enable practical applications of MESds,several cell design approaches are presented with the aim of minimizing the inactive parts of the cell and maximizing the performance metrics of ***,we discuss development direction and outlook of MESds with a focus on materials chemistry,energy-dense electrochemical systems,and cell performance normalization,which will help to expand their applications and manufacturing scalability.

关键词： microscale energy storage device cell architecture microfabrication miniaturization high-energy-density

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Enhancement of CH_(3)CO^(*) adsorption by editing d-orbital states of Pd to boost C–C bond cleavage of ethanol eletrooxidation

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Science China Chemistry 2024年第2期67卷 696-704页

作者： Yuchen Qin Fengqi Wang Pei Liu Jinyu Ye Qian Wang Yao Wang Guangce Jiang Lijie Liu Pengfang Zhang Xiaobiao Liu Xin Zheng Yunlai ren Junjun Li Zhicheng Zhang College of Sciences Henan Agricultural UniversityZhengzhou450000China Tianjin Key Laboratory of Molecular Optoelectronic Sciences Department of ChemistrySchool of ScienceTianjin University&Collaborative Innovation Center of Chemical Science and EngineeringTianjin300072China College of Chemistry and Chemical Engineering Xiamen UniversityXiamen361005China department of Analysis Sinopec Engineering Group Luoyang R&D Center of TechnologyLuoyang471000China School of Chemical and Material Engineering Jiangnan UniversityWuxi214211China Shandong Provincial Key Laboratory of Chemical Energy Storage and Novel cell Technology Liaocheng UniversityLiaocheng252000China

Improving the complete ethanol electrooxidation on Pd-based catalysts in alkaline media has drawn widely attention due to the high mass energy ***,the weak adsorption energy of CH_(3)CO^(*) on Pd restricts the C–C bond *** by the molecular orbital theory,we proposed the d-state-editing strategy to construct more unoccupied d-states of Pd for the enhanced interaction with CH_(3)CO^(*) to break C–C *** expected,the reduced number of e_g electrons and more unoccupied d-states of Pd successfully formed on as-prepared porous rh Au–Pd Cu nanosheets(PNSs).Theoretical calculations show that the optimized d-states of rh Au–Pd Cu PNS can effectively improve the adsorption of CH_(3)CO^(*) and drastically reduce the energy barrier of C–C bond cleavage,thus boosting the complete oxidation of *** charge ratio of C_1 pathway on rh Au–Pd Cu PNSs is 51.5%,more than 2 times higher than that of Pd *** finding provides an innovative perspective for the design of highly-efficient noble-based electrocatalysts.

关键词： C–C bond cleavage CH_(3)CO^(*)adsorption unoccupied d-states ethanol oxidation reaction rhAu–PdCu porous nanosheets

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BET inhibitors enhance the anti-cancer effect of etoposide by suppressing the MrN-ATM axis in the dNA damage response

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Genes & diseases 2024年第1期11卷 19-22页

作者： Zhenhai Li Wenchao Xu Feng Chen Jun Zhang Wei-Guo Zhu Guangdong Key Laboratory of Genome Instability and Human disease Prevention Department of Biochemistry and Molecular BiologyShenzhen University School of MedicineShenzhenGuangdong 518055China School of Pharmaceutical Sciences Shenzhen University Health Science CenterShenzhenGuangdong 518055China Base for International Science and Technology Cooperation:Carson Cancer Stem cell Vaccines r&d center International Cancer CenterShenzhen University Health Science CenterShenzhenGuangdong 518055China Shenzhen Bay Laboratory Shenzhen University School of MedicineShenzhenGuangdong 518055China Marshall Laboratory of Biomedical Engineering Shenzhen University School of MedicineShenzhenGuangdong 518055China

Etoposide is widely used for cancer chemotherapy in the ***,long-term etoposide treatment can lead to adverse effects or drug *** improve the situation,we evaluated the therapeutic efficiency of etoposide combined with inhibitors of bromodomain and extraterminal(BET)family proteins,which have recently emerged as novel anti-cancer targets due to their critical roles in cancer ***,we showed Brd4,one of the main targets of BET inhibitors,was involved in dNA damage response(ddr)via the homologous recombination(Hr)repair pathway.

关键词： etoposide damage cancer

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development and formation of wing cuticle based on transcriptomic analysis in Locusta migratoria during metamorphosis

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Journal of Integrative Agriculture 2024年第4期23卷 1285-1299页

作者： Jing Zhang Zhaochen Wu Shuo Li He Huang Suning Liu Weimin Liu Xiaoming Zhao Jianzhen Zhang Shanxi Key Laboratory of Nucleic Acid Biopesticides Institute of Applied BiologyShanxi UniversityTaiyuan 030006China College of Life Science Shanxi UniversityTaiyuan 030006China Guangmeiyuan r&d center/Guangdong Provincial Key Laboratory of Insect developmental Biology and Applied Technology South China Normal UniversityMeizhou 514779China

Wings are an important flight organ of *** development is a complex process controlled by a series of *** flightless wing pad transforms into a mature wing with the function of migratory flight during the nymphto-adult ***,the mechanism of wing morphogenesis in locusts is still *** study analyzed the microstructures of the locust wing pads at pre-eclosion and the wings after eclosion and performed the comparative transcriptome ***-seq identified 25,334 unigenesand 3,430 differentially expressed genes(dEGs)(1,907 up-regulated and 1,523 down-regulated).The dEGs mainly included cuticle development(LmACPs),chitin metabolism(Lm Idgf4),lipid metabolism-related genes,cell adhesion(Integrin),zinc finger transcription factors(LmSalm,LmZF593 andLmZF521),and *** analysis based on rNA interference and hematoxylin and eosin(H&E)staining showed that the three genes encoded zinc finger transcription factors are essential for forming wing cuticle and maintaining morphology in Locusta ***,the study found that the LmSalm regulates the expression of LmACPs in the wing pads at pre-eclosion,and LmZF593 and LmZF521 regulate the expression of LmIntegrin/LmIdgf4/LmHMT420 in the wings after *** study revealed that the molecular regulatory axis controls wing morphology in nymphal and adult stages of locusts,offering a theoretical basis for the study of wing development mechanisms in hemimetabolous insects.

关键词： Locusta migratoria wing development metamorphosis rNA-seq

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