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A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement

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microsystems & nanoengineering 2024年第2期10卷 47-56页

作者： Lu Tian Haitao Zhao Qiang Shen Honglong Chang Ministry of Education Key Laboratory of micro and nano systems for Aerospace School of Mechanical EngineeringNorthwestern Polytechnical UniversityXi’an710072China

A surface acoustic wave(SAW)gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope *** a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system(MEMS)***,for the first time,we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers(FIDTs).Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves,which cause beam deflection and result in energy dissipation,this study uses FIDTs to concentrate the SAW energy based on structural features,resulting in better focusing performance and increased SAW *** experimental results reveal that the sensitivity of the structure is 1.51µV/(°/s),and the bias instability is 0.77°/s,which are improved by an order of magnitude compared to those of a traditional SAW ***,the FIDT component can enhance the performance of the SAW gyroscope,demonstrating its superiority for angular velocity *** work provides new insights into improving the sensitivity and performance of SAW gyroscopes.

关键词： angular deflection gyroscope

Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits

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microsystems & nanoengineering 2024年第1期10卷 301-311页

作者： Song Wang Chenying Wang Yifan Zhao Yujing Zhang Yaxin Zhang Xiangyue Xu Qijing Lin Kai Yao Yuheng Wang Feng Han Yu Sun Zhuangde Jiang State Key Laboratory for Manufacturing systems engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina State Key Laboratory for Manufacturing systems engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Instrument Science and TechnologyXi’an Jiaotong UniversityXi’anChina The Faculty of Electrical engineering and Computer Science Ningbo UniversityNingboChina department of Mechanical and Industrial engineering University of TorontoTorontoCanada

Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure ***,existing methods for enhancing stress tolerance employ dome-shaped,wrinkle-shaped,and pyramidal-shaped microstructures in intricate molding and demolding processes,which introduce significant fabrication challenges and limit the sensing *** address these shortcomings,this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−*** periodic microslits permit extensive deformation under high pressure(e.g.,400 kPa)to widen the detection ***,the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing *** proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection,robot movement sensing,and human health *** these experiments,vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%.The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

关键词： robot shaped stress

A Piezoelectrically Driven microrobot Using a Novel Monolithic Spatial Parallel Mechanism as Its Hip Joint

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Journal of Bionic engineering 2024年第2期21卷 803-820页

作者： Guangping Wu Ziyang Wang Jiaxin Zhao Feng Cui Xinghan Cai National Key Laboratory of Advanced micro and nano Manufacture Technology Shanghai Jiao Tong UniversityShanghai200240China department of micro-nano Electronics School of Electronic Information and Electrical EngineeringShanghai Jiao Tong UniversityShanghai200240China

Inspired by the fast,agile movements of insects,we present a 1.9 g,4.5 cm in length,piezoelectrically driven,quadrupedal *** microrobot uses a novel spatial parallel mechanism as its hip joint,which consists of two spatially orthogonal slider-crank *** mechanism maps two inputs of two independent actuators to the decoupled swing and lift outputs of a leg,and each leg can produce the closed trajectories in the sagittal plane necessary for robot ***,the kinematics of the transmission are analyzed,and the parameters of the flexure hinges are designed based on geometrical constraints and yield *** hip joints,legs and exoskeletons are integrated into a five-layer standard laminate for monolithic fabrication which is composed of two layers of carbon fiber,two layers of acrylic adhesive and a polyimide *** measured output force(15.97 mN)of each leg is enough to carry half of the robot’s weight,which is necessary for the robot to move *** has been proven that the robot can successfully perform forward and turning *** to the microrobot fabricated with discrete components,the monolithically fabricated microrobot is more capable of maintaining the original direction of locomotion when driven by a forward signal and has a greater speed,whose maximum speed is 25.05 cm/s.

关键词： Insect-like Crawling microrobot Piezoelectric drive Parallel mechanism Monolithic fabrication

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

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microsystems & nanoengineering 2024年第3期10卷 169-180页

作者： Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu Ningbo Institute of Northwestern Polytechnical University College of Mechanical EngineeringNorthwestern Polytechnical University710072 Xi’anChina Key Laboratory of micro/nano systems for Aerospace(Ministry of Education) Shaanxi Province Key Laboratory of Micro and Nanoelectromechanical SystemsNorthwestern Polytechnical University710072 Xi’anChina

As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many ***,two crucial challenges exist in the fabrication of such devices:the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual *** solve these issues,an innovative processing method assisted by temporary anchors is *** approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon ***,these temporary anchors are strategically placed within the primary etching areas,enabling easy removal without additional processing *** a result,we successfully achieved wafer-level,high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%.Demonstrating superior capabilities to those of original MMAs,our enhanced version boasts a total of 60 linear micromirror elements,each featuring a length-to-width ratio of 52.6,and the entire optical aperture measures 5 mm×6 *** linear MMA exhibits an optical deflection angle of 20.4°at 110 Vdc while maintaining exceptional deflection flatness and *** study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields,and the proposed MMA is promising as a replacement for digital micromirror devices(DMDs,by TI Corp.)in fields such as spectral imaging and optical communication.

关键词： mirror exceptional anodic

A strong physical unclonable function with machine learning immunity for Internet of Things application

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Science China(Information Sciences) 2024年第1期67卷 271-283页

作者： Pengpeng REN Yongkang XUE Linglin JING Lining ZHANG Runsheng WANG Zhigang JI National Key Laboratory of Science and Technology on micro/nano Fabrication Shanghai Jiao Tong University department of micro/nano Electronics Shanghai Jiao Tong University School of Electronic and Computer engineering Peking University School of Integrated Circuits Peking University

The physical unclonable functions(PUFs) are novel cryptographic primitives in modern hardware security *** with traditional alternatives based on digital keys and non-volatile memory(NVM),the PUF system shows great unclonability,high efficiency,and physical attack ***,the conventional PUF design suffers from weak machine learning immunity,high storage overhead,and unreliability,making it difficult to implement in the Internet of Things(Io T) and edge computing *** paper presents a new PUF design that could solve the proposed *** utilizing the emission probability of traps commonly found in nano-scaled transistors,a model-based PUF system with strong machine learning resistance could be *** PUF design,called Prob-PUF,needs fewer challengeresponse pairs(CRPs) space and reveals superior resistance to modeling attacks due to the mixture of stable/random bits in its output ***,the Prob-PUF system could reach a high level of uniqueness and robustness,making it a potential candidate for future cryptographically secured protocols within the IoT.

关键词： physical unclonable function (PUF) electron traps authentication encryption cryptography security

The viscous strip approach to simplify the calculation of the surface acoustic wave generated streaming

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Applied Mathematics and Mechanics(English Edition) 2024年第4期45卷 711-724页

作者： F.JAZINI DORCHEH M.GHASSEMI Fuel Cells and nano systems(FCNS)Laboratory Department of Mechanical EngineeringK.N.Toosi University of TechnologyTehran 19697Iran

In recent decades,the importance of surface acoustic waves,as a biocompatible tool to integrate with microfluidics,has been proven in various medical and biological *** numerical modeling of acoustic streaming caused by surface acoustic waves in microchannels requires the effect of viscosity to be considered in the equations which complicates the *** this paper,it is shown that the major contribution of viscosity and the horizontal component of actuation is concentrated in a narrow region alongside the actuation *** the inviscid equations are considerably easier to solve,a division into the viscous and inviscid domains would alleviate the computational load *** particles'traces calculated by this approximation are excellently alongside their counterparts from the completely viscous *** is also shown that the optimum thickness for the viscous strip is about 9-fold the acoustic boundary layer thickness for various flow patterns and amplitudes of actuation.

关键词： surface acoustic wave microfluidics numerical simulation particle tracing acoustic streaming

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micro-nano-fabrication of green functional materials by multiphase microfluidics for environmental and energy applications

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Green Energy & Environment 2024年第8期9卷 1199-1219页

作者： Cheng Qi Tao Zhou Xingjiang Wu Kailang Liu Lei Li Zhou Liu Zhuo Chen Jianhong Xu Tiantian Kong Guangdong Provincial Key Laboratory of micro/nano Optomechatronics engineering College of Mechatronics and Control EngineeringShenzhen University The State Key Laboratory of Chemical engineering Department of Chemical EngineeringTsinghua University College of Chemistry and Environmental engineering Shenzhen University department of Biomedical engineering School of MedicineShenzhen University

Multiphase microfluidic has emerged as a powerful platform to produce novel materials with tailor-designed functionalities, as microfluidic fabrication provides precise controls over the size, component, and structure of resultant materials. Recently, functional materials with welldefined micro-/nanostructures fabricated by microfluidics find important applications as environmental and energy materials. This review first illustrated in detail how different structures or shapes of droplet and jet templates are formed by typical configurations of microfluidic channel networks and multiphase flow systems. Subsequently, recent progresses on several representative energy and environmental applications, such as water purification, water collecting and energy storage, were overviewed. Finally, it is envisioned that integrating microfluidics and other novel materials will play increasing important role in contributing environmental remediation and energy storage in near future.

关键词： microfluidics Multi-phase flow Droplet and microfiber Environmental remediation Energy Storage

Recent progress in MnBi2nTe3n+1 intrinsic magnetic topological insulators: crystal growth, magnetism and chemical disorder

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National Science Review 2024年第2期11卷 65-80页

作者： Chaowei Hu Tiema Qian Ni Ni department of Physics and Astronomy and California nano systems Institute University of California-Los Angeles

The search for magnetic topological materials has been at the forefront of condensed matter research for their potential to host exotic states such as axion insulators, magnetic Weyl semimetals, Chern insulators,etc. To date, the MnBi2nTe3n+1family is the only group of materials showcasing van der Waals-layered structures, intrinsic magnetism and non-trivial band topology without trivial bands at the Fermi level. The interplay between magnetism and band topology in this family has led to the proposal of various topological phenomena, including the quantum anomalous Hall effect, quantum spin Hall effect and quantum magnetoelectric effect. Among these, the quantum anomalous Hall effect has been experimentally observed at record-high temperatures, highlighting the unprecedented potential of this family of materials in fundamental science and technological innovation. In this paper, we provide a comprehensive review of the research progress in this intrinsic magnetic topological insulator family, with a focus on single-crystal growth, characterization of chemical disorder, manipulation of magnetism through chemical substitution and external pressure, and important questions that remain to be conclusively answered.

关键词： MnBi2Te4 magnetic topological insulator magnetism tuning antiferromagnetism ferromagnetism pressure chemical doping

Highly adaptive and broadband triboelectric energy harvester with stretching silicone rubber strip for variable harmonic frequency vibration

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nano Research 2024年第5期17卷 4089-4099页

作者： Taili Du Dianlong Shen Ziyue Xi Hongyong Yu Fangyang Dong Cong Zhao Meixian Zhu Yongjiu Zou Peiting Sun Minyi Xu Dalian Key Laboratory of Marine micro/nano Energy and Self-powered systems Marine Engineering CollegeDalian Maritime UniversityDalian 116026China Collaborative Innovation Research Institute of Autonomous Ship Dalian Maritime UniversityDalian 116026China

An enormous number of wireless sensing nodes(WSNs)are of great significance for the Internet of Things(IoT).It is tremendously prospective to realize the in-situ power supply of WSNs by harvesting unutilized mechanical vibration energy.A harmonic silicone rubber triboelectric nanogenerator(HSR-TENG)is developed focusing on ubiquitous constant working frequency *** unique design of the strip serving as a flexible resonator realizes both soft contact and high and broadband *** significant factors influencing the 1^(st)-order vibration mode of the strip are developed for realizing the harmonic frequency adaptation to external *** surface treatment of the strip improves the output performance of HSR-TENG by 49.1%as well as eliminates the adhesion *** HSR-TENG is able to achieve a voltage output bandwidth of 19 Hz under a vibration strength of 3.0,showing its broadband *** peak power density of 153.9 W/m^(3)is achieved and 12×0.5 W light-emitting diodes(LEDs)are successfully illuminated by the *** can continuously power a temperature sensor by harvesting the actual compressor vibration *** brief,the HSR-TENG provides a promising way for constant frequency vibration energy harvesting,so as to achieve in-situ power supply for the WSNs in the vicinity.

关键词： vibration energy harvesting triboelectric nanogenerator flexible silicone rubber strip harmonic vibration broadband