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Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

Microsystems & Nanoengineering 2024年第1期10卷 267-275页

作者： Roberto Pezone Sebastian Anzinger Gabriele Baglioni Hutomo Suryo Wasisto Pasqualina M.Sarro Peter G.Steeneken Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Infineon Technologies AG Am Campeon 1-15Neubiberg 85579Germany Kavli Institue of Nanoscience Department of Quantum NanoscienceDelft University of TechnologyDelftthe Netherlands Department of Precision and Microsystems Engineering(PME) Delft University of TechnologyDelftThe Netherlands

Since the performance of micro-electro-mechanical system(MEMS)-based microphones is approaching fundamental physical,design,and material limits,it has become challenging to improve *** works have demonstrated graphene’s suitability as a microphone *** potential for achieving smaller,more sensitive,and scalable onchip MEMS microphones is yet to be *** address large graphene sizes,graphene-polymer heterostructures have been proposed,but they compromise performance due to added polymer mass and *** work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R=220-320μm,thickness of 7 nm multi-layer graphene,that is suspended over a back-plate with a residual gap of 5μ*** microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the *** designs,all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive *** devices show high mechanical compliances C_(m)=0.081-1.07μmPa^(−1)(10-100×higher than the silicon reported in the state-of-the-art diaphragms)and pull-in voltages in the range of 2-9.5 *** addition,to validate the proof of concept,we have electrically characterized the graphene microphone when subjected to sound *** estimated sensitivity of S_(1kHz)=24.3-321 mV Pa^(−1)for a V_(bias)=1.5 V was determined,which is 1.9-25.5×higher than of state-of-the-art microphone devices while having a~9×smaller area.

关键词： transfer plate approaching

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Integrated CO_(2)capture and reduction catalysis:Role ofγ-Al_(2)O_(3)support,unique state of potassium and synergy with copper

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Journal of Environmental Sciences 2024年第6期140卷 113-122页

作者： Donato Pinto Stefano Minorello Zhouping Zhou Atsushi Urakawa Catalysis Engineering Department of Chemical EngineeringDelft University of TechnologyDelft2629HZNetherlands

Carbon dioxide capture and reduction(CCR)process emerges as an efficient catalytic strategy for CO_(2)capture and conversion to valuable chemicals.K-promoted Cu/Al_(2)O_(3)catalysts exhibited promising CO_(2)capture efficiency and highly selective conversion to syngas(CO+H_(2)).The dynamic nature of the Cu-K system at reaction conditions complicates the identification of the catalytically active phase and surface *** present work aims at more precise understanding of the roles of the potassium and copper and the contribution of the metal oxide ***γ-Al_(2)O_(3)guarantees high dispersion and destabilisation of the potassium phase,potassium and copper act synergistically to remove CO_(2)from diluted streams and promote fast regeneration of the active phase for CO_(2)capture releasing CO while passing H_(2).A temperature of 350℃is found necessary to activate H_(2)dissociation and generate the active sites for CO_(2)*** effects of synthesis parameters on the CCR activity are also described by combination of ex-situ characterisation of the materials and catalytic testing.

关键词： Carbon dioxide Carbon capture and utilisation CO_(2)capture and reduction Solid CO_(2)sorbents Heterogeneous catalysis Potassium Copper catalysts Aluminium oxide

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A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material

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Microsystems & Nanoengineering 2024年第2期10卷 219-230页

作者： Jiarui Mo Shreyas Shankar Roberto Pezone Guoqi Zhang Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands

Silicon carbide(SiC)is recognized as an excellent material for microelectromechanical systems(MEMS),especially those operating in challenging environments,such as high temperature,high radiation,and corrosive ***,SiC bulk micromachining is still a challenge,which hinders the development of complex SiC *** address this problem,we present the use of a carbon nanotube(CNT)array coated with amorphous SiC(a-SiC)as an alternative composite material to enable high aspect ratio(HAR)surface *** using a prepatterned catalyst layer,a HAR CNT array can be grown as a structural template and then densified by uniformly filling the CNT bundle with LPCVD *** electrical properties of the resulting SiC-CNT composite were characterized,and the results indicated that the electrical resistivity was dominated by the *** demonstrate the use of this composite in MEMS applications,a capacitive accelerometer was designed,fabricated,and *** fabrication results showed that the composite is fully compatible with the manufacturing of surface micromachining *** Young’s modulus of the composite was extracted from the measured spring constant,and the results show a great improvement in the mechanical properties of the CNTs after coating with *** accelerometer was electrically characterized,and its functionality was confirmed using a mechanical shaker.

关键词： composite surface electrical

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Organochlorides Mediate Oxidation Reactions Induced by Low Dose Ionizing Radiation

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CCS Chemistry 2024年第7期6卷 1712-1720页

作者： Juncheng Liu Tobias G.Brevé Bing Xu Peter-Leon Hagedoorn Antonia G.Denkova Rienk Eelkema Department of Radiation Science and Technology Delft University of Technology2629 JB Delft Department of Chemical Engineering Delft University of Technology2629 HZ Delft Department of Biotechnology Delft University of Technology2629 HZ Delft

The controlled release of drugs using local ionizing radiation presents a promising approach for targeted cancer treatment,particularly when applied in concurrent *** these approaches,radiation-generated reactive species often play an important ***,the reactive species that can be used to trigger release have low yield and lack ***,we demonstrate the generation of highly oxidative species when aqueous solutions containing low concentrations of organochlorides(such as chloroform)are irradiated with ionizing radiation at therapeutically relevant *** reactive species were identified as peroxyl radicals,which formed in a reaction cascade between organochlorides and aqueous *** employed stilbene-based probes to investigate the oxidation process,showing double bond oxidation and *** translate this reactivity into a radiation-sensitive material,we synthesized a micelle-forming amphiphilic block copolymer that has stilbene as the linker between two *** exposure to ionizing radiation,the oxidation of stilbene led to the cleavage of the polymer,which induces the dissociation of the block-copolymer micelles and the release of loaded drugs.

关键词： drug delivery micelles radiation chemistry reactive oxygen species ionizing radiation reaction mechanisms

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Parametric investigation of railway fastenings into the formation and mitigation of short pitch corrugation

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Railway Engineering Science 2024年第3期32卷 286-306页

作者： Pan Zhang Shaoguang Li Rolf Dollevoet Zili Li Section of Railway Engineering Delft University of TechnologyStevinweg 12628 CN Delftthe Netherlands

Short pitch corrugation has been a problem for railways worldwide over one *** this paper,a parametric investigation of fastenings is conducted to understand the corrugation formation mechanism and gain insights into corrugation mitigation.A three-dimensional finite element vehicle-track dynamic interaction model is employed,which considers the coupling between the structural dynamics and the contact mechanics,while the damage mechanism is assumed to be differential *** fastening models with different configurations,boundary conditions,and parameters of stiffness and damping are built up and *** models may represent different service stages of fastenings in the ***,the effect of train speeds on corrugation features is *** results indicate:(1)Fastening parameters and modelling play an important role in corrugation formation.(2)The fastening longitudinal constraint to the rail is the major factor that determines the corrugation *** fastening vertical and lateral constraints influence corrugation features in terms of spatial distribution and wavelength components.(3)The strengthening of fastening constraints in the longitudinal dimension helps to mitigate ***,the inner fastening constraint in the lateral direction is necessary for corrugation alleviation.(4)The increase in fastening longitudinal stiffness and damping can reduce the vibration amplitudes of longitudinal compression modes and thus reduce the track corrugation *** simulation in this work can well explain the field corrugation in terms of the occurrence possibility and major wavelength *** can also explain the field data with respect to the small variation between the corrugation wavelength and train speed,which is caused by frequency selection and jump between rail longitudinal compression modes.

关键词： Short pitch corrugation Fastening modelling and parameters Corrugation formation and mitigation Rail longitudinal compression modes Finite element vehicle-track interaction model

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Interview with optical scientist and engineer Joseph Braat

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Advanced Photonics 2024年第3期6卷 7-12页

作者： Yifeng Shao delft University of Technology DelftThe Netherlands

Joseph Braat(professor emeritus TU delft and former research fellow at Philips Research)received the 2019 Holst Memorial Lecture Award for his important contributions in to diffractionlimited optical imaging and *** c... 详细信息

关键词： TU optical merit

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Material point method simulation of hydro-mechanical behaviour in twophase porous geomaterials: A state-of-the-art review

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Journal of Rock Mechanics and Geotechnical Engineering 2024年第6期16卷 2341-2350页

作者： Xiangcou Zheng Shuying Wang Feng Yang Junsheng Yang School of Civil Engineering Central South UniversityChangsha410075China Geo-Engineering Section Faculty of Civil Engineering and GeosciencesDelft University of TechnologyDelftthe Netherlands

The material point method(MPM)has been gaining increasing popularity as an appropriate approach to the solution of coupled hydro-mechanical problems involving large *** this paper,we survey the current state-of-the-art in the MPM simulation of hydro-mechanical behaviour in two-phase porous *** review covers the recent advances and developments in the MPM and their extensions to capture the coupled hydro-mechanical problems involving large *** focus of this review is aiming at providing a clear picture of what has or has not been developed or implemented for simulating two-phase coupled large deformation problems,which will provide some direct reference for both practitioners and researchers.

关键词： Coupled problems Hydro-mechanical behaviour Large deformation Material Point Method(MPM)

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Vibration transfer from underground train to multi-story building:Modelling and validation with in-situ test data

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Underground Space 2024年第6期19卷 301-316页

作者： Li Wang Xin Gao Caiyou Zhao Ping Wang Zili Li Section of Railway Engineering Delft University of TechnologyStevinweg 12628CN DelftThe Netherlands Key Laboratory of High-speed Railway Engineering(Southwest Jiaotong University) Ministry of EducationChengdu 610031China

Excessive underground train-induced vibration becomes a serious environmental problem in *** investigate the vibration transfer from an underground train to a building nearby,an explicit-integration time-domain,three-dimensional finite element model is *** underground train,track,tunnel,soil layers and a typical multi-story building nearby are all fully coupled in this *** complex geometries involving the track components and the building are all modelled in detail,which makes the simulation of vibration transfer more realistic from the underground train to the *** model is validated with in-situ tests data and good agreements have been achieved between the numerical results and the experimental results both in time domain and frequency *** proposed model is applied to investigate the vibration transfer along the floors in the building and the influences of the soil stiffness on the vibration characteristics of the track-tunnel-soil-building *** is found that the building vibration induced by an underground train is dominant at the frequency determined by the P2 resonance and influenced by the vibration modes of the *** vertical vibration in the building decreases in a fluctuant pattern from the foundation to the top floor due to loss of high frequency contents and local *** vibration levels in different rooms at a same floor can be different due to the different local stiffness.A room with larger space thus smaller local stiffness usually has higher vibration *** soil layers make the tunnel lining and the building have more low frequency *** influence of the soil stiffness on the amplification scale along the floors of the building is found to be nonlinear and frequency-dependent,which needs to be further investigated.

关键词： Railway vibration Underground train Multi-story building vibration Finite element model Dynamic interaction

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Photoluminescence and ratiometric thermo-response of Eu^(2+)and Eu^(3+)in BaAl_(2)B_(2)O_(7):Eu^(2+),Eu^(3+)phosphor materials

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Journal of Rare Earths 2024年第7期42卷 1240-1249,I0002页

作者： Ziyao Wang Haitao Fu Xiufeng Zhan Bo Tong Guofeng Ma H.T.(Bert)Hintzen Institute of Innovative Science and Technology Shenyang UniversityShenyang110044China College of Mechanical Engineering Shenyang UniversityShenyang110044China Faculty of Applied Sciences Delft University of Technology2629 JBDelftthe Netherlands

A novel Eu^(2+)-Eu^(3+)co-activated ratiometric thermo-sensitive phosphor was developed and synthesized by solid-state *** valence state of Eu,photoluminescence and thermo-sensitive performance of the phosphor prepared either in ambient air or carbothermally were investigated and *** phosphor shows high sensitivity(Sa=0.0173 K^(-1),S_(r)=0.461%/K)and superior signal discriminability(Δν∼10380 cm^(−1)).The thermo-sensitive performance is subject to the dual effects of different thermo-responses by Eu^(2+)versus Eu^(3+)combined with energy transfer from Eu^(2+)to Eu^(3+),so that the sensitivity of the phosphor in the temperature range presents a non-monotonic *** development of the BaAl_(2)B_(2)O_(7):Eu^(2+),Eu^(3+)phosphor is not only expected to be relevant for application in the field of temperature sensing,but also of reference significance for improving the sensitivity by means of energy transfer between co-activator ions over a wider temperature range of Eu^(2+)-Eu^(3+)co-activated ratiometric thermo-sensitive phosphors.

关键词： Photoluminescence Ratiometric thermo-response Phosphor Eu^(2+)/Eu^(3+) Rare earths

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Residence time distribution of wood chips in a semi-industrial multiple hearth furnace using RFID tracers Author links open overlay panel

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Particuology 2024年第8期91卷 268-279页

作者： Elie Lacombe Muriel Marchand Capucine Dupont Denis Maréchal Thierry Melkior Univ Grenoble Alpes CEALITENDTCHLaboratoire Réacteurs et ProcédésF-38000GrenobleFrance IHE delft Department of Water Supply Sanitation and Environmental EngineeringDelftthe Netherlands John Cockerill SeraingBelgium

In continuous biomass torrefaction plants,the products'yields,composition and homogeneity highly depend on the residence time of particles.A characterization of particle residence time distribution(RTD)was therefore carried out in an industrial-scale multiple hearth furnace on poplar wood chips using radio frequency identification *** effects of operating conditions,namely,mass flow rate of biomass,shaft speed of the rabbling system and interdental length on the RTD were *** increase of shaft speed and mass flow rate reduces particles’mean residence *** the length between two successive teeth also increases the bed *** biomass accumulation(also called“bulldozing”)was observed during several *** phenomenon is favored by a high mass flow rate of resources,a small interdental length between the teeth and a low shaft *** measurements were compared to the axial dispersion *** all tests,the Peclet number is ranging between 20 and 62,indicating that the multiple hearth furnace cannot be modelled as an ideal plug flow reactor.

关键词： Biomass Multiple hearth furnace Residence time distribution RFID

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