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Advanced manufacturing of dielectric metadevices

Photonics Insights 2024年第2期3卷 31-70页

作者： Wenhong Yang Junxiao Zhou Din Ping Tsai Shumin Xiao Key Lab of micro-nano Optoelectronic Information System Ministry of Industry and Information TechnologyGuangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic SystemsHarbin Institute of TechnologyShenzhenChina Department of Electrical Engineering City University of Hong KongHong KongChina The State Key Laboratory of Terahertz and Millimeter Waves City University of Hong KongHong KongChina centre for Biosystems Neuroscienceand NanotechnologyCity University of Hong KongHong KongChina Pengcheng Laboratory ShenzhenChina

Metasurfaces,composed of two-dimensional nanostructures,exhibit remarkable capabilities in shaping wavefronts,encompassing phase,amplitude,and *** unique proficiency heralds a transformative paradigm shift in the domain of next-generation optics and photonics,culminating in the development of flat and ultrathin optical *** noteworthy is the all-dielectric-based metasurface,leveraging materials such as titanium dioxide,silicon,gallium arsenide,and silicon nitride,which finds extensive application in the design and implementation of high-performance optical devices,owing to its notable advantages,including a high refractive index,low ohmic loss,and ***,the remarkable growth in nanofabrication technologies allows for the exploration of new methods in metasurface fabrication,especially through wafer-scale nanofabrication technologies,thereby facilitating the realization of commercial applications for *** review provides a comprehensive overview of the latest advancements in state-of-the-art fabrication technologies in dielectric metasurface *** technologies,including standard nanolithography[e.g.,electron beam lithography(EBL)and focused ion beam(FIB)lithography],advanced nanolithography(e.g.,grayscale and scanning probe lithography),and large-scale nanolithography[e.g.,nanoimprint and deep ultraviolet(DUV)lithography],are utilized to fabricate highresolution,high-aspect-ratio,flexible,multilayer,slanted,and wafer-scale all-dielectric metasurfaces with intricate ***,we conclude with a perspective on current cutting-edge nanofabrication technologies.

关键词： dielectric meta-devices meta-optics metasurface nanofabrication nanotechnology nanophotonics large/waferscale nanofabrication

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microscopic growth mechanism and edge states of monolayer 1T'-MoTe_(2)

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Chinese Physics B 2024年第4期33卷 605-611页

作者：赵海鹏刘隐杨胜国林陈昉陈明星 Kai Braun 罗心仪李思宇潘安练王笑 Key Laboratory for micro-nano Physics and Technology of Hunan Province School of Physics and ElectronicsCollege of Materials Science and EngineeringHunan UniversityChangsha 410082China Key Laboratory of Low-Dimensional Quantum Structures and Quantum Control of Ministry of Education Synergetic Innovation Centre for Quantum Effects and Applications (SICQEA) Hunan Normal UniversityChangsha 410081China State Key Laboratory of Powder Metallurgy Central South UniversityChangsha 410083China Institute of Physical and Theoretical Chemistry and LISA+ University of TubingenAuf der Morgenstelle 1872076 TubingenGermany

Transition metal ditellurides(TMTDs)have versatile physical properties,including non-trivial topology,Weyl semimetal states and unique spin *** growth of high-quality and large-scale monolayer TMTDs with preferred crystal phases is crucial for their ***,we demonstrate the epitaxial growth of 1T'-MoTe_(2) on Au(111)and graphitized silicon carbide(Gr/SiC)by molecular beam epitaxy(MBE).We investigate the morphology of the grown1T'-MoTe_(2) at the atomic level by scanning tunnelling microscopy(STM)and reveal the corresponding microscopic growth *** is found that the unique ordered Te structures preferentially deposited on Au(111)regulate the growth of monolayer single crystal 1T'-MoTe_(2),while the Mo clusters were preferentially deposited on the Gr/SiC substrate,which impedes the ordered growth of monolayer MoTe_(2).We confirm that the size of single crystal 1T'-MoTe_(2) grown on Au(111)is nearly two orders of magnitude larger than that on Gr/*** scanning tunnelling spectroscopy(STS),we observe that the STS spectrum of the monolayer 1T'-MoTe_(2) nano-island at the edge is different from that at the interior,which exhibits enhanced conductivity.

关键词： transition metal ditellurides 1T'-MoTe_(2) microscopic growth mechanism scanning tunneling microscopy/spectroscopy(STM/S)

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Femtosecond laser 3D printed micro objective lens for ultrathin fiber endoscope

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Fundamental Research 2024年第1期4卷 123-130页

作者： Bozhe Li Changrui Liao Zhihao Cai Jie Zhou Cong Zhao Liqing Jing Jiaqi Wang Cong Xiong Lei Xu Ying Wang Yiping Wang Key Laboratory of Optoelectronic Devices and systems of Ministry of Education/Guangdong Province College of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China Shenzhen Key Laboratory of Photonic Devices and Sensing systems for Internet of Things Guangdong and Hong Kong Joint Research Centre for Optical Fibre SensorsShenzhen UniversityShenzhen 518060China School of Electronic and Communication Engineering Shenzhen Polytechnic UniversityShenzhen 518055China

The most important optical component in an optical fiber endoscope is its objective *** achieve a high imaging performance level,the development of an ultra-compact objective lens is thus the key to an ultra-thin optical fiber *** this work,we use femtosecond laser 3D printing to develop a series of micro objective lenses with different optical *** imaging resolution and field-of-view performances of these printed micro objective lenses are investigated via both simulations and *** the first time,multiple micro objective lenses with different fields of view are printed on the end face of a single imaging optical fiber,thus realizing the perfect integration of an optical fiber and objective *** work demonstrates the considerable potential of femtosecond laser 3D printing in the fabrication of micro-optical systems and provides a reliable solution for the development of an ultrathin fiber endoscope.

关键词： Femtosecond laser Two-photon polymerization 3D printing micro objective lens Fiber endoscope

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Tailoring Classical Conditioning Behavior in TiO_(2) nanowires:ZnO QDs-Based Optoelectronic Memristors for Neuromorphic Hardware

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nano-micro Letters 2024年第7期16卷 265-280页

作者： Wenxiao Wang Yaqi Wang Feifei Yin Hongsen Niu Young-Kee Shin Yang Li Eun-Seong Kim Nam-Young Kim School of Information Science and Engineering University of JinanJinan 250022People’s Republic of China RFIC centre NDAC CentreKwangwoon UniversityNowon-guSeoul 139-701South Korea Department of Electronics Engineering Kwangwoon UniversityNowon-GuSeoul 139-701South Korea School of microelectronics Shandong UniversityJinan 250101People’s Republic of China Department of Molecular medicine and Biopharmaceutical Sciences Seoul National UniversitySeoul 08826South Korea

Neuromorphic hardware equipped with associative learn-ing capabilities presents fascinating applications in the next generation of artificial ***,research into synaptic devices exhibiting complex associative learning behaviors is still ***,an optoelec-tronic memristor based on Ag/TiO_(2) nanowires:ZnO Quantum dots/FTO was proposed and constructed to emulate the biological associative learning *** implementation of synaptic behaviors,including long and short-term plasticity,and learning-forgetting-relearning behaviors,were achieved in the device through the application of light and electrical *** the optoelectronic co-modulated characteristics,a simulation of neuromorphic computing was conducted,resulting in a handwriting digit recognition accuracy of 88.9%.Furthermore,a 3×7 memristor array was constructed,confirming its application in artificial visual *** importantly,complex biological associative learning behaviors were emulated by mapping the light and electrical stimuli into conditioned and unconditioned stimuli,*** training through associative pairs,reflexes could be triggered solely using light ***-sively,under specific optoelectronic signal applications,the four features of classical conditioning,namely acquisition,extinction,recovery,and generalization,were elegantly *** work provides an optoelectronic memristor with associative behavior capabilities,offering a pathway for advancing brain-machine interfaces,autonomous robots,and machine self-learning in the future.

关键词： Artificial intelligence Classical conditioning Neuromorphic computing Artificial visual memory Optoelectronic memristors ZnO Quantum dots

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Heterogeneous integration of 2D materials on Si charge-coupled devices as optical memory

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Science China(Information Sciences) 2024年第6期67卷 190-197页

作者： Zheng BIAN Feng TIAN Zongwen LI Xiangwei SU Tianjiao ZHANG Jialei MIAO Bin YU Yang XU Yuda ZHAO College of Integrated Circuits Hangzhou Global Scientific and Technological Innovation CentreZhejiang University

Optical memory integrates the function of optical sensing in memory devices, remarkably promoting the interconnection between sensory and memory terminals. Silicon charge-coupled photodetectors and floating gate memory have been widely used in imaging and storage technologies, respectively. However,the heterogeneous integration of the two devices requires technological innovation and complex electrical connections. In this work, we adopt a three-dimensional layer stacking method to design a novel optical memory device. On the top of Si charge-coupled photodetectors, we successively deposit two-dimensional graphene,hexagonal boron nitride, and molybdenum disulfide as a floating gate layer, a tunneling layer, and a readout layer, respectively. By applying a gate bias on lightly doped Si, a deep depletion layer is formed with a high voltage potential drop. Under dark conditions, the depletion layer cannot be filled, and the electric field across the h-BN tunnel barrier is relatively small. Under light irradiation, the deep depletion layer is gradually filled, and the h-BN tunneling layer withstands the increasing electric field, resulting in charge storage in the floating gate layer. Based on this mechanism, the device exhibits a gate voltage-dependent operation mode, including an integrated optical sensing-memory mode and an electrically driven storage mode. Under moderate gate voltage, the device can effectively detect the optical information with varied intensity and store the optical information in the floating gate, displaying optically controlled memory characteristics. Our work demonstrates a compact device structure for optical memory and displays excellent optically controlled memory performance, which can be applied in artificial vision systems.

关键词： heterogeneous integration charge-coupled device floating gate optical memory molybdenum disulfide lightly doped silicon

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Single crystal-single crystal bonding of langasite exhibited high strength of 23.28 MPa

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Journal of Materials Science & Technology 2023年第29期160卷 139-147页

作者： Guangyao Pei Binghe Ma Tao Ye Zhonggang Zhang Keli Zhao Jinjun Deng Seeram Ramakrishna Jian Luo Ministry of Education Key Laboratory of micro/nano systems for Aerospace Northwestern Polytechnical UniversityXi’an 710072China centre for nanofibers and nanotechnology National University of Singapore117576Singapore

Langasite(LGS,La_(3)Ga_(5)SiO_(14))is a promising material in high-temperature piezoelectric devices due to its excellent thermal stability,piezoelectricity,and electrical property.A major challenge in the development of LGS-based devices is to form high-strength bonding of the brittle ***,we report that the single crystal-single crystal(dual-SC)bonding of LGS is realized through thermal activation under a low com-pression of 50 kPa for the first time.A record bonding strength of 23.28 MPa is achieved within the dual-SC bonded LGS/LGS structure(with a high bonding ratio exceeding 93%),which is 5 times higher than that of the recent reported LGS/LGS bonding structure(in which a relatively fragile amorphous interface layer is formed between the two LGS samples).The smooth and void-free dual-SC bonding interface of LGS is verified via the cross-sectional transmission electron microscopy(TEM)observations.

关键词： Thermal activation Single crystal-single crystal bonding Langasite High-strength Low compression

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Julolidine functionalized benzimidazoline-doped fullerene derivatives for efficient and stable perovskite solar cells

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Interdisciplinary Materials 2024年第3期3卷 369-379页

作者： Yanqing Zhu Chenglong Li JiaHui Chen Yuxi Zhang Jianfeng Lu Min Hu Wangnan Li Fuzhi Huang Yi-Bing Cheng Hyesung Park Shengqiang Xiao State Key Laboratory of Silicate Materials for Architectures Wuhan University of TechnologyWuhanChina State Key Laboratory of Advanced Technology for Materials Synthesis and Processing Wuhan University of TechnologyWuhanChina School of Electronic and Electrical Engineering Hubei Province Engineering Research Centre for Intelligent Micro-Nano Medical Equipment and Key TechnologiesWuhan Textile UniversityWuhanChina Hubei Key Laboratory of Low Dimensional Optoelectronic Material and Devices Hubei University of Arts and ScienceXiangyangHubeiChina KU-KIST Graduate School of Converging Science and Technology Korea UniversitySeoulRepublic of Korea Department of Integrative Energy Engineering Korea UniversitySeoulRepublic of Korea Hubei Key Laboratory of Fuel Cell WuhanChina

Fullerene derivatives are highly attractive materials in solar cells,organic thermoelectrics,and other ***,the intrinsic low electron mobility and electrical conductivity restrict their potential device performance,such as perovskite solar cells(PSCs).Herein,we successfully enhanced the electric properties and morphology of phenyl-C61-butyric acid methyl ester(PCBM)by n-doping it with a benzimidazoline derivative,9-(1,3-dimethyl-2,3-dihydro-1H-benzoimidazol-2-yl)-julolidine(JLBI-H)via a solution *** found the n-doping can not only improve the conductivity and optimize the band alignment but also enable the PCBM to have a constantly strong charge extraction ability in a wide temperature from 173 to 373 K,which guarantees a stable photovoltaic performance of the corresponding PSCs under a wide range of operating *** the JLBI-H-doped PCBM,we improved the efficiency from 17.9%to 19.8%,along with enhanced stability of the nonencapsulated devices following the aging protocol of ISOS-D-1.

关键词： charge extraction electron mobility n-doping PSCs wide operation temperature

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In vitro evaluation of artificial joints: a comprehensive review

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Advances in Manufacturing 2019年第1期7卷 1-14页

作者： Gang Shen Ju-Fan Zhang Feng-Zhou Fang centre of micro/nano Manufacturing Technology (MNMTDublin) University College Dublin Dublin Ireland State Key Laboratory of Precision Measuring Technology and Instruments Centre of Micro/Nano Manufacturing Technology (MNMT) Tianjin University Tianjin 300072 People's Republic of China

Development of artificial joints is a great progress for joint replacement operations of human being, but the short longevity of prostheses has concerned both industries and researchers since the advent of modem implants. Thus, continuous improvements have been made alongside the clinical applications. The methodologies to inspect the potential properties of new designs have also seen many advances. The test machines have evolved from easy pin-on-disk configuration to the modem joint simulator. Besides, various wear traces provided by testing machines are investigated greatly, and multi-directional files are recommended as motion profiles for in vitro testing. The typical testing parameters, like sliding speed or loading profile, are discussed in this article, and their working mechanisms are described in detail. Meanwhile, the calf or bovine serum has been regarded as the gold standard for testing lubricant, and the future trend of fluid will be focused on investigating the effects of lubricant composites on the tribological properties. Hard particles and proteins are discussed as well, and their effects on the wear mechanisms are the focus. Finally, various approaches to measure the wear rate, wear factor and the thickness of lubricant film are presented, and suggestions are given for the development in future.

关键词： Artificial joint Methodology Testing parameter Wear rate

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Investigation of electropolishing characteristics of tungsten in ecofriendly sodium hydroxide aqueous solution

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Advances in Manufacturing 2020年第3期8卷 265-278页

作者： Wei Han Feng-Zhou Fang centre of micro/nano manufacturing Technology(MNMTDublin) University College DublinDublin 4Ireland State Key Laboratory of Precision Measuring Technology and Instruments Centre of Micro/Nano Manufacturing Technology(MNMT)Tianjin UniversityTianjin 300072People’s Republic of China

In this study,an eco-friendly electrolyte for electropolishing tungsten and the minimum material removal depth on the electropolished tungsten surface are investigated using an electrochemical etching *** a concentrated acid electrolyte,the polarization curve and current density transient are *** a NaOH electrolyte,the effects of interelectrode gap and electrolyte concentration on electropolishing are *** differences in electropolishing characteristics are compared among different electrolyte *** are etched on the electropolished tungsten surface to determine the minimum material removal depth on the tungsten *** results indicate the color effect due to a change in the thickness of the oxide film on the tungsten surface after electropolishing with a concentrated acid *** surface roughness decreases with the interelectrode gap width owing to the increased current density when using the NaOH ***,the electropolishing effect is less prominent with a significantly smaller gap because the generated bubbles are unable to escape from the narrow working gap in time.A material removal depth of less than 10 nm is achieved on the tungsten surface in an area of diameter 300 lm,using the electrochemical etching method.

关键词： Electropolishing NaOH solution Surface roughness Tungsten Etching

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Numerical study via total Lagrangian smoothed particle hydrodynamics on chip formation in micro cutting

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Advances in Manufacturing 2020年第2期8卷 144-159页

作者： Jin-Shi Wang Xiao-Dong Zhang Feng-Zhou Fang State Key Laboratory of Precision Measuring Technology and Instruments Centre of Micro/Nano Manufacturing Technology(MNMT)Tianjin UniversityTianjin 300072People's Republic of China centre of micro/nano Manufacturing Technology(MNMT-Dublin) University College DublinDublinIreland

Numerical simulation is an effective approach in studying cutting *** widely used methods for cutting simulation include finite element analysis and molecular ***,there exist some intrinsic shortcomings when using a mesh-based formulation,and the capable scale of molecular dynamics is extremely *** contrast,smoothed particle hydrodynamics(SPH)is a candidate to combine the advantages of *** is a particle method which is suitable for simulating the large deformation process,and is formulated based on continuum mechanics so that large scale problems can be handled in *** a result,SPH has also become a main way for the cutting *** some issues arise while using conventional SPH to handle solid materials,the total Lagrangian smoothed particle hydrodynamics(TLSPH)is *** instabilities would still occur during the cutting,which is a critical issue to *** paper studies the effects of TLSPH settings and cutting model parameters on the numerical instability,as well as the chip formation *** deformation,stress field and cutting forces are analyzed as *** shows that the hourglass coefficient,critical pairwise deformation and time step are three important parameters to control the stability of the simulation,and a strategy on how to adjust them is provided.

关键词： Cutting Total Lagrangian smoothed particle hydrodynamics(TLSPH) Numerical instability Chip formation

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