检索结果-南通市图书馆

Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

引用

IEEE/CAA Journal of Automatica Sinica 2025年第1期 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the center of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology the Key Laboratory of ultra-precision Intelligent instrumentation Ministry of Industry and Information Technology the State Key Laboratory of precision Electronic Manufacturing Technology and Equipment Guangdong University of Technology the center of ultraprecision optoelectronic instrument engineering Harbin Institute of Technology the Key Laboratory of ultraprecision Intelligent instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词：

来源：

同方期刊数据库评论

在线全文

同方期刊数据库

学校读者我要写书评

暂无评论

Fast generation of controllable equal-intensity four beams based on isosceles triangle multilevel phase grating realized by liquid crystal spatial light modulator

引用

Chinese Physics B 2011年第2期20卷 287-294页

作者：刘翔张健吴丽莹甘雨 Institute of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology

Liquid crystal spatial light modulator （LCSLM） realizing equal-intensity multiple beams often has some features, i.e., phase valley between two adjacent pixels, flybaek region when phase decreases immediately from 2~r to 0, and inevitable backplane curvature, which are different from those of most conventional diffractive optical elements （DOEs）, such as static DOEs. For optimal intensity uniformity, equal-intensity multi-beam generation must be considered for these artifacts. We present a tunable-grating method in which the intensity uniformity can be improved by considering the LCSLM artifacts. For instance, tuning phase modulation depth of the grating, called isosceles triangle multilevel phase grating （ITMPG）, can be used not only to improve the intensity uniformity, but also to fast steer four beams with narrow beamwidths, determined by the same effective aperture of ITMPG. Improved intensity uniformity and high relative diffraction efficiency are demonstrated through experiments with phase-only LCSLM.

关键词： liquid crystal spatial light modulator phase grating splitter

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Effect of asymmetrical transfer coefficients of a non-polarizing beam splitter on the nonlinear error of the polarization interferometer

引用

optoelectronics Letters 2010年第5期6卷 371-375页

作者：赵晨光谭久彬刘涛 center of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology

The mechanism of a non-polarizing beam splitter (NPBS) with asymmetrical transfer coefficients causing the rotation of polarization direction is explained in principle, and the measurement nonlinear error caused by NPBS is analyzed based on Jones matrix theory. Theoretical calculations show that the nonlinear error changes periodically, and the error period and peak values increase with the deviation between transmissivities of p-polarization and s-polarization states. When the transmissivity of p-polarization is 53% and that of s-polarization is 48%, the maximum error reaches 2.7 nm. The imperfection of NPBS is one of the main error sources in simultaneous phase-shifting polarization interferometer, and its influence can not be neglected in the nanoscale ultra-precision measurement.

关键词：非线性误差偏振分束器移相干涉仪极化方向非对称传热系数周期性变化超精密测量

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Assessment method of numerical integration used in measuring profile based on ultra-precise thin light beam scanning

引用

optoelectronics Letters 2009年第6期5卷 476-480页

作者：郎治国谭久彬 center of ultra-precision optoelectronic instrument Harbin Institute of Technology

In order to improve the precision of profile measurement based on ultra-precise thin light beam scanning,an assessment method that compares different numerical integration algorithms in frequency-domain is put *** compared numerical integration methods are regarded as recursive digital *** comparing their functions of frequency response in frequency-domain,the delivering role of noise with different frequencies can be analyzed directly and clearly in the process of integrating measured slope *** results show that the method of cubic spline is better than trapezoidal,Simpson and 3/8 Simpson rules.

关键词：数值积分光束扫描评估方法轮廓测量超精密文件数字滤波器积分算法

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

CdS quantum dot sensitized p-type NiO as photocathode with integrated cobaloxime in photoelectrochemical cell for water splitting

引用

Chinese Chemical Letters 2015年第1期26卷 141-144页

作者： Yong Na Bo Hu Qiu-Ling Yang Jian Liu Li Zhou Rui-Qing Fan Yu-Lin Yang Department of Chemistry Harbin Institute of Technology center of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology

CdS sensitized NiO electrode was used as the photoactive cathode in a photoelectrochemical cell for water splitting,avoiding the use of a sacrificial electron *** increment under visible light irradiation was observed after integration of[Co（dmgH）_2（4-Me-py）Cl]（1） to the photocathode,suggesting 1 could accept electrons from photoexcited CdS for water reduction and NiO could move the holes in the valence band of CdS to anode for water oxidation.

关键词： Quantum dot Photocathode Cobaloxime Photoelectrochemical cell Water splitting

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

A new damping ratio identification method based on pattern search

引用

Journal of Harbin Institute of Technology(New Series) 2010年第1期17卷 141-144页

作者：刘彦谭久彬谭志波王雷 Institute of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology

In order to improve the effectiveness of traditional time domain identification methods in identifying damping ratios, a new damping ratio identification method based on pattern search is proposed by fluctuating the reliable natural frequency obtained through traditional time domain identification methods by about 10% to build the boundary conditions, using all the initial identification results to establish the free decay response of the system, and using the pattern search method to correct the initial identification results with the residual sum of squares between the free decay response and the actually measured free-decay signal as the objective function. The proposed method deals with the actually measured free-decay signal with curve fitting and avoids enlarging the identified error caused by intermediate conversion, so it can effectively improve the identified accuracy of damping ratios. Simulations for a room-sized vibration isolation foundation show that the relative errors of analyzed three damping ratios are down to 1.05%, 1.51% and 3.7% by the proposed method from 8.42%, 5.85% and 8.5% by STD method when the noise level is 10%.

关键词： modal parameter identification damping ratio pattern search

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Double [5]carbohelicene: facile synthesis, chiroptical properties,isomerization study, and lasing application

引用

Science China Chemistry 2025年第1期 233-240页

作者： Peipei Liu Yantong Li Meng-Xiang Wu Hao Kang Xiao-Li Zhao Lin Xu Linlin Liu Xiaodong Li Junfeng Fang Zhiwei Fang Ya Cheng Hai-Bo Yang Huakang Yu Xueliang Shi State Key Laboratory of Petroleum Molecular & Process engineering Shanghai Key Laboratory of Green Chemistry and Chemical ProcessesSchool of Chemistry and Molecular Engineering East China Normal University School of Physics and optoelectronics South China University of Technology Institute of Polymer optoelectronic Materials & Devices State Key Laboratory of Luminescent Materials & Devices South China University of Technology School of Physics and Electronic Science Engineering Research Center of Nanophotonics & Advanced Instrument Ministry of EducationEast China Normal University State Key Laboratory of precision Spectroscopy School of Physics and Electronic Science East China Normal University

Double carbohelicenes have attracted considerable attention due to their aesthetic structures, distinct π-conjugation extension, inherent chirality, and intriguing optical and electronic properties. Herein, the concise de novo synthesis of a new double[5]carbohelicene 1 together with its chiroptical properties, isomerization process and lasing application is presented. 1 was synthesized by a simple protocol involving the formation of a 6,6′-bipentacene as the key intermediate. It is worth noting that1 existed as two diastereomers 1-PP/MM and 1-PM, which were successfully isolated and unambiguously confirmed by Xray crystallography. The optical resolution of the racemic 1-PP/MM was successfully achieved by chiral-phase highperformance liquid chromatography（HPLC）, and 1-PP and 1-MM were characterized by circular dichroism. Interestingly, it was found that 1-PP/MM could be completely isomerized to 1-PM upon heating, and the detailed thermodynamics and kinetics of the isomerization process were systematically investigated. 1-PM exhibited deep-red luminescence with emission maximum at 723 nm and fluorescence quantum yield as high as 32.95%. Consequently, we can showcase the lasing application of 1-PM by doping with epoxy resin to assemble a bottle microlaser spontaneously, which the lasing wavelength is 796.6 nm at a threshold of 0.8 m J cm-2. We believe that our studies, including the facile synthesis methodology, detailed isomerization studies, and lasing application, will shed some light on the design and synthesis of novel carbohelical systems with more functions.

关键词：

来源：

同方期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Design and fabrication of alumina micro reciprocating engine

引用

Journal of Harbin Institute of Technology(New Series) 2008年第6期15卷 801-804页

作者：金鹏高育龙刘楠 JIANG Kylie Institute of ultra-precision optoelectronic instrument engineering Harbin Institute of Technology School of engineering the University of Birmingham

Microengines are regarded as the potential replacements for *** at the unsatisfactory thermal property of silicon used in the combustion chambers,ceramics are chosen as the construction material in this *** fabrication process where alumina has been chosen as the microengine material is *** FEA has been carried out,and it is found that the material satisfies the stress and deformation requirements of the *** the alumina fabrication process is *** reusable polydimethylsiloxane(PDMS)moulds are produced from SU-8 resist masters,and alumina microengine parts are produced using the PDMS *** of the ceramic components show that the fabrication satisfies the design requirements.

关键词： micro reciprocating engine alumina slurry replicating process SU-8 finite element analysis (FEA) soft reusable polydimethylsiloxane (PDMS) moulds

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Finite-Time Stabilization of Linear Systems With Input Constraints by Event-Triggered Control

引用

IEEE/CAA Journal of Automatica Sinica 2022年第8期9卷 1516-1519页

作者： Kai Zhang Yang Liu Jiubin Tan Key Laboratory of ultra-precision Intelligent instrumentation Ministry of Industry and Information Technologyand also with the Center of Ultra-Precision Optoelectronic Instrument EngineeringHarbin Institute of TechnologyHarbin 150001China of Industry and Information Technology and the Center of Ultra-Precision Optoelectronic Instrument EngineeringHarbin Institute of TechnologyHarbin 150001 State Key Laboratory of Digital Manufacturing Equipment&Technology Huazhong University of Science and TechnologyWuhan 430074China

Dear editor,This letter designs the event-triggered control(ETC)to achieve finite-time stabilization(FTS)of linear systems with input *** key idea of the established algorithm is that the designed time-varying high-ga... 详细信息

关键词： mechanism stabilization letter

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Machine vision system for visual defect inspection of TFT-LCD

引用

Journal of Harbin Institute of Technology(New Series) 2007年第6期14卷 773-778页

作者：张昱张健 Institute of ultra precision Optical & Electronic instrument engineering Harbin Institute of Technology

To improve the identification for visual defect of TFF-LCD, a new machine vision system is proposed, which is superior to human eye inspection. The system respectively employs a CCD camera to capture the image of TFT-LCD panel and an image processing system to identify potential visual defects. Image pre-processing, such as average filtering and geometric correction, was performed on the captured image, and then a candidate area of defect was segmented from the background. Feature information extracted from the area of interest entered a fuzzy rule-based classifier that simulated the defect inspection of TFT-LCD undertaken by experienced technicians. Experiment results show that the machine vision system can obtain fast, objective and accurate inspection compared with subjective and inaccurate human eye inspection.

关键词： TFT-LCD machine vision image processing fuzzy rule-based classifier

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：