Effect of asymmetrical transfer coefficients of a non-polarizing beam splitter on the nonlinear error of the polarization interferometer

作     者：赵晨光 谭久彬 刘涛 

作者机构：Center of Ultra-Precision Optoelectronic Instrument Engineering Harbin Institute of Technology 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2010年第6卷第5期

页      面：371-375页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China (No. 50905048) 

主　　题：非线性误差 偏振分束器 移相干涉仪 极化方向 非对称 传热系数 周期性变化 超精密测量 

摘      要：The mechanism of a non-polarizing beam splitter (NPBS) with asymmetrical transfer coefficients causing the rotation of polarization direction is explained in principle, and the measurement nonlinear error caused by NPBS is analyzed based on Jones matrix theory. Theoretical calculations show that the nonlinear error changes periodically, and the error period and peak values increase with the deviation between transmissivities of p-polarization and s-polarization states. When the transmissivity of p-polarization is 53% and that of s-polarization is 48%, the maximum error reaches 2.7 nm. The imperfection of NPBS is one of the main error sources in simultaneous phase-shifting polarization interferometer, and its influence can not be neglected in the nanoscale ultra-precision measurement.