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多种IC设计中Cu cmp阻挡层浆料选择和去除率的控制

1998 3rd International Conference on ASIC

作者： B.COURTOIS H.DELORI J.M KARAM J.F PAILLOTIN K.TORKI cmp 46 avenue Flix Viallet 38031 GRENOBLE CEDEX FRANCE

＜正＞This paper is about the cmp Service（Circuits Multi-Projects）.cmp aims at providing Universities,Research Laboratories and Industries with the possibility to have their integrated circuits projects *** Service has started in *** customers are serviced for a CMOS double layer metal technology （DLM） 0.7μ,a CMOS double layer polysilicon/double layer metal （DLP/DLM） 1.2μ.0.8μand 0.6μ,a BiCMOS DLP/DLM 1.2μand 0.8μ,a digital GaAs 0.6μ,and a HEMT GaAs 0.2μ.Recently the 0.25μCMOS process from SGS-Thomson has been added to the *** Electro Mechanical Systems（MEMS） are also provided through standard cmp runs in CMOS DLP/DLM 1.2μ, BiCMOS DLP/DLM 1.2μand HEMT GaAs 0.2μ,using compatible front-side bulk ***,the main processes for Multi Chip Modules（MCMs） are also accessible through *** are about 40 runs per *** papec details the Service,including some basic principles,some history,the descriptive formats,etc....

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来源： cnki会议评论

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电子工业专用设备 2006年第10期35卷 14-18页

作者： Jinru Bian Matthew VanHanehem Hugh Li 高仰月（译） Rohm and Haas Electronic Materials CMP Technologies Newark DelawareU.S.A. 不详

集成电路的前缘技术是在低k介质材料上设计3个盖层的复杂结构,上面的盖层可以用TEOS(tetraethyl orthosilicate)四乙基原硅酸盐和/或氮化硅(SiN),下面的层可以在低k介质之上用氮碳化硅(SiCN),碳化硅(SiC),或CDO(carbon dopped oxide)直... 详细信息

集成电路的前缘技术是在低k介质材料上设计3个盖层的复杂结构,上面的盖层可以用TEOS(tetraethyl orthosilicate)四乙基原硅酸盐和/或氮化硅(SiN),下面的层可以在低k介质之上用氮碳化硅(SiCN),碳化硅(SiC),或CDO(carbon dopped oxide)直接生成。因此,对于适合铜cmp的选择性浆料,除了具备的高去除率之外,须是在去除上面盖层后能够在下面的介质层表面上终止的浆料。Rohm和Haas电子材料已经开发出能够有效地去除TaN,TEPS,SiN,CDO和/或SiCN,或这些材料的任一化合物的一系列浆料,或者是能够在TEOS、SiN、CDO、SiCN和SiC的任何一种或两种薄膜表面终止,这完全取决于这些特殊浆料的配方设计,通过一两种添加剂控制去除率达到要求。系列浆料中的大多数浆料研磨剂的含量较低,在低压力的情况下具有良好的去除率,为了适应多种行业的需求,高低pH值均可使用。大多数浆料是可调的,用一种或两种添加剂来控制薄膜的去除率。描述和讨论了这些浆料的改良原理。

关键词：化学机械抛光去除率阻挡层浆料

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Integrating flexible electronics for pulsed electric field delivery in a vascularized 3D glioblastoma model

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npj Flexible Electronics 2021年第1期5卷 150-158页

作者： Marie C.Lefevre Gerwin Dijk Attila Kaszas Martin Baca David Moreau Rodney P.O’Connor Mines Saint-Etienne Centre CMPDepartment of BioelectronicsGardanneFrance.2Panaxium SASAix-en-ProvenceFrance

Glioblastoma is a highly aggressive brain tumor,very invasive and thus difficult to eradicate with standard oncology *** treatments based on pulsed electric fields have proven to be a successful method to treat cancerous ***,they rely on stiff electrodes,which cause acute and chronic injuries,especially in soft tissues like the *** we demonstrate the feasibility of delivering pulsed electric fields with flexible electronics using an in ovo vascularized tumor *** show with fluorescence widefield and multiphoton microscopy that pulsed electric fields induce vasoconstriction of blood vessels and evoke calcium signals in vascularized glioblastoma spheroids stably expressing a genetically encoded fluorescence *** of the electric field delivery are compared with the measured influence of electric field effects on cell membrane integrity in exposed tumor *** results confirm the feasibility of flexible electronics as a means of delivering intense pulsed electric fields to tumors in an intravital 3D vascularized model of human glioblastoma.

关键词： injuries electronics stiff

Visible light photocatalysis in the synthesis of pharmaceutically relevant heterocyclic scaffolds

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Organic Chemistry Frontiers 2022年第5期9卷 1485-1507页

作者： Vishal Srivastava Pravin K.Singh Shraddha Tivari Praveen P.Singh Department of Chemistry CMP Degree CollegeUniversity of AllahabadPrayagraj 211002India Department of Chemistry United College of Engineering&ResearchNainiPrayagraj 211010India

Visible light and photoredox catalysis have emerged as a powerful and long-lasting tool for organic syn-thesis,demonstrating the importance of a variety of chemical bond formation *** products,physiologically active substances,medicines,and agrochemicals all contain heterocyclic *** impact of visible light-promoted chemistry on the functionalization of heterocycles as well as the syn-thesis and modification of heterocyclic compounds of medicinal importance is summarized in this review.

关键词： heterocyclic Visible synthesis

Fabrication and in vivo 2-photon microscopy validation of transparent PEDOT:PSS microelectrode arrays

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Microsystems & Nanoengineering 2022年第4期8卷 183-190页

作者： Gerwin Dijk Attila Kaszas Jolien Pas Rodney Philip O’Connor Mines Saint-Etienne Centre CMPDepartment of BioelectronicsGardanne 13541France Panaxium SAS Aix-en-Provence 13100France

Transparent microelectrode arrays enable simultaneous electrical recording and optical imaging of neuronal networks in the *** made of the conducting polymer poly(3,4-ethylenedioxythiophene)doped with polystyrene sulfonate(PEDOT:PSS)are transparent;however,device fabrication necessitates specific processes to avoid deterioration of the organic ***,we present an innovative fabrication scheme for a neural probe that consists of transparent PEDOT:PSS electrodes and demonstrate its compatibility with 2-photon *** electrodes show suitable impedance to record local field potentials from the cortex of mice and sufficient transparency to visualize GCaMP6f-expressing neurons underneath the PEDOT:PSS *** results validate the performance of the neural probe,which paves the way to study the complex dynamics of in vivo neuronal activity with both a high spatial and temporal resolution to better understand the brain.

关键词： material. transparent microelectrode

Nonlinear integrated photonics

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Photonics Research 2018年第5期6卷 I0024-I0025页

作者： ERIC CASSAN CHRISTIAN GRILLET DRAGOMIR N.NESHEV DAVID J.MOSS Centre for Nanosciences and Nanotechnologies (C2N) Paris-Sud University CNRS Senior research fellow continuing position Institut des Nanotechnologies de Lyon (INL)Ecole centrale de Lyon Nonlinear Physics Centre Australian National University Director of the Center for Micro-Photonics (cmp) Swinburne University of Technology

The field of nonlinear photonics is in full development. This special issue of Photonics Research takes you through the current issues of this fast-growing field of research, drawing on the current state of the art an... 详细信息

关键词： Nonlinear integrated photonics full development

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Organic transistor platform with integrated microfluidics for in-line multi-parametric in vitro cell monitoring

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Microsystems & Nanoengineering 2017年第1期3卷 184-195页

作者： Vincenzo F.Curto Bastien Marchiori Adel Hama Anna-Maria Pappa Magali P.Ferro Marcel Braendlein Jonathan Rivnay Michel Fiocchi George G.Malliaras Marc Ramuz Róisín M.Owens Department of Bioelectronics Ecole Nationale Supérieure des MinesCMP-EMSEMOC880 Avenue de MimetGardanne 13541France Flexible Electronics Department Ecole Nationale Supérieure des Mines CMP-EMSEMOC880 Avenue de MimetGardanne 13541France Department of Biomedical Engineering Northwestern UniversityEvanstonIL 60208USA

Future drug discovery and toxicology testing could benefit significantly from more predictive and multi-parametric readouts from in vitro *** the recent advances in the field of microfluidics,and more recently organ-on-a-chip technology,there is still a high demand for real-time monitoring systems that can be readily embedded with *** addition,multi-parametric monitoring is essential to improve the predictive quality of the data used to inform clinical studies that *** we present a microfluidic platform integrated with in-line electronic sensors based on the organic electrochemical *** goals are twofold,first to generate a platform to host cells in a more physiologically relevant environment(using physiologically relevant fluid shear stress(FSS))and second to show efficient integration of multiple different methods for assessing cell morphology,differentiation,and *** include optical imaging,impedance monitoring,metabolite sensing,and a wound-healing *** illustrate the versatility of this multi-parametric monitoring in giving us increased confidence to validate the improved differentiation of cells toward a physiological profile under FSS,thus yielding more accurate data when used to assess the effect of drugs or ***,this platform will enable high-content screening for in vitro drug discovery and toxicology testing and bridges the existing gap in the integration of in-line sensors in microfluidic devices.

关键词： bioelectronics in-line sensors in vitro microfluidics

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2005年上半年中国互联网产业市场分析

通信世界 2005年第38期 14-16页

作者：闫成印 cmp(中国)咨询有限公司

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国产手机成败反思

通信世界 2007年第25期 42-43页

作者：闫成印 cmp(中国)咨询有限公司

作为全球最大的市场,中国手机市场近年来越来越多地受到众多厂商的关注。在这一市场中,新入局的厂商甚众,出局的厂商也不在少数,即便是全球有名的老厂商也难逃厄运,在此背景下,国产手机厂商更是经历了崛起与下沉的风浪,生存与发展

关键词：国产手机厂商市场份额市场定位生存与发展品牌美誉度商人黑手机手机品牌