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Solving the inverse grating problem by white light interference Fourier scatterometry

light(Science & Applications) 2012年第1期1卷 17-23页

作者： Valeriano Ferreras Paz Sandy Peterhansel Karsten Frenner Wolfgang Osten Institute of Applied Optics Stuttgart University70569 StuttgartGermany SCoPE—Stuttgart Research Center of Photonic Engineering Stuttgart UniversityStuttgartGermany

Scatterometry is a well-established,fast and precise optical metrology method used for the characterization of sub-lambda periodic *** Fourier scatterometry method,by analyzing the Fourier plane,makes it possible to collect the angle-resolved diffraction spectrum without any mechanical *** improve the depth sensitivity of this method,we combine it with white light *** show the exemplary application of the method on a silicon line *** characterize the sub-lambda features of the grating structures,we apply a model-based reconstruction approach by comparing simulated and measured *** simulations are based on the rigorous coupled-wave analysis method.

关键词： Fourier scatterometry inverse problem optical sub-lambda metrology RCWA white light interference

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Review of Optical Fiber Sensor Network Technology Based on white light Interferometry

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Photonic Sensors 2021年第1期11卷 31-44页

作者： Wenchao LI Yonggui YUAN Jun YANG Libo YUAN The Key Lab of In-Fiber Integrated Optics Ministry Education of ChinaHarbin Engineering UniversityHarbin150001China Photonics Research Center School of Electronic Engineering and AutomationGuilin University of Electronics TechnologyGuilin541004China

Optical fiber sensor networks(OFSNs)provide powerful tools for large-scale buildings or long-distance sensing,and they can realize distributed or quasi-distributed measurement of temperature,strain,and other physical *** article provides some optical fiber sensor network technologies based on the white light interference *** discuss the key issues in the fiber white light interference network,including the topology structure of white light interferometric fiber sensor network,the node connection components,and evaluation of the maximum number of sensors in the network.A final comment about further development prospects of fiber sensor network is presented.

关键词： Optical fiber sensor white light interference optical fiber sensor network(OFSN) multiplexed sensing system

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Temperature Compensation for Fiber Optic Strain Sensor in Smart Structures

Temperature Compensation for Fiber Optic Strain Sensor in Sm...

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2009中国控制与决策会议

作者： Lang Li-ying~1,Gao Feng ~2 1.Hebei University of Engineering,Handan,Hebei province,056038,P.R...China 2.College of Information and Electrical Engineering,Hebei University of Engineering,Handan,Hebei province,056038,P.R..China

The applications of Fabry-Perot(F-P) fiber-optic white light interference strain sensor are mainly restricted by the cross-sensitivity effects of the cavity length changes,which caused by the changes of the temperature and *** this paper,the sensing principles of the white light interference F-P fiber-optic strain sensor,used to measure the smart structure,is briefly introducted,then the methods to eliminate or weaken the temperature sensitivity of is *** temperature compensation formula and project implementation are presented during the fiber-optic strain measurement. The temperature compensation method mentioned in this paper,can effectively removes the strain measurement error due to the temperature changes.

关键词： Fabry-Perot temperature compensation smart structures white light interference fiber optic sensor

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