Solving the inverse grating problem by white light interference Fourier scatterometry

作     者：Valeriano Ferreras Paz Sandy Peterhansel Karsten Frenner Wolfgang Osten 

作者机构：Institute of Applied OpticsStuttgart University70569 StuttgartGermany SCoPE—Stuttgart Research Center of Photonic EngineeringStuttgart UniversityStuttgartGermany 

出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)

年 卷 期：2012年第1卷第1期

页      面：17-23页

核心收录：

学科分类：07[理学] 0701[理学-数学] 070101[理学-基础数学] 

基　　金：We are thankful for the technical support given by Thomas Schoder.This work was supported by the German DFG-funded priority program(SPP1327)on‘Optically generated sub-100 nm structures for technical and bio-medical applications’within the subproject‘Development of a functional sub-100 nm 3D two-photon polymerization technique and optical characterization methods’and the DFG project‘Inverse-source and inverse-diffraction problems in photonics(OS111/32-1).’ 

主　　题：Fourier scatterometry inverse problem optical sub-lambda metrology RCWA white light interference 

摘      要：Scatterometry is a well-established,fast and precise optical metrology method used for the characterization of sub-lambda periodic *** Fourier scatterometry method,by analyzing the Fourier plane,makes it possible to collect the angle-resolved diffraction spectrum without any mechanical *** improve the depth sensitivity of this method,we combine it with white light *** show the exemplary application of the method on a silicon line *** characterize the sub-lambda features of the grating structures,we apply a model-based reconstruction approach by comparing simulated and measured *** simulations are based on the rigorous coupled-wave analysis method.