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Selective wet etch of a TaN metal gate with an amorphous-silicon hard mask

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Journal of Semiconductors 2010年第11期31卷 127-130页

作者：李永亮徐秋霞 Institute of Microelectronics Chinese Academy of Sciences

The appropriate wet etch process for the selective removal of TaN on the HfSiON dielectric with an amorphous-silicon（a-Si） hardmask is ***（NH4OH：H2O2：H2O）,which can achieve reasonable etch rates for metal gates and very high selectivity to high-k dielectrics and hardmask materials,is chosen as the TaN etchant. Compared with the photoresist mask and the tetraethyl orthosilicate（TEOS） hardmask,the a-Si hardmask is a better choice to achieve selective removal of TaN on the HfSiON dielectric because it is impervious to the SC1 etchant and can be readily etched with NH4OH solution without attacking the TaN and the HfSiON *** addition,the surface of the HfSiON dielectric is smooth after the wet etching of the TaN metal gate and a-Si hardmask removal,which could prevent device performance ***,the wet etching of TaN with the a-Si hardmask can be applied to dual metal gate integration for the selective removal of the first TaN metal gate deposition.

关键词： TaN wet etching metal gate high k dielectric hardmask integration

etching of quartz crystals in liquid phase environment:A review

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Nanotechnology and Precision Engineering 2024年第2期7卷 87-109页

作者： Yide Dong Yike Zhou Haizhou Huang Bosong Zhang Xihan Li Kaiwen Chen Litao Sun Guangbin Dou SEU-FEI Nano-Pico Center Key Laboratory of MEMS of Ministry of EducationSoutheast UniversityNanjing 210096People’s Republic of China Nanjing Jingxin Optoelectronics Research Institute Nanjing 210096People’s Republic of China

Quartz crystals are the most widely used material in resonant sensors,owing to their excellent piezoelectric and mechanical *** the development of portable and wearable devices,higher processing efficiency and geometrical precision are *** etching has been proven to be the most efficient etching method for large-scale production of quartz devices,and many wet etching approaches have been developed over the ***,until now,there has been no systematic review of quartz crystal etching in liquid phase ***,this article provides a comprehensive review of the development of wet etching processes and the achievements of the latest research in thisfield,covering conventional wet etching,additive etching,laser-induced backside wet etching,electrochemical etching,and electrochemical discharge *** each technique,a brief overview of its characteristics is provided,associated problems are described,and possible solutions are *** review should provide an essential reference and guidance for the future development of processing strategies for the manufacture of quartz crystal devices.

关键词： Quartz crystal Materials processing wet etching Microfabrication Quartz MEMS

Optical properties of highly photosensitive hybrid sol-gel films

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Chinese Optics Letters 2010年第4期8卷 435-438页

作者：毛靖沈伟东尹伊章岳光刘旭 State Key Laboratory of Modern Optical Instrumentation Zhejiang University

A new organic-inorganic hybrid material,which shows photo-induced reduction of refractive index as well as volume contraction,is prepared using a sol-gel *** material is coated on a Si substrate by spin-coating to manufacture *** irradiated by ultraviolet（UV） light with a deuterium lamp for 5 h, the thickness of film decreases largely by 55%,and the refractive index of film changes from 1.484 to 1.445 at 550 *** film＇s optical thickness exhibits an exponential change with the increasing irradiation *** photo-patternning of the organic-inorganic hybrid film without any further process （wet etching and thermal curing） is performed utilizing the volume contraction on UV-light irradiation. This film has potential applications for fabrication of patterned filter array and apodizing filter by direct light writing,and also demonstrates good temperature stability and immunity to visible light exposure.

关键词： Deuterium Gels Hybrid materials Irradiation Light refraction Refractive index Refractometers Sol gel process Sol gels Sols wet etching

Light-extraction enhancement of freestanding GaN-based flip-chip light-emitting diodes using two-step roughening methods

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Journal of Semiconductors 2013年第11期34卷 49-52页

作者：安铁雷孙波魏同波赵丽霞段瑞飞廖元勋李晋闽伊福廷 Institute of Semiconductors Chinese Academy of Sciences Institute of High Energy Physics Chinese Academy of Sciences

The light extraction enhancement of freestanding GaN-based flip-chip light-emitting diodes （FS- FCLEDs） using two-step roughening methods is investigated. The output power of LEDs fabricated by using one-step and two-step roughening methods are compared. The results indicate that two-step roughening meth- ods show more potential for light extraction. Compared with flat FS-FCLEDs, the output power of FS-FCLEDs with a nanotextured hemisphere surface shows an enhancement of 90.7%.

关键词： freestanding GaN flip chip LED CsCI wet etching light extraction

Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

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Journal of Shanghai Jiaotong university(Science) 2017年第3期22卷 274-279页

作者：邢亚亮张卫平唐健孙殿竣刘朝阳欧彬 National Key Laboratory of Science and Technology on Micro/Nano Fabrication Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education and Shanghai Key Laboratory of Navigation and Location-Based ServicesDepartment of Micro/Nano ElectronicsSchool of Electronic Information and Electrical EngineeringShanghai Jiao Tong UniversityShanghai 200240China

A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4 mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the *** corrosion solutions with different ratios of HF solution to NH4 F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch(BOE)technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 k Hz of rocking mode which is close to the simulated *** such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.

关键词： hemispherical resonator wet etching glassblowing fused silica

Dry electrode for the measurement of biopotential signals

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Science China(Information Sciences) 2011年第11期54卷 2435-2442页

作者： WANG Yu 1,2,PEI WeiHua 2,GUO Kai 2,GUI Qiang 2,LI XiaoQian 2,CHEN HongDa 2 & YANG JianHong 11 Institute of Microelectronics,School of Physical Science and Technology,Lanzhou University Lanzhou 730000,China 2 State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Institute of Microelectronics School of Physical Science and Technology Lanzhou University Lanzhou China State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing China

This paper introduces a kind of silicon-based dry electrode for measuring biological *** uses microneedle arrays to penetrate into the stratum corneum to reduce skin *** dry electrode requires neither skin preparation nor the electrolytic gel,is easy to use and causes no skin *** different technologies are chosen to manufacture microneedle arrays of dry *** is deep dry etching combined with isotropic wet *** other is mechanical dicing combined with chemical wet etching (including isotropic wet etching and anisotropic wet etching).Microneedle arrays are coated with metal and divided into 25 mm 2 as dry electrode *** testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 Hz-10 kHz frequency *** steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography.

关键词： dry electrode microneedle array dry etching wet etching EEG

Holographic laser fabrication of 3D artificial compound μ-eyes

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Light(Advanced Manufacturing) 2023年第4期4卷 1-9页

作者： Lei Wang Wei Gong Xiao-Wen Cao Yan-Hao Yu Saulius Juodkazis Qi-Dai Chen Jilin University State Key Laboratory of Integrated OptoelectronicsCollege of Electronic Science and EngineeringChangchun130012China Optical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials(SEAM) School of ScienceSwinburne University of TechnologyHawthornVictoria 3122Australia Melbourne Centre for Nanofabrication 151 Wellington RoadClayton VIC3168Australia

The demand for fast optical image acquisition without movable optical elements(e.g.,for self-driving car technology)can be met using bioinspired 3D compound eyes.3D laser processing strategies enable designable 3D structuring but suffer from low fabrication efficiency,which significantly limits their applications in producing complex 3D optical ***,we demonstrate a versatile yet simple wet-etching-assisted holographic laser fabrication method for the development of 3D compound *** compoundμ-eyes can be readily fabricated by programming a 3D spot array for the parallel ablation of a curved fused silica surface,followed by controllable etching in a hydrofluoric(HF)acid solution.A 3D-concave-lens array made on a curved surface over an area of 100μm cross-section with each lenslet of 10μm radius was fabricated with high fidelity and excellent imaging/focusing *** resultant 3D-concave-lens can serve as a hard template for the mass production of soft compound eyes through soft ***,using a generative adversarial network(GAN)-based deep learning algorithm,image restoration was conducted for each lenslet,which retained a large field of view and significantly improved image *** method provides a simple solution to the requirements of compoundμ-eyes required by Industry 4.0.

关键词： Holographic laser fabrication wet etching compound eye Micro-optics Fast imaging Imaging restoration

Monolithic thin film lithium niobate electro-optic modulator with over 110 GHz bandwidth

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Chinese Optics Letters 2022年第2期20卷 148-152页

作者： Fan Yang Xiansong Fang Xinyu Chen Lixin Zhu Fan Zhang Zhangyuan Chen Yanping Li State Key Laboratory of Advanced Optical Communication Systems and Networks Department of ElectronicsPeking UniversityBeijing 100871China Frontiers Science Center for Nano-optoelectronics Peking UniversityBeijing 100871China

High-performance thin film lithium niobate(LN) electro-optic modulators with low cost are in demand. Based on photolithography and wet etching, we experimentally demonstrate a thin film LN Mach–Zehnder modulator with a 3 d B bandwidth exceeding 110 GHz, which shows the potential of boosting the throughput and reducing cost. The fabricated modulator also exhibits a comparable low half-wave voltage-length product of ~2.37 V · cm, a high extinction ratio of >23 d B, and the propagation loss of optical waveguides of ~0.2 d B/cm. Besides, six-level pulse amplitude modulation up to 250 Gb/s is successfully achieved.

关键词： lithium niobate electro-optic modulator high bandwidth photolithography wet etching

Fabrication of air-bridged Kerr nonlinear polymer photonic crystal slab structures in near-infrared region

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Chinese Optics Letters 2012年第11期10卷 74-76页

作者：蒙自明钟晓岚王晨李志远 Laboratory of Optical Physics Institute of PhysicsChinese Academy of Sciences

Fabrication details of air-bridged Kerr nonlinear polymer photonic crystal slab structures are presented. Both the two-dimensional photonic crystal slab and the one-dimensional nanobeam structures are fabricated using direct focused ion beam etching and subsequent wet chemical etching. The scanning electron microscopy images show the uniformity and homogeneity of the cylindrical air holes. The optical measurement in the near-infrared region is implemented using the tapered fiber coupling method, and the results agree with the numerical calculations by using the three-dimensional finite-difference time-domain method.

关键词： Finite difference time domain method Infrared devices Optical data processing Photonic crystals Scanning electron microscopy Time domain analysis wet etching