Fabrication of air-bridged Kerr nonlinear polymer photonic crystal slab structures in near-infrared region

作     者：蒙自明 钟晓岚 王晨 李志远 

作者机构：Laboratory of Optical PhysicsInstitute of PhysicsChinese Academy of Sciences 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2012年第10卷第11期

页      面：74-76页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 081001[工学-通信与信息系统] 

基　　金：supported by the National Basic Research Foundation of China(No.2011CB922002) the Knowledge Innovation Program of Chinese Academy of Sciences(No.Y1V2013L11) 

主　　题：Finite difference time domain method Infrared devices Optical data processing Photonic crystals Scanning electron microscopy Time domain analysis Wet etching 

摘      要：Fabrication details of air-bridged Kerr nonlinear polymer photonic crystal slab structures are presented. Both the two-dimensional photonic crystal slab and the one-dimensional nanobeam structures are fabricated using direct focused ion beam etching and subsequent wet chemical etching. The scanning electron microscopy images show the uniformity and homogeneity of the cylindrical air holes. The optical measurement in the near-infrared region is implemented using the tapered fiber coupling method, and the results agree with the numerical calculations by using the three-dimensional finite-difference time-domain method.