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High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

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Light(Science & Applications) 2013年第1期2卷 9-12页

作者： Kotaro Obata Ayman El-Tamer Lothar Koch Ulf Hinze Boris N Chichkov Laser Zentrum Hannover e.V. 30419 HannoverGermany

We developed a novel two-photon polymerization(2PP)configuration for fabrication of high-aspect three-dimensional(3D)structures,with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive *** method is based on a modified optical 2PP setup,where a microscope objective(1003 high N.A.),immersion oil and cover glass can be moved together into the photosensitive material,resulting in an effective higher and wider objective working range(WOW-2PP).The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution.3D structures with a height of 7 mm are demonstrated,which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

关键词： femtosecond laser large-scale structuring laser material processing photochemistry two-photon polymerization

Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

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Light(Science & Applications) 2012年第1期1卷 123-126页

作者： Wei Xiong Yun Shen Zhou Xiang Nan He Yang Gao Masoud Mahjouri-Samani Lan Jiang Tommaso Baldacchini Yong Feng Lu Department of Electrical Engineering University of Nebraska-LincolnLincolnNE 68588-0511USA Department of Mechanical and Automation Engineering Beijing Institute of TechnologyBeijing 100081China Technology and Applications Center Newport CorporationIrvineCA 92606USA

Modern three-dimensional nanofabrication requires both additive and subtractive ***,both processes are largely isolated and generally regarded as incompatible with each *** this study,we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond(fs)laser multiphoton *** demonstrate the new capability,submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully *** method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures,promising for a wide range of applications in integrated optics,microfluidics and microelectromechanical systems.

关键词： femtosecond laser direct writing femtosecond laser multiphoton ablation micro-/nanofabrication two-photon polymerization

Isotropic sintering shrinkage of 3D glass-ceramic nanolattices:backbone preforming and mechanical enhancement

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International Journal of Extreme Manufacturing 2024年第2期6卷 418-426页

作者： Nianyao Chai Yunfan Yue Xiangyu Chen Zhongle Zeng Sheng Li Xuewen Wang Center of Femtosecond Laser Manufacturing for Advanced Materials and Devices State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingWuhan University of TechnologyWuhan 430070People’s Republic of China National Energy Key Laboratory for New Hydrogen-Ammonia Energy Technologies Foshan Xianhu LaboratoryFoshan 528000People’s Republic of China International School of Materials Science and Engineering Wuhan University of TechnologyWuhan 430070People’s Republic of China

There is a perpetual pursuit for free-form glasses and ceramics featuring outstanding mechanical properties as well as chemical and thermal *** is a promising idea to shape inorganic materials in three-dimensional(3D)forms to reduce their weight while maintaining high mechanical properties.A popular strategy for the preparation of 3D inorganic materials is to mold the organic–inorganic hybrid photoresists into 3D micro-and nano-structures and remove the organic components by subsequent ***,due to the discrete arrangement of inorganic components in the organic-inorganic hybrid photoresists,it remains a huge challenge to attain isotropic shrinkage during ***,we demonstrate the isotropic sintering shrinkage by forming the consecutive–Si–O–Si–O–Zr–O–inorganic backbone in photoresists and fabricating 3D glass–ceramic nanolattices with enhanced mechanical *** femtosecond(fs)laser is used in two-photon polymerization(TPP)to fabricate 3D green body *** subsequent sintering at 1000℃,high-quality 3D glass–ceramic microstructures can be obtained with perfectly intact and smooth ***-suit compression experiments and finite-element simulations reveal that octahedral-truss(oct-truss)lattices possess remarkable adeptness in bearing stress concentration and maintain the structural integrity to resist rod bending,indicating that this structure is a candidate for preparing lightweight and high stiffness glass–ceramic nanolattices.3D printing of such glasses and ceramics has significant implications in a number of industrial applications,including metamaterials,microelectromechanical systems,photonic crystals,and damage-tolerant lightweight materials.

关键词： 3D printing isotropic shrinkage femtosecond laser two-photon polymerization structural glass-ceramics

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

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photonic Sensors 2024年第2期14卷 89-99页

作者： Famei WANG Changrui LIAO Mengqiang ZOU Dejun LIU Haoqiang HUANG Chao LIU Yiping WANG Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong ProvinceCollege of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China Shenzhen Key Laboratory of photonic Devices and Sensing Systems for Internet of Things Guangdong and Hong Kong Joint Research Centre for Optical Fibre SensorsState Key Laboratory of Radio Frequency Heterogeneous IntegrationShenzhen UniversityShenzhen 518060China School of Electronics Science Northeast Petroleum UniversityDaqing 163318China

Benefiting from the great advances of the femtosecond laser two-photon polymerization(TPP)technology,customized microcantilever probes can be accurately 3-dimensional(3D)manufactured at the nanoscale size and thus have exhibited considerable potentials in the fields of microforce,micro-vibration,and microforce *** this work,a controllable microstructured cantilever probe on an optical fiber tip for microforce detection is demonstrated both theoretically and *** static performances of the probe are firstly investigated based on the finite element method(FEM),which provides the basis for the structural *** proposed cantilever probe is then 3D printed by means of the TPP *** experimental results show that the elastic constant k of the proposed cantilever probe can be actively tuned from 2.46N/m to 62.35N/*** force sensitivity is 2.5nm/μN,the Q-factor is 368.93,and the detection limit is ***,the mechanical properties of the cantilever probe can be flexibly adjusted by the geometric configuration of the ***,it has an enormous potential for matching the mechanical properties of biological samples in the direct contact mode.

关键词： Optical fiber sensor microforce sensing microstructured cantilever two-photon polymerization

Femtosecond laser 3D printed micro objective lens for ultrathin fiber endoscope

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Fundamental Research 2024年第1期4卷 123-130页

作者： Bozhe Li Changrui Liao Zhihao Cai Jie Zhou Cong Zhao Liqing Jing Jiaqi Wang Cong Xiong Lei Xu Ying Wang Yiping Wang Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province College of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China Shenzhen Key Laboratory of photonic Devices and Sensing Systems for Internet of Things Guangdong and Hong Kong Joint Research Centre for Optical Fibre SensorsShenzhen UniversityShenzhen 518060China School of Electronic and Communication Engineering Shenzhen Polytechnic UniversityShenzhen 518055China

The most important optical component in an optical fiber endoscope is its objective *** achieve a high imaging performance level,the development of an ultra-compact objective lens is thus the key to an ultra-thin optical fiber *** this work,we use femtosecond laser 3D printing to develop a series of micro objective lenses with different optical *** imaging resolution and field-of-view performances of these printed micro objective lenses are investigated via both simulations and *** the first time,multiple micro objective lenses with different fields of view are printed on the end face of a single imaging optical fiber,thus realizing the perfect integration of an optical fiber and objective *** work demonstrates the considerable potential of femtosecond laser 3D printing in the fabrication of micro-optical systems and provides a reliable solution for the development of an ultrathin fiber endoscope.

关键词： Femtosecond laser two-photon polymerization 3D printing Micro objective lens Fiber endoscope

Generation and application of structured beams based on double-phase holograms[Invited]

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Chinese Optics Letters 2023年第11期21卷 3-9页

作者：贾而穑谢辰杨悦胡明列 Ultrafast Laser Laboratory Key Laboratory of Opto-electronic Information Technical Science of Ministry of EducationSchool of Precision Instruments and Opto-electronics EngineeringTianjin UniversityTianjin 300072China

The manipulation of structured light beams requires simultaneous spatial modulation of amplitude and *** on the double-phase holography(DPH)algorithm,we demonstrate an efficient reconstruction of Bessel beams with arbitrary onaxis ***,the off-axis DPH method enables more than doubled laser energy utilization compared with the widelyused off-axis phase wrapping modulation *** DPH algorithm is also used in two-photon polymerization to enable the rapid fabrication of microtube arrays,ortho-hexagonal scaffolds,and 2D patterned *** work gives experimental proof to show the powerful feasibility of the DPH method in constructing economic adaptive laser processing systems.

关键词： double-phase hologram structured beam two-photon polymerization

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

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Light(Science & Applications) 2015年第1期4卷 569-576页

作者： Dong Wu Jian Xu Li-Gang Niu Si-Zhu Wu Katsumi Midorikawa Koji Sugioka Laser Technology Laboratory RIKENSaitama 351-0198Japan State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China

The high-precision integration of three-dimensional(3D)microoptical components into microfluidics in a customizable manner is crucial for optical sensing,fluorescence analysis,and cell detection in optofluidic applications;however,it remains challenging for current microfabrication *** paper reports the in-channel integration of flexible two-dimensional(2D)and 3D polymer microoptical devices into glass microfluidics by developing a novel technique:flat scaffold-supported hybrid femtosecond laser microfabrication(FSS-HFLM).The scaffold with an optimal thickness of 1–5 μm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet *** a proof of demonstration,two types of typical microoptical devices,namely,2D Fresnel zone plates(FZPs)and 3D refractive microlens arrays(MLAs),are *** devices exhibit multicolor focal spots,elongated(>three times)focal length and imaging of the characters‘RIKEN’in a liquid *** resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%.An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

关键词： cell counting 3D optofluidic chips hybrid femtosecond laser microfabrication microlens arrays two-photon polymerization

Femtosecond laser fabrication of 3D templates for mass production of artificial compound eyes

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Nanotechnology and Precision Engineering 2019年第3期2卷 110-117页

作者： Guang-Xin Jin Xin-Yu Hu Zhuo-Chen Ma Chun-He Li Yong-Lai Zhang Hong-Bo Sun State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China State Key Laboratory of Precision Measurement Technology&Instruments Department of Precision InstrumentTsinghua UniversityBeijing 100084China

Compound eyes are unique optical imaging systems that consist of numerous separate light-sensitive units(ommatidia).Attempts have been made to produce artificial compound eyes via advanced 3 D *** them,femtosecond laser direct writing(FsLDW)technology has emerged as an effective strategy due to its distinct advantages in 3 D designable and high precision fabrication ***,the point-by-point scanning process results in a very low fabrication efficiency,limiting the practical applications of the FsLDW *** solve this problem,we propose a high-efficiency method for the mass production of 3 D artificial compound eyes using a photopolymer template fabricated by *** resultant 3 D SU-8 compound eye templates could be used to replicate polydimethylsiloxane(PDMS)compound eyes many times(over 50 times)with a highly improved efficiency(nearly 20 times higher than the efficiency of direct fabrication using the point-by-point FsLDW).The PDMS replicas showed good focusing and imaging *** anticipate that this method may serve as an enabler for the mass production of 3 D artificial compound eyes and promote their practical applications in the near future.

关键词： Compound eyes two-photon polymerization Femtosecond laser PDMS casting

Application of Heating Type Micro-Assembly Device in two-photon Micromachining

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photonic Sensors 2021年第3期11卷 362-370页

作者： Jintao Xia Afei Ding Pan Wang Hang Wang Yinwei Gu Weidong Tao Gang Wang School of Physical Science and Technology Ningbo UniversityNingbo315211China

The development of micro-fabrication and micro-assembly technology is indispensable for the future manufacturing of miniaturized,functional,and integrated *** paper proposes a planar micro-assembly technology to make the assembly of micro-objects ***,delicate three-dimensional(3D)structures were fabricated on glass and silicon slice substrates using femtosecond laser two-photon polymerization(2PP).Secondly,transparent fluorescent scintillation ceramic powder,referred to as fluorescent powder,was assembled using a laboratory-made 3D moving heating micro-operator into a microstructure on a glass substrate,and this device is used to assemble the graphene powder into the microstructure on the silicon slice *** fluorescence spectra and Raman spectra characterizations of the fluorescent powder and graphene powder in the microstructure were carried out by using excitation light at 405 nm and 532 nm,*** to the above results,it can be concluded that the powder properties of the fluorescent powder and graphene powder assembled into the microstructure were not *** experimental device could not only assemble many micron-sized powder materials into hollow microstructures of arbitrary shape but also joined microstructures with different materials and characteristics to form a complex hybrid microstructure system.

关键词： two-photon polymerization micro-assembly fluorescence graphene