High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

作     者：Kotaro Obata Ayman El-Tamer Lothar Koch Ulf Hinze Boris N Chichkov 

作者机构：Laser Zentrum Hannover e.V.30419 HannoverGermany 

出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)

年 卷 期：2013年第2卷第1期

页      面：9-12页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：This work was supported by the Deutsche Forschungsgemeinschaft(German Research Foundation)Cluster of Excellence REBIRTH and EU/FP7 project Phocam.We thank E Fadeeva and J Koch for helpful technical discussions 

主　　题：femtosecond laser large-scale structuring laser material processing photochemistry two-photon polymerization 

摘      要：We developed a novel two-photon polymerization(2PP)configuration for fabrication of high-aspect three-dimensional(3D)structures,with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive *** method is based on a modified optical 2PP setup,where a microscope objective(1003 high N.A.),immersion oil and cover glass can be moved together into the photosensitive material,resulting in an effective higher and wider objective working range(WOW-2PP).The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution.3D structures with a height of 7 mm are demonstrated,which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.