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A Novel 2D Piezo-Nanopositioning Stage Based on triangle amplifier mechanism

Transactions of Nanjing University of Aeronautics and Astronautics 2017年第1期34卷 1-8页

作者： Liu Xuerui Huang Weiqing Sun Mengxin State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and AstronauticsNanjing 210016P.R.China

To satisfy the demand on dynamic performance and load characteristics of piezoelectric actuators in aeronautics and astronautics fields,a novel 2Dpiezo-nanopositioning stage utilizing a triangle amplifier mechanism is *** stage is driven by piezoelectric rhombic units in both X and Ydirections,which is composed of four piezoelectric *** static model develops the relationships among output force,displacement,static stiffness and the structure parameters of the *** experimental results of the prototype show that the output performances in X and Ydirections are similar and both of them are within an 8% deviation from the theoretical *** stroke of the stage reaches 41.6μm and 42.9μm in Xand Ydirections,respectively,and is directly proportional to the amplitude of the input sinusoidal voltage 10 ***,the nano-positioning stage is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic,whose minimum output displacement step is 50 nm.

关键词： triangle amplifier mechanism flexure hinges piezoelectric stacks bidirectional driving

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A NOVEL 2-D PIEZO-NANOPOSITIONING STAGE BASED ON triangle amplifier mechanism

A NOVEL 2-D PIEZO-NANOPOSITIONING STAGE BASED ON TRIANGLE AM...

引用

2016年全国压电和声波理论及器件应用研讨会

作者： Xue-rui LIU Wei-qing HUANG Yin WANG State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics College of Mechanical Engineering and Automation Huaqiao University

ISBN: (纸本)9781509011902

Background, Motivation and Objective Due to their high resolution and positioning accuracy, piezo-nanoposititioning stages are widely used in precision and ultra-precision fields. A nano-positioning platform with large travel range and bidirectional symmetrical output characteristic is proposed. Statement of Contribution/Methods Theoretical static model develops the relationships among output force, displacement, static stiffness and the structure parameters of the platform. Static analysis of the platform is carried out by the finite element software ANSYS workbench. Finally, the theoretical and the finite element solution are verified by experiments. Results The experimental results of the prototype show that the output performances in X and Y direction are similar and both of them are within an 8% deviation from the theoretical value. The stroke of the stage reaches to 41.6μm and 42.9μm in X and Y directions respectively and is directly proportional to the amplitude of the input sinusoidal voltage of 10 Hz. And the minimum output displacement step is 50 nm. Discussion and Conclusions The nano-positioning stage designed is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic, with high positioning precision.

关键词： triangle amplifier mechanism Flexure hinge Piezoelectric stack Bidirectional driving

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