A Novel 2D Piezo-Nanopositioning Stage Based on Triangle Amplifier Mechanism

作     者：Liu Xuerui Huang Weiqing Sun Mengxin 

作者机构：State Key Laboratory of Mechanics and Control of Mechanical StructuresNanjing University of Aeronautics and AstronauticsNanjing 210016P.R.China 

出 版 物：《Transactions of Nanjing University of Aeronautics and Astronautics》 (南京航空航天大学学报（英文版）)

年 卷 期：2017年第34卷第1期

页      面：1-8页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：supported partly by the Project on Integration of Industry,Education and Research of China Aviation Industry Corp.(No.CXY2013NH09) the National Natural Science Foundation of China(No.51375224) 

主　　题：triangle amplifier mechanism flexure hinges piezoelectric stacks bidirectional driving 

摘      要：To satisfy the demand on dynamic performance and load characteristics of piezoelectric actuators in aeronautics and astronautics fields,a novel 2Dpiezo-nanopositioning stage utilizing a triangle amplifier mechanism is *** stage is driven by piezoelectric rhombic units in both X and Ydirections,which is composed of four piezoelectric *** static model develops the relationships among output force,displacement,static stiffness and the structure parameters of the *** experimental results of the prototype show that the output performances in X and Ydirections are similar and both of them are within an 8% deviation from the theoretical *** stroke of the stage reaches 41.6μm and 42.9μm in Xand Ydirections,respectively,and is directly proportional to the amplitude of the input sinusoidal voltage 10 ***,the nano-positioning stage is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic,whose minimum output displacement step is 50 nm.