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3D nonlinear photolithography of tin oxide ceramics via femtosecond laser

Science China Materials 2021年第6期64卷 1477-1484页

作者： Nianyao Chai Yanan Liu Yunfan Yue Ping Wei Xuewen Wang Junjie Zhao Qi Zhang Fuzhi Huang Zhongle Zeng Zongsong Gan Liqiang Mai Yibing Cheng State Key Laboratory of Advanced Technology for Materials Synthesis and Processing International School of Materials Science and EngineeringWuhan University of TechnologyWuhan 430070China Foshan Xianhu Laboratory of the Advanced Energy Science and Technology Guangdong LaboratoryFoshan 528216China Wuhan National Laboratory for Optoelectronics Huazhong University of Science and TechnologyWuhan 430074China

As a wide band gap semiconductor material,tin oxide(SnO_(2))has been widely used in gas sensing,optoelectronics and *** complex micro and nanoscale threedimensional(3D)geometric structures endow the conventional SnO_(2)ceramics with novel properties and ***,ceramics cannot be cast or machined easily due to their high mechanical toughness and *** additive manufacturing opens a great opportunity for flexibly geometrical shaping,while the arbitrary shaping of SnO_(2)ceramics at micro and nanoscale is always a ***,preceramic monomers which can be polymerized under ultrafast laser irradiation,were utilized to form complex and arbitrary 3D preceramic polymer *** calcination treatment,these green-body structures could be converted into pure high-dense SnO_(2)ceramics with uniform shrinkage,and the feature size was down to *** electron microscopy(TEM)analysis displays that the printed SnO_(2)ceramic nanostructures can be nanocrystallized with grain sizes of 2.5±0.4 *** work provides the possibility of manufacturing 3D SnO_(2)ceramic nanostructures arbitrarily with sub-100 nm resolution,thus making it promising for the applications of SnO_(2)in different fields.

关键词： tin oxide ceramics nonlinear photolithography femtosecond laser

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